Methods of forming a shear-mode chemical/physical sensor for liquid environment sensing on V-shaped grooves of a [100] crystal orientation Si layer and the resulting devices are provided. Embodiments include forming a set of V-shaped grooves in a [100] Si layer over a substrate; forming an acoustic resonator over and along the V-shaped grooves, the acoustic resonator including a first metal layer, a thin-film piezoelectric layer, and a second metal layer in an IDT pattern or a sheet; and forming at least one functional layer along a slope of the acoustic resonator.

Methods of performing a plurality of operations within a region of a part utilizing an end effector of a robot and robots that perform the methods are disclosed herein. The methods include collecting a spatial representation of the part and aligning a predetermined raster scan pattern for movement of the end effector relative to the part with the spatial representation of the part. The methods also include defining a plurality of normality vectors for the part at a plurality of predetermined operation locations for operation of the end effector. The methods further include moving the end effector relative to the part and along the predetermined raster scan pattern. The methods also include orienting the end effector such that an operation device of the end effector faces toward each operation location along a corresponding normality vector and executing a corresponding operation of the plurality of operations with the operation device.

A micro-electrical-mechanical system (MEMS) resonator device includes at least one functionalization material arranged over at least a central portion, but less than an entirety, of a top side electrode. For an active region exhibiting greatest sensitivity at a center point and reduced sensitivity along its periphery, omitting functionalization material over at least one peripheral portion of a resonator active region prevents analyte binding in regions of lowest sensitivity. The at least one functionalization material extends a maximum length in a range of from about 20% to about 95% of an active area length and extends a maximum width in a range of from about 50% to 100% of an active area width. Methods for fabricating MEMS resonator devices are also provided.

In at least one illustrative embodiment, an electromagnetic filter may include a transfer pipe and multiple electromagnetic filter elements positioned in an interior volume of the pipe. Each electromagnetic filter element includes a support comb, a solenoid coupled to the support comb, and multiple magnetic members arranged in a planar array positioned within an opening of the support comb. Each magnetic member may rotate about an end that is coupled to the support comb. The magnetic members may be magnetostrictive sensors and may include a biorecognition element to bind with a target microorganism. A method for fluid filtration includes coupling the electromagnetic filter between a fluid source and a fluid destination, energizing the solenoids of each electromagnetic filter elements, and flowing a fluid media through the transfer pipe of the electromagnetic filter. The fluid media may be liquid food such as fruit juice. Other embodiments are described and claimed.

An acoustic matching material for gas measurement including a matrix material having an acoustic impedance and an acoustic impedance reduction material, having an acoustic impedance lower than the acoustic impedance of the matrix material, the acoustic impedance reduction material being dispersed in the matrix material to create an acoustic impedance graduation through a thickness of the matching material.

An acoustic matching material for gas measurement including a matrix material having an acoustic impedance and an acoustic impedance reduction material, having an acoustic impedance lower than the acoustic impedance of the matrix material, the acoustic impedance reduction material being dispersed in the matrix material to create an acoustic impedance graduation through a thickness of the matching material.

A fluidic device and a method of preventing isolation material from bleed-out therein is described herein. The fluidic device includes a bulk acoustic wave resonator structure defining at least one surface area region on which a functionalization material is disposed and the resonator structure includes a repelling area. The fluidic device also includes isolation material disposed on the resonator structure and away from the at least one surface area region. The repelling area is configured to prevent the isolation material from extending into the at least one surface area region. Further, an electronic board may be operably attached to the resonator structure and the isolation material may be disposed in a gap therebetween to electrically isolate electrical contacts and form a fluidic channel.

The present invention discloses a sensor system for estimating respective amounts of different molecules in a biological liquid, and the sensor system includes: an electronic circuit module and a Shear Horizontal Surface Acoustic Wave (SH-SAW) sensor, wherein the electronic circuit module has more than two different impedance matching circuits for exciting and detecting a plurality of Surface Acoustic Waves (SAWs) with different frequencies, and the SH-SAW sensor has at least one transducer and a surface on which the plurality of SAWs propagate, and wherein the surface is covered with a probe to be bound with more than two different molecules.

A gas sensor includes a multi-wafer stack of a plurality of layers and a measurement chamber. The plurality of layers includes a first layer comprising a sensor element that has a microelectromechanical system (MEMS) membrane; and a second layer comprising an emitter element configured to emit electromagnetic radiation. The measurement chamber is interposed between the first layer and the second layer. The measurement chamber is configured to receive a measurement gas and further receive the electromagnetic radiation emitted by the emitter element as the electromagnetic radiation travels along a radiation path from a first end of the measurement chamber to a second end of the measurement chamber that is opposite to the first end.

A gas detection device according to an embodiment of the present invention includes a casing and a plurality of sensor elements. The casing includes a gas introducing port, a first chamber that communicates with the introducing port, a second chamber that communicates with the first chamber, a flow limiter that limits a flow of gas from the first chamber to the second chamber, and a gas exhausting portion that communicates with the second chamber. The plurality of sensor elements are disposed within the second chamber and have different detection sensitivities depending on a gas type.