A workpiece evaluating method evaluates the gettering property of a device wafer having a plurality of devices formed on the front side of the wafer and having a gettering layer formed inside the wafer. The method includes the steps of applying excitation light for exciting a carrier to the wafer, applying microwaves to a light applied area where the excitation light is applied and also to an area other than the light applied area, measuring the intensity of the microwaves reflected from the light applied area and from the area other than the light applied area, subtracting the intensity of the microwaves reflected from the area other than the light applied area from the intensity of the microwaves reflected from the light applied area to thereby obtain a differential signal, and determining the gettering property of the gettering layer according to the intensity of the differential signal obtained above.

A workpiece evaluating method evaluates the gettering property of a device wafer having a plurality of devices formed on the front side of the wafer and having a gettering layer formed inside the wafer. The method includes the steps of applying excitation light for exciting a carrier to the wafer, applying microwaves to a light applied area where the excitation light is applied and also to an area other than the light applied area, measuring the intensity of the microwaves reflected from the light applied area and from the area other than the light applied area, subtracting the intensity of the microwaves reflected from the area other than the light applied area from the intensity of the microwaves reflected from the light applied area to thereby obtain a differential signal, and determining the gettering property of the gettering layer according to the intensity of the differential signal obtained above.

An inspection device of the present invention includes: THz wave irradiation unit for irradiating a specimen with THz waves; a THz wave sensing unit for detecting transmitted waves or reflected waves of the THz waves emitted to the specimen; and an information processing unit for acquiring intensity distribution of the transmitted waves of the reflected waves of the specimen from the intensity data of the transmitted waves or the reflected waves of the specimen irradiated with the THz waves, wherein the information processing unit acquires 2-dimensional intensity distribution of the transmitted waves or reflected waves, and detects whether a foreign matter is adhering to the specimen by comparing the intensity distribution obtained when the specimen without attachment of the foreign matter is detected and the intensity distribution obtained when the specimen is detected at the time of inspection. The specimen is a sheet of paper, for example.

Disclosed is an improved system and method to evaluate the status of a material. The system and method are operative to identify flaws and measure the erosion profile and thickness of different materials, including refractory materials, using electromagnetic waves. The system is designed to reduce a plurality of reflections, associated with the propagation of electromagnetic waves launched into the material under evaluation, by a sufficient extent so as to enable detection of electromagnetic waves of interest reflected from remote discontinuities of the material. Furthermore, the system and method utilize a configuration and signal processing techniques that reduce clutter and enable the isolation of electromagnetic waves of interest. Moreover, the launcher is impedance matched to the material under evaluation, and the feeding mechanism is designed to mitigate multiple reflection effects to further suppress clutter.

Disclosed is an improved system and method to evaluate the status of a material. The system and method are operative to identify flaws and measure the erosion profile and thickness of different materials, including refractory materials, using electromagnetic waves. The system is designed to reduce a plurality of reflections, associated with the propagation of electromagnetic waves launched into the material under evaluation, by a sufficient extent so as to enable detection of electromagnetic waves of interest reflected from remote discontinuities of the material. Furthermore, the system and method utilize a configuration and signal processing techniques that reduce clutter and enable the isolation of electromagnetic waves of interest. Moreover, the launcher is impedance matched to the material under evaluation, and the feeding mechanism is designed to mitigate multiple reflection effects to further suppress clutter.

Incoherent millimeter wave, sub-millimeter wave and terahertz test signals are used to probe metal substrates covered by a protective coating or outer layer, such as paint or thermal insulation, obscuring direct assessment of the substrate. The incoherent test signals, provide signal dispersion and angular variation of the test signals with respect to angular incidence to the substrate. Illumination of the substrate permits differentiation between un-corroded and corroded sections of the sample because reflectivity (and emissivity) from a metal-based substrate is heavily dependent on the surface resistivity which is dependent on the corroded state. A detector/camera is arranged to pick up reflections from the substrate and an associated control system identifies regions of the sample that reflect the test signal illumination differently or otherwise indicate a variation from a reference value. The differences therefore signify the presence or lack of corrosion or other abnormalities within or on the substrate.

Incoherent millimeter wave, sub-millimeter wave and terahertz test signals are used to probe metal substrates covered by a protective coating or outer layer, such as paint or thermal insulation, obscuring direct assessment of the substrate. The incoherent test signals, provide signal dispersion and angular variation of the test signals with respect to angular incidence to the substrate. Illumination of the substrate permits differentiation between un-corroded and corroded sections of the sample because reflectivity (and emissivity) from a metal-based substrate is heavily dependent on the surface resistivity which is dependent on the corroded state. A detector/camera is arranged to pick up reflections from the substrate and an associated control system identifies regions of the sample that reflect the test signal illumination differently or otherwise indicate a variation from a reference value. The differences therefore signify the presence or lack of corrosion or other abnormalities within or on the substrate.

A sensing system which comprises a material (30) formed of a matrix and a plurality of non-insulating particles (40) substantially equally spaced within the matrix such that the material has coherent electrical periodicity in at least one dimension; and a receiver (10), the receiver arranged to receive a source RF signal and a returned RF signal, the source RF signal being reflected by the non-insulating particles to produce the returned RF signal. A change in the position of one or more of the non-insulating particles causes the returned RF signal to change, such that a change in a property of the material can be determined from the returned RF signal.

A sensing system which comprises a material (30) formed of a matrix and a plurality of non-insulating particles (40) substantially equally spaced within the matrix such that the material has coherent electrical periodicity in at least one dimension; and a receiver (10), the receiver arranged to receive a source RF signal and a returned RF signal, the source RF signal being reflected by the non-insulating particles to produce the returned RF signal. A change in the position of one or more of the non-insulating particles causes the returned RF signal to change, such that a change in a property of the material can be determined from the returned RF signal.

The present invention discloses imaging antenna and array by designing the system in the Ultra-high frequency (UHF) band 300 MHz-3 GHz with resolution comparable to high-frequency microwave imagers (i.e., super-resolution). To obtain high resolution at relatively low system cost and complexity, a novel modulated antenna array element design is disclosed. The antenna is basically small loop loaded with spiral resonator. The selection of the SR as a resonator provides for adequate miniaturization rate at the lower end of the microwave frequency range. A non-modulated version of this antenna has been conceived and yielded a resolution comparable to the 24 GHz antennas while operating at 426 MHz. The disclosed antenna element operating at 426 MHz produced images with very comparable attributes to the one obtained at 24 GHz. In fact, it has been established that proposed antenna element yield a resolution of around 5 mm (much less that the wavelength divided by 100), and hence it provides super-resolution as long as the diffraction limit is concerned. The present invention further discloses an imaging probe unit comprising a imaging sensor loaded with a PIN diode, an L-matching circuit and an LC resonant detuning circuit. The present invention further discloses a one-dimensional array, comprising a plurality of imaging probe units which are placed side by side in very close proximity of each other.