A detection method based on laser-induced breakdown spectroscopy enhanced by a two-dimensional plasma grating includes: generating a femtosecond laser pulse by a femtosecond laser, and splitting the femtosecond laser pulse into three sub-pulses by a beam splitting unit; focusing the three sub-pulses separately by a focusing unit to allow focused sub-pulses to be overlapped at an intersection in space, wherein before reaching the intersection, the three sub-pulses form two planes; synchronizing the three sub-pulses in a time domain by adjusting optical paths of the three sub-pulses in such a way that they have the same optical length and the three sub-pulses arrive at the intersection in space simultaneously and form the two-dimensional plasma grating; and exciting a sample on a stage based on the two-dimensional plasma grating to generate a plasma cluster, and acquiring a spectrum of the sample.

The present disclosure relates to a system and method for automatic online monitoring of dimethyl sulfide in environment. The method may realize separation of water vapor and the substance to be detected in accordance with the adsorption phase equilibrium principle of substance, thus eliminating the influence of water vapor on detection. The disturbance of other substances in an environmental sample can be eliminated in accordance with the charge or proton transfer principle of molecule ion reaction. Automatic online sampling, preprocessing and sample injection units are configured using valves, numerically controlled motor-driven injectors, flow controllers and a peristaltic pump, so that continuous online detection of DMS in an environmental water sample (e.g., seawater, or lake water) or a gas sample (e.g., atmosphere) can be realized.

The present disclosure relates to a system and method for automatic online monitoring of dimethyl sulfide in environment. The method may realize separation of water vapor and the substance to be detected in accordance with the adsorption phase equilibrium principle of substance, thus eliminating the influence of water vapor on detection. The disturbance of other substances in an environmental sample can be eliminated in accordance with the charge or proton transfer principle of molecule ion reaction. Automatic online sampling, preprocessing and sample injection units are configured using valves, numerically controlled motor-driven injectors, flow controllers and a peristaltic pump, so that continuous online detection of DMS in an environmental water sample (e.g., seawater, or lake water) or a gas sample (e.g., atmosphere) can be realized.

A system for simultaneously and microscopically measuring vapor cell coating film energy transfer and relaxation characteristics at nanometer scales includes a space relaxation characteristic detection unit which includes a laser, an optical isolator, a spatial light filter, a reflector, a Glan-Taylor polarizer, a first quarter-wave plate, a spatial light modulator, a focusing lens, a second quarter-wave plate, a polarizing film, a PD detection unit, an I/V amplification unit, a data acquisition unit, a spectroscope and an optical chopper, an atomic force microscope detection unit for energy transfer micro-areas, a shielding cylinder, a coated alkali metal atomic vapor cell, a data processing unit and a magnetic field controlled coil. The energy transfer micro-area detection unit includes coated samples, a probe, an oscillator, a laser, a four-quadrant photoelectric detection unit, a band-pass filter unit, an automatic gain controller, an adder, a piezoelectric scanning cylinder, a sample table and a PI controller.

A system for simultaneously and microscopically measuring vapor cell coating film energy transfer and relaxation characteristics at nanometer scales includes a space relaxation characteristic detection unit which includes a laser, an optical isolator, a spatial light filter, a reflector, a Glan-Taylor polarizer, a first quarter-wave plate, a spatial light modulator, a focusing lens, a second quarter-wave plate, a polarizing film, a PD detection unit, an I/V amplification unit, a data acquisition unit, a spectroscope and an optical chopper, an atomic force microscope detection unit for energy transfer micro-areas, a shielding cylinder, a coated alkali metal atomic vapor cell, a data processing unit and a magnetic field controlled coil. The energy transfer micro-area detection unit includes coated samples, a probe, an oscillator, a laser, a four-quadrant photoelectric detection unit, a band-pass filter unit, an automatic gain controller, an adder, a piezoelectric scanning cylinder, a sample table and a PI controller.

A measuring device for measuring a position of a pattern includes a wavelength variable unit configured to vary a spectrum of first light in accordance with an incident position at which the first light is incident to allow the first light to pass therethrough, and a moving unit configured to change the incident position by moving the wavelength variable unit. The wavelength variable unit is moved to a position based on wavelength characteristic information and intensity characteristic information, the wavelength characteristic information indicating a relationship between the position of the wavelength variable unit and a wavelength of the first light transmitted through the wavelength variable unit, the intensity characteristic information indicating a relationship between the position of the wavelength variable unit and an intensity of second light from the pattern illuminated with the first light transmitted through the wavelength variable unit.

A measuring device for measuring a position of a pattern includes a wavelength variable unit configured to vary a spectrum of first light in accordance with an incident position at which the first light is incident to allow the first light to pass therethrough, and a moving unit configured to change the incident position by moving the wavelength variable unit. The wavelength variable unit is moved to a position based on wavelength characteristic information and intensity characteristic information, the wavelength characteristic information indicating a relationship between the position of the wavelength variable unit and a wavelength of the first light transmitted through the wavelength variable unit, the intensity characteristic information indicating a relationship between the position of the wavelength variable unit and an intensity of second light from the pattern illuminated with the first light transmitted through the wavelength variable unit.

A laser irradiation apparatus includes: a laser generation apparatus configured to generate first laser light for performing heat treatment of an object to be processed; a measurement-laser emission unit configured to emit linearly-polarized second laser light toward an irradiation area on the object to be processed to which the first laser light is applied; a first polarizing plate configured to let, of the whole reflected light of the second laser light reflected by the object to be processed, a part of the reflected light that has a first polarization direction pass therethrough; and a measurement-laser detection unit configured to detect the reflected light that has passed through the first polarizing plate.

A laser irradiation apparatus includes: a laser generation apparatus configured to generate first laser light for performing heat treatment of an object to be processed; a measurement-laser emission unit configured to emit linearly-polarized second laser light toward an irradiation area on the object to be processed to which the first laser light is applied; a first polarizing plate configured to let, of the whole reflected light of the second laser light reflected by the object to be processed, a part of the reflected light that has a first polarization direction pass therethrough; and a measurement-laser detection unit configured to detect the reflected light that has passed through the first polarizing plate.

An artificial neural network-based method for detecting a surface type of an object includes: receiving a plurality of object images, wherein a plurality of spectra of the plurality of object images are different from one another and each of the object images has one of the spectra; transforming each object image into a matrix, wherein the matrix has a channel value that represents the spectrum of the corresponding object image; and executing a deep learning program by using the matrices to build a predictive model for identifying a target surface type of the object. Accordingly, the speed of identifying the target surface type of the object is increased, further improving the product yield of the object.