A pressure sensor device and a method for testing the pressure sensor device is provided. The pressure sensor device includes a first pressure sensor cell having a first capacitance value, and a second pressure sensor cell having a second capacitance value, the second capacitance value being different from the first capacitance value. In one embodiment, the method includes determining a temperature coefficient offset to test for faults in the pressure sensor device. In another embodiment, the method includes determining a differential mode calculation and a common mode calculation. A fault exists if the differential and common mode calculations do not agree.

Provided is a pressure sensor for detecting the pressure of liquid flowing in a main flow path, including: an introduction flow path to which liquid is introduced from the main flow path; a pressure detection element having a pressure receiving surface and for detecting the pressure of liquid received by the pressure receiving surface in the introduction flow path; a diaphragm provided in a downstream-side end part of the introduction flow path and for transferring the pressure of the liquid to the pressure receiving surface while isolating a contact between the liquid in the introduction flow path and the pressure receiving surface; and a leak sensor for detecting a leakage of liquid into an internal space in communication with the pressure receiving surface.

Provided are: a vacuum gauge that, with a simple configuration, can accurately diagnose the degree of contamination of the vacuum gauge; and a contamination diagnosis method that, with a simple process, can accurately diagnose the degree of contamination of a vacuum gauge. Provided is a cold cathode ionization vacuum gauge that has a normal operation mode and a contamination diagnosis mode, the cold cathode ionization vacuum gauge comprising: an anode 1 and a cathode 3 that are for measuring vacuum pressure in the normal operation mode; an anode 7 and the cathode 3 that are for measuring the vacuum pressure in the contamination diagnosis mode; and a controller 10 that compares the size of a current measured between the anode 7 and the cathode 3 and the size of a current measured between the anode 1 and the cathode 3.

A calibration system for calibrating pressure sensor comprises communication pipe, base, inlet valve, outlet valve, pump, inlet pipe, heater and reference pressure sensor. The communication pipe has first and second openings. The base comprises chamber body and outlet being disposed at the chamber body. The inlet valve is disposed at the first opening. The chamber body is connected to the second opening so as to define a space between the inlet valve and the outlet valve. The heater is to heat a fluid in the space. The reference pressure sensor is configured to measure a pressure of the fluid. The at least one target pressure sensor is detachably mounted on the chamber body via the base so as to measure the pressure of the fluid in the space.

A sensor module that includes an inertial sensor and an abnormality determination unit that determines that the inertial sensor is abnormal when a structural resonance frequency at the first time point and a structural resonance frequency at the second time point are separated by a predetermined value or more.

The present invention relates to a method and to an apparatus for continuously monitoring the membrane coupling in a pressure measurement system in a extracorporeal circuit of a blood treatment machine. The invention enables the continuous monitoring of the functionality of the pressure measurement system without an interruption of any blood treatment being necessary.

A sensor device includes a pressure-temperature detection unit and a signal processing circuit. The sensor device is configured to detect abnormalities by changing a supply voltage supplied to the pressure-temperature detection unit and to the signal processing circuit, and by monitoring changes in a pressure signal and in a temperature signal caused by changing the supply voltage.

A method for assessing the state of a sensor. The sensor comprises a deflectable micromechanical sensor structure for detecting a physical input variable and converting the physical input variable into an electrical sensor signal. A medium surrounding the sensor acts on the micromechanical sensor structure. The micromechanical sensor structure is deflectable using an excitation signal. The method includes: generating an excitation signal using a driver unit; outputting the excitation signal to the micromechanical sensor structure; deflecting the micromechanical sensor structure using the excitation signal; detecting a response behavior of the micromechanical sensor structure in response to the excitation signal; comparing the response behavior to a reference behavior to determine a measure of deviation for the response behavior in relation to the reference behavior; and assessing, based on the measure of deviation, the state of the sensor with respect to the presence of a deposit.

A pressure sensor device has: a pressure detection structure provided in a first die of semiconductor material; a package, configured to internally accommodate the pressure detection structure in an impermeable manner, the package having a base structure and a body structure, arranged on the base structure, with an access opening in contact with an external environment and internally defining a housing cavity, in which the first die is arranged covered with a coating material. A piezoelectric transduction structure, of a ultrasonic type, is accommodated in the housing cavity, in order to allow detection of foreign material above the coating material and within the package. In particular, the piezoelectric transduction structure is integrated in the first die, which comprises a first portion, wherein the pressure detection structure is integrated, and a second portion, separate and distinct from the first portion, wherein the piezoelectric transduction structure is integrated.

A respiratory apparatus evaluates accuracy of a pressure sensor, such as when only a single pressure sensor is provided. The accuracy of the pressure sensor may be assessed based on pressure measurement obtained from the pressure sensor and a subordinate or secondary characteristic of the respiratory device such as altitude or atmospheric pressure. A controller or processor may calculate the altitude of the respiratory device based in part on the pressure measurement. In some embodiments, the assessment of the pressure sensor may involve an evaluation of the calculated altitude. In some cases, the assessment of the pressure sensor may involve determining an estimated pressure based on a calculated altitude, and comparing the pressure measurement obtained from the pressure sensor with the estimated pressure.