G01N2201/10

DUAL WAVELENGTH SOURCE GAS DETECTOR
20170307518 · 2017-10-26 ·

Devices, methods, systems, and computer-readable media for a dual wavelength source gas sensor are described herein. One or more embodiments include a gas sensor, comprising: a dual wavelength source to transmit a first wavelength and a second wavelength via an optical path, wherein a gas is present through the optical path, a detector to receive the first wavelength and the second wavelength via the optical path, and a computing device coupled to the detector to determine an determine a signal intensity for the first wavelength and the second wavelength.

Combined scatter and transmission multi-view imaging system
09823201 · 2017-11-21 · ·

The present specification discloses a multi-view X-ray inspection system having, in one of several embodiments, a three-view configuration with three X-ray sources. Each X-ray source rotates and is configured to emit a rotating X-ray pencil beam and at least two detector arrays, where each detector array has multiple non-pixellated detectors such that at least a portion of the non-pixellated detectors are oriented toward both the two X-ray sources.

Apparatus, techniques, and target designs for measuring semiconductor parameters

In one embodiment, apparatus and methods for determining a parameter of a target are disclosed. A target having an imaging structure and a scatterometry structure is provided. An image of the imaging structure is obtained with an imaging channel of a metrology tool. A scatterometry signal is also obtained from the scatterometry structure with a scatterometry channel of the metrology tool. At least one parameter, such as overlay error, of the target is determined based on both the image and the scatterometry signal.

System and method for remotely sensing visible ray transmittance of vehicle window

A vehicle window visible ray transmittance remote sensing system emits a plurality of laser beams to a driving vehicle, estimates transmittance of a window of the vehicle by acquiring a plurality of point data of a plurality of points from which a plurality of laser beams are reflected from a surface of the vehicle, and distinguishes a vehicle that deviates from a transmittance reference based on the estimated window transmittance.

IMAGE CAPTURE FOR LARGE ANALYTE ARRAYS

Analyte arrays such as solutes in a slab-shaped gel following electrophoresis, and particularly arrays that are in excess of 3 cm square and up to 25 cm square and higher, are imaged at distances of 5 cm or less by either forming sub-images of the entire array and stitching together the sub-images by computer-based stitching technology, or by using an array of thin-film photoresponsive elements that is coextensive with the analyte array to form a single image of the array.

Motion modulation fluidic analyzer system

A fluid analyzer includes an optical source and detector defining a beam path of an optical beam, and a fluid flow cell on the beam path defining an interrogation region in a fluid channel in which the optical beam interacts with fluids. One or more flow-control devices conduct a particle in a fluid through the fluid channel. A motion system moves the interrogation region relative to the fluid channel in response to a motion signal, and a controller (1) generates the motion signal having a time-varying characteristic, (2) samples an output signal from the optical detector at respective intervals of the motion signal during which the interrogation region contains and does not contain the particle, and (3) determines from output signal samples a measurement value indicative of an optically measured characteristic of the particle.

Method and Apparatus for Infrared Scattering Scanning Near-field Optical Microscopy with High Speed Point Spectroscopy

This invention involves measurement of optical properties of materials with sub-micron spatial resolution through infrared scattering scanning near field optical microscopy (s-SNOM). Specifically, the current invention provides substantial improvements over the prior art by achieving high signal to noise, high measurement speed and high accuracy of optical amplitude and phase. Additionally, it some embodiments, it eliminates the need for an in situ reference to calculate wavelength dependent spectra of optical phase, or absorption spectra. These goals are achieved via improved asymmetric interferometry where the near-field scattered light is interfered with a reference beam in an interferometer. The invention achieves dramatic improvements in background rejection by arranging a reference beam that is much more intense than the background scattered radiation. Combined with frequency selective demodulation techniques, the near-field scattered light can be efficiently and accurately discriminated from background scattered light. These goals are achieved via a range of improvements including a large dynamic range detector, careful control of relative beam intensities, and high bandwidth demodulation techniques. In other embodiments, phase and amplitude stability are improved with a novel s-SNOM configuration. In other embodiments an absorption spectrum may be obtained directly by comparing properties from a known and unknown region of a sample as a function of illumination center wavelength.

High-resolution fluorescence microscopy using a structured beam of excitation light

In order to determine the locations of individual fluorescent molecules in a sample, which keep a minimum distance with regard to each other, the individual molecules are excited for emission of fluorescence light by means of excitation light. The fluorescence light is registered for different positions of a zero point of an intensity distribution of the excitation light. The distance between these positions is at least half the minimum distance of the fluorescent molecules. The locations of the fluorescent molecules are derived from the course of the intensity of the fluorescence light over the positions of the zero point of the excitation light.

Array mode repeater detection

Systems and methods for detecting defects on a wafer are provided. One method includes generating test image(s) for at least a portion of an array region in die(s) on a wafer from frame image(s) generated by scanning the wafer with an inspection system. The method also includes generating a reference image for cell(s) in the array region from frame images generated by the scanning of the wafer. In addition, the method includes determining difference image(s) for at least one cell in the at least the portion of the array region in the die(s) by subtracting the reference image from portion(s) of the test image(s) corresponding to the at least one cell. The method further includes detecting defects on the wafer in the at least one cell based on the difference image(s).

LIGHT-FIELD MICROSCOPE
20170261731 · 2017-09-14 · ·

The present invention provides a light-field microscope including: an illumination optical system that radiates excitation light onto a sample; and a detection optical system including an objective lens that collects fluorescence generated in the sample as a result of the sample being irradiated with the excitation light by the illumination optical system, an image-acquisition element that acquires an image of the fluorescence collected by the objective lens, and a microlens array disposed between the image-acquisition element and the objective lens. The illumination optical system radiates a beam of the excitation light having a predetermined width in the optical-axis direction of the objective lens so as to include the focal plane of the objective lens onto the sample in a direction substantially perpendicular to the optical axis.