To determine an imaging quality of an optical system when illuminated by illumination light within an entrance pupil or exit pupil, a test structure is initially arranged in an object plane of the optical system and an illumination angle distribution for illuminating the test structure with the illumination light is specified. The test structure is illuminated at different distance positions relative to the object plane. An intensity of the illumination light is measured in an image plane of the optical system, the illumination light having been guided by the optical system when imaging the test structure at each distance position. An aerial image measured in this way is compared with a simulated aerial image and fit parameters of a function set for describing the simulated aerial image are adapted and a wavefront of the optical system is determined on the basis of the result of a minimized difference.

Provided is a device and method for designing a light guide plate pattern, the device including a camera configured to capture a liquid crystal display device module mounted in a curved display device, a mura position detector configured to detect a position of mura on the basis of image information and luminance information captured by the camera, a mura shape detector configured to detect shape of the mura on the basis of the image information and the luminance information captured by the camera, a dot pattern density adjuster configured to adjust a density of dot patterns of a light guide plate based on a shape for removing the mura corresponding to the shape of the mura generated in the liquid crystal display device module.

System and methods are provided for characterizing an internal surface of a lens using interferometry measurements. Sphere-fitting a distorted radius determines distorted pathlengths. Ray-tracing simulates refraction at all upstream surfaces to determine a cumulative path length. A residual pathlength is scaled by the group-index and rays are propagated based on the phase-index. After aspheric surface fitting, a corrected radius is determined. To estimate a glass type for the lens, a thickness between focal planes of the lens surfaces is determined using RCM measurements. Then, for both surfaces, the surface is positioned into focus, interferometer path length matching is performed, a reference arm is translated to stationary phase point positions for three wavelengths to determine three per-color optical thicknesses, and ray-tracing is performed. A glass type is identified by minimizing an error function based on optical parameters of the lens and parameters determined from known glass types from a database.

Methods for processing data from a metrology process and for obtaining calibration data are disclosed. In one arrangement, measurement data is obtained from a metrology process. The metrology process includes illuminating a target on a substrate with measurement radiation and detecting radiation redirected by the target. The measurement data includes at least a component of a detected pupil representation of an optical characteristic of the redirected radiation in a pupil plane. The method further includes analyzing the at least a component of the detected pupil representation to determine either or both of a position property and a focus property of a radiation spot of the measurement radiation relative to the target.

Methods for processing data from a metrology process and for obtaining calibration data are disclosed. In one arrangement, measurement data is obtained from a metrology process. The metrology process includes illuminating a target on a substrate with measurement radiation and detecting radiation redirected by the target. The measurement data includes at least a component of a detected pupil representation of an optical characteristic of the redirected radiation in a pupil plane. The method further includes analyzing the at least a component of the detected pupil representation to determine either or both of a position property and a focus property of a radiation spot of the measurement radiation relative to the target.

The present invention discloses an aspheric lens eccentricity detecting device based on wavefront technology and a detecting method thereof. The device comprises: an upper optical fiber light source, an upper collimating objective lens, an upper light source spectroscope, an upper beam-contracting front lens, an upper beam-contracting rear lens, an upper imaging detector, an upper imaging spectroscope, an upper wavefront sensor, a lens-under-detection clamping mechanism, a lower light source spectroscope, a lower beam-contracting front lens, a lower beam-contracting rear lens, a lower imaging spectroscope, a lower wavefront sensor, a lower imaging detector, a lower collimating objective lens and a lower optical fiber light source. The present invention achieves non-contact detection, with no risk of damaging the lens, and there is no moving part in the device, so the system reliability and stability are high; and in the present invention, various eccentricity errors in the effective aperture of the aspheric lens can be detected at a time, thereby avoiding errors caused by splicing detection, and also greatly reducing the detection time, thus being applicable to online detection on an assembly line.

A new diversity concept is provided for achieving accurate phase retrieval with a singleshot acquisition. Multiple irradiance data are obtained by a diffractive grating or CGH designed to generate multiple diffraction orders with different diversity values. The effective filters associated with the individual diffraction orders from the diffractive grating or CGH are calculated. The effective filters are extracted by numerical propagation, and they preferably include both real and imaginary values, which signify both absorption and phase shift versus position in the filter plane. The reconstruction process utilizes accurate knowledge of the effective filters for each diffraction order for high quality reconstruction of the extrinsic phase.

A cuvette with at least one side having materials with thermal conductivity of at least 5 W/m-K, such as sapphire, for holding contact lenses or intra-ocular lenses during optical measurements. The cuvette may further include a backstop to ensure consistent measurements and a pedestal to minimize optical measurement variations.

A lensmeter system may include a mobile device having a camera. The camera may capture a first image of a pattern through a lens that is separate from the camera, while the lens is in contact with a pattern. The mobile device may determine the size of the lens based on the first image and known features of the pattern. The camera may capture a second image of the pattern, while the lens is at an intermediate location between the camera and the pattern. The second image may be transformed to an ideal coordinate system, and processed determine a distortion of the pattern attributable to the lens. The mobile device may measure characteristics of the lens based on the distortion. Characteristics of the lens may include a spherical power, a cylinder power, and/or an astigmatism angle.

Methods, apparatus and systems for achieving efficient optical design are described. In one representative aspect, a method for optical design includes introducing a light source into the optical system. The light source emits illumination that is characterized as a point source, a collimated illumination, or a superposition of one or more point sources or one or more collimated illuminations. The light source is represented by a vector field comprising a plurality of vectors. The method also includes defining each optical surface of the optical system based on the vector field of the light source, tracing a plurality of rays that propagate from the light source, traverse through the optical system and reach a predetermined target or targets, and determining whether an illumination or an image characteristic at the predetermined target or targets meets preset design requirements.