A test appliance and a method for testing a mirror, e.g., a mirror of a microlithographic projection exposure apparatus. The test appliance has a computer-generated hologram (CGH), and a test can be carried out on at least a portion of the mirror by way of an interferometric superposition of a test wave that is directed onto the mirror by this computer-generated hologram and a reference wave. Here, the computer-generated hologram (CGH) (120, 320) is designed in such a way that, during operation of the appliance, it provides a first test wave for testing a first portion of the mirror (101, 301) by interferometric superposition with a reference wave in a first position of the mirror (101, 301) and at least a second test wave for testing a second portion of the mirror (101, 301) by interferometric superposition with a reference wave in a second position of the mirror (101, 301).

An extreme ultraviolet (EUV) collector inspection apparatus and method capable of precisely inspecting a contamination state of an EUV collector and EUV reflectance in accordance with the contamination state are provided. The EUV collector inspection apparatus includes a light source arranged in front of an EUV collector to be inspected and configured to output light in a visible light (VIS) band from UV rays, an optical device configured to output narrowband light from the light, and a camera configured to perform imaging from an UV band to a VIS band. An image by wavelength of the EUV collector is obtained by using the optical device and the camera and a contamination state of the EUV collector is inspected.

The present invention relates to a visual efficacy determining method for non-colored objects in different light environments, comprising: a) setting light environment; b) placing an object for performing visual recognition of a driver; c) resetting the light environment, and repeating the step b); d) processing visual recognition information data obtained after experiments, and establishing a correlating relationship between visual recognition time and color temperature, color rendering index and brightness parameters of the light environment; and e) performing visual efficiency analysis according to the visual recognition information data processing results. The present invention further provides a system for implementing the visual efficacy determining method for non-colored objects in different light environments, wherein the system comprises a simulated tunnel middle section subsystem, a testing subsystem and a data processing subsystem. According to the method and the system disclosed by the present invention, visual efficacy analysis is performed on the visual influence of the light environment setting of the illumination of a night road and a tunnel middle section on the driver, and good guidance standards are provided for the reasonable and efficient setting of the color temperature, color rendering index and average brightness of a lighting device.

A spheroidal mirror reflectivity measuring apparatus for extreme ultraviolet light may include an extreme ultraviolet light source, an optical system, and a first photosensor. The extreme ultraviolet light source may be configured to output extreme ultraviolet light to a spheroidal mirror that includes a spheroidal reflection surface. The optical system may be configured to allow the extreme ultraviolet light to travel to the spheroidal reflection surface via a first focal position of the spheroidal mirror. The first photosensor may be provided at a second focal position of the spheroidal mirror, and may be configured to detect the extreme ultraviolet light that has passed through the first focal position and then has been reflected by the spheroidal reflection surface.

The invention relates to a portable reflectometer and to a method for characterizing the collector mirrors used in solar power plants for the in-field characterization of reflection coefficients. The equipment includes all of the components required for this measurement, such as a module to measure the reflection coefficient of the mirror, an electronic data acquisition and processing system, a system for processing data and controlling the equipment, a system for storing the data of interest, a user interface system, and a system allowing communication between the aforementioned systems and an outer casing. The equipment can be used to characterize the specular reflection coefficient of flat or curved mirrors of different thicknesses, without requiring adjustments to be made to the equipment, minimizing the influence of diffuse reflection on the measurement.

A measurement apparatus for a surface shape of a highly reflective mirror, comprising a light source, a beam splitting sheet, a collimator, a standard mirror plated with the beam splitter sheet, and a CCD imaging system. A light beam emitted by the light source passes through the beam splitting sheet, and is converted by the collimator into parallel light lo which passes through the standard mirror, a part of the light is reflected and returned by the standard mirror, and the other part of light passes through the standard mirror, and then reaches the surface of a measured mirror and is reflected back by the surface; the light IR reflected back by the standard mirror and the light It reflected back by the surface, pass through the standard mirror, forming interfering light that is returned to and reflected by the beam splitting sheet before entering the CCD imaging system.

The invention relates to a coolable optical table with a table top and at least three table legs. Securing means for securing objects such as optical elements are provided in a table surface of the table top. The table legs are equipped with a damping device for damping vibrations.

A scan mirror reflectivity calibration device is provided for monitoring and calibration of a rotating two-sided scan mirror. The scan mirror reflectivity calibration device can comprise at least one light source assembly operable to direct light onto a back side of a rotating two-sided scan mirror. The at least one light source assembly can be mounted outside a swept volume of the rotating two-sided scan mirror. The scan mirror reflectivity calibration device further comprises at least one detector assembly operable to detect light that is emitted from the at least one light source assembly and is reflected off of the back side of the rotating two-sided scan mirror. The at least one detector assembly can be mounted outside the swept volume of the rotating two-sided scan mirror.

An extreme ultraviolet (EUV) collector inspection apparatus and method capable of precisely inspecting a contamination state of an EUV collector and EUV reflectance in accordance with the contamination state are provided. The EUV collector inspection apparatus includes a light source arranged in front of an EUV collector to be inspected and configured to output light in a visible light (VIS) band from UV rays, an optical device configured to output narrowband light from the light, and a camera configured to perform imaging from an UV band to a VIS band. An image by wavelength of the EUV collector is obtained by using the optical device and the camera and a contamination state of the EUV collector is inspected.

A method and a system for positioning an apparatus for monitoring a parameter of one or more parabolic reflectors of a solar thermal field, wherein the method comprises positioning the apparatus at a first field location responsive to the position of the respective parabolic reflector, acquiring information of an absorber tube of the respective parabolic reflector, and positioning the apparatus at the second field location responsive to the information of the absorber tube, the second field location being beyond the focus of the respective parabolic reflector is provided.