Systems and methods for substrate support in a millisecond anneal system are provided. In one example implementation, a millisecond anneal system includes a processing chamber having a wafer support plate. A plurality of support pins can extend from the wafer support plate. The support pins can be configured to support a substrate. At least one of the support pins can have a spherical surface profile to accommodate a varying angle of a substrate surface normal at the point of contact with the substrate. Other example aspects of the present disclosure are directed to methods for estimating, for instance, local contact stress at the point of contact with the support pin.

Systems and methods for substrate support in a millisecond anneal system are provided. In one example implementation, a millisecond anneal system includes a processing chamber having a wafer support plate. A plurality of support pins can extend from the wafer support plate. The support pins can be configured to support a substrate. At least one of the support pins can have a spherical surface profile to accommodate a varying angle of a substrate surface normal at the point of contact with the substrate. Other example aspects of the present disclosure are directed to methods for estimating, for instance, local contact stress at the point of contact with the support pin.

A substrate analysis method using a nozzle for substrate analysis which discharges an analysis liquid from a tip thereof, scans a substrate surface with a discharged analysis liquid, and sucks the analysis liquid. This is done by arranging a liquid catch plate that catches the discharged analysis liquid, thus retaining analysis liquid discharged between the nozzle tip and the liquid catch plate; positioning the substrate so that the end part thereof can be inserted between the nozzle tip and the liquid catch plate; bringing the end part of the substrate into contact with analysis liquid retained between the nozzle tip and liquid catch plate; and moving the nozzle and liquid catch plate concurrently along a periphery of the substrate, while keeping the end part of the substrate in contact with the analysis liquid, to analyze the end part of the substrate.

A substrate analysis method using a nozzle for substrate analysis which discharges an analysis liquid from a tip thereof, scans a substrate surface with a discharged analysis liquid, and sucks the analysis liquid. This is done by arranging a liquid catch plate that catches the discharged analysis liquid, thus retaining analysis liquid discharged between the nozzle tip and the liquid catch plate; positioning the substrate so that the end part thereof can be inserted between the nozzle tip and the liquid catch plate; bringing the end part of the substrate into contact with analysis liquid retained between the nozzle tip and liquid catch plate; and moving the nozzle and liquid catch plate concurrently along a periphery of the substrate, while keeping the end part of the substrate in contact with the analysis liquid, to analyze the end part of the substrate.

An intelligent rolling contact fatigue testing system and testing method therefor, including a main testing system (3), a loading system (4) and a subsidiary testing system (7), and further including a testing device, wherein the testing device includes a light source (S3), a CCD camera (S5) and a monitoring assistance device (S2), and during testing, a roller test specimen (306) and an subsidiary testing piece (706) are provided in the monitoring assistance device (S2) after being rolled in contact with each other for a certain time, and the roller test specimen (306) and the rotating brush (S210) are rotated simultaneously in a state in which the lubricating oil is sprayed, and the CCD camera (S5) dynamically collects the surface image of the roller test specimen (306), and then performing quantization evaluation on a fatigue failure state by image preprocessing, image processing and image post-processing.

An intelligent rolling contact fatigue testing system and testing method therefor, including a main testing system (3), a loading system (4) and a subsidiary testing system (7), and further including a testing device, wherein the testing device includes a light source (S3), a CCD camera (S5) and a monitoring assistance device (S2), and during testing, a roller test specimen (306) and an subsidiary testing piece (706) are provided in the monitoring assistance device (S2) after being rolled in contact with each other for a certain time, and the roller test specimen (306) and the rotating brush (S210) are rotated simultaneously in a state in which the lubricating oil is sprayed, and the CCD camera (S5) dynamically collects the surface image of the roller test specimen (306), and then performing quantization evaluation on a fatigue failure state by image preprocessing, image processing and image post-processing.

A system includes a carrier assembly, a replacement tool movably supported by the carrier assembly, and a sensor configured to capture sensor data associated with a wear part removably connected to a rotatable drum. The system also includes a controller configured to receive the sensor data from the sensor, and identify the wear part using the sensor data. In such a system, the carrier assembly is configured to move the replacement tool such that an axis of the replacement tool is substantially collinear with an axis of the wear part. Additionally, the replacement tool is configured to remove the wear part from the drum while the axis of the replacement tool is substantially collinear with the axis of the wear part.

A product index mechanism for a product inspection system includes a material strip driving wheel and an index structure driving wheel. The material strip driving wheel engages with a material strip carrying a plurality of products to be inspected by an inspection device of the product inspection system. The driving wheel drives the material strip to move. The index structure driving wheel rotates synchronously with the material strip driving wheel and includes a plurality of product index structures thereon. As a product on the material strip is moved by the material strip driving wheel to an inspection position of the inspection device, one product index structure on the index structure driving wheel is rotated to a trigger position corresponding to a trigger of the inspection system. Activation of the trigger transmits a trigger signal to the inspection device to inspect the product.

A product index mechanism for a product inspection system includes a material strip driving wheel and an index structure driving wheel. The material strip driving wheel engages with a material strip carrying a plurality of products to be inspected by an inspection device of the product inspection system. The driving wheel drives the material strip to move. The index structure driving wheel rotates synchronously with the material strip driving wheel and includes a plurality of product index structures thereon. As a product on the material strip is moved by the material strip driving wheel to an inspection position of the inspection device, one product index structure on the index structure driving wheel is rotated to a trigger position corresponding to a trigger of the inspection system. Activation of the trigger transmits a trigger signal to the inspection device to inspect the product.

A resilient bearing pad or support includes resilient material and a sensor that is configured to measure one or more of acceleration, velocity, variations in load, etc. of a mass supported by the bearing pad. The sensor may be configured to wirelessly transmit data for storage and/or evaluation. The data may be evaluated utilizing predefined criteria to detect and/or predict failure of the pad and/or a mass supported by the pad.