The invention relates to a porous optical fiber for the detection of an analyte in a fluid by optical probing. The optical fiber has a first end and a second end opposite to the first end, as seen in a longitudinal direction, and a circumferential surface delimiting the optical fiber in radial directions perpendicular to the longitudinal direction. The optical fiber comprises a core adapted for supporting at least one optical mode propagating in the longitudinal direction, the core having a circumferential interface delimiting the core in the radial directions. The optical fiber further comprises pores penetrating from an opening at the circumferential surface through the circumferential interface into the core of the optical fiber, wherein a cross-sectional dimension of the openings is dimensioned so as to prevent a particulate fraction of the fluid from entering the pores, while allowing the analyte to enter the pores.

The invention relates to a porous optical fiber for the detection of an analyte in a fluid by optical probing. The optical fiber has a first end and a second end opposite to the first end, as seen in a longitudinal direction, and a circumferential surface delimiting the optical fiber in radial directions perpendicular to the longitudinal direction. The optical fiber comprises a core adapted for supporting at least one optical mode propagating in the longitudinal direction, the core having a circumferential interface delimiting the core in the radial directions. The optical fiber further comprises pores penetrating from an opening at the circumferential surface through the circumferential interface into the core of the optical fiber, wherein a cross-sectional dimension of the openings is dimensioned so as to prevent a particulate fraction of the fluid from entering the pores, while allowing the analyte to enter the pores.

A biosensor device for detecting biological particles, the biosensor device comprising a substrate, a regular pattern of pores formed in the substrate, and a plurality of sensor active structures each of which being arranged on a surface of a corresponding one of the pores, wherein each of the plurality of sensor active structures is sensitive to specific biological particles and is adapted to modify electromagnetic radiation interaction properties in the event of the presence of the respective biological particles.

A biosensor device for detecting biological particles, the biosensor device comprising a substrate, a regular pattern of pores formed in the substrate, and a plurality of sensor active structures each of which being arranged on a surface of a corresponding one of the pores, wherein each of the plurality of sensor active structures is sensitive to specific biological particles and is adapted to modify electromagnetic radiation interaction properties in the event of the presence of the respective biological particles.

Disclosed herein are systems and methods for serial flow emulsion processes. Systems and methods as described herein result in reduced cross-contamination.

Disclosed herein are systems and methods for serial flow emulsion processes. Systems and methods as described herein result in reduced cross-contamination.

The present invention relates to a kit for detecting a virus, a composition for detecting a virus and a method for detecting a virus. According to the present invention, a kit which is capable of detecting viruses with high efficiency at low cost within a short period of time, and exhibits enhanced sensitivity and accuracy may be provided.

A chamber cleaning method includes processing a wafer for a Cu-to-Cu bonding process using plasma in a chamber; and removing copper from the chamber. Removing copper includes forming copper oxide on an inner wall of the chamber by oxidizing copper in the chamber by a plasma treatment that uses a first gas, performing a first monitoring operation that monitors a copper contamination state in the chamber using an optical diagnostic method, removing the copper oxide by a plasma treatment that uses a second gas; and performing a second monitoring operation that monitors a copper contamination state in the chamber using the optical diagnostic method.

A chamber cleaning method includes processing a wafer for a Cu-to-Cu bonding process using plasma in a chamber; and removing copper from the chamber. Removing copper includes forming copper oxide on an inner wall of the chamber by oxidizing copper in the chamber by a plasma treatment that uses a first gas, performing a first monitoring operation that monitors a copper contamination state in the chamber using an optical diagnostic method, removing the copper oxide by a plasma treatment that uses a second gas; and performing a second monitoring operation that monitors a copper contamination state in the chamber using the optical diagnostic method.

The present invention provides methods for purifying a layer of carbon nanotubes comprising providing a precursor layer of substantially aligned carbon nanotubes supported by a substrate, wherein the precursor layer comprises a mixture of first carbon nanotubes and second carbon nanotubes; selectively heating the first carbon nanotubes; and separating the first carbon nanotubes from the second carbon nanotubes, thereby generating a purified layer of carbon nanotubes. Devices benefiting from enhanced electrical properties enabled by the purified layer of carbon nanotubes are also described.