Patent classifications
G01N2223/03
Semiconductor metrology and inspection based on an x-ray source with an electron emitter array
Methods and systems for realizing a high radiance x-ray source based on a high density electron emitter array are presented herein. The high radiance x-ray source is suitable for high throughput x-ray metrology and inspection in a semiconductor fabrication environment. The high radiance X-ray source includes an array of electron emitters that generate a large electron current focused over a small anode area to generate high radiance X-ray illumination light. In some embodiments, electron current density across the surface of the electron emitter array is at least 0.01 Amperes/mm.sup.2, the electron current is focused onto an anode area with a dimension of maximum extent less than 100 micrometers, and the spacing between emitters is less than 5 micrometers. In another aspect, emitted electrons are accelerated from the array to the anode with a landing energy less than four times the energy of a desired X-ray emission line.
SYSTEMS AND METHODS FOR INSPECTING PIPELINES USING A PIPELINE INSPECTION ROBOT
Systems and methods for robotic inspection of above-ground pipelines are disclosed. Embodiments may include a robotic crawler having a plurality of motors that are individually controllable for improved positioning on the pipeline to facilitate image acquisition. Embodiments may also include mounting systems to house and carry imaging equipment configured to capture image data simultaneously from a plurality of angles. Such mounting systems may be adjustable to account for different sizes of pipes (e.g., 2-40+ inches), and may be configured to account for traversing various pipe support structures. Still further, mounting systems may include quick-release members to allow for removal and re-mounting of imaging equipment when traversing support structures. In other aspects, embodiments may be directed toward control systems for the robotic crawler which assist in the navigation and image capture capabilities of the crawler.
Method and Apparatus for Image Processing
There is provided an image processing method capable of generating an image representative of a magnetic field distribution. The method starts with acquiring phase images providing visualization of electromagnetic fields respectively in a plurality of columns. Then, each of the electromagnetic fields in the columns within the phase images is separated into magnetic field and electric field components. An image representative of a magnetic field distribution is created based on the separated magnetic field components. The step of separating each electromagnetic field includes separating the electromagnetic field in a first one of the columns into magnetic field and electric field components based on the electromagnetic field in a second one of the columns, the latter electromagnetic field having an electric field component oriented in the same direction as that in the first column.
System and method for colorizing a radiograph from cabinet X-ray systems
A cabinet X-ray image system for obtaining X-ray images and colorized or grey scale density X-ray images of a specimen includes a sampling chamber for containing the specimen, a display, an X-ray system including, an X-ray source, a photon counting X-ray detector, and a specimen platform, and a controller configured to selectively energize the X-ray source, control the photon counting X-ray detector to collect a projection X-ray image of the specimen when the X-ray source is energized, determine the density of different areas of the specimen from data collected from the photon counting X-ray detector of the projection X-ray image, create a density X-ray image of the specimen wherein different areas of the specimen are indicated as a density or range of densities based on the determined density of different areas of the specimen, and selectively display the density X-ray image of the specimen on the display.
Characterizing a sample by material basis decomposition
A method is provided for characterizing a sample, by estimating a plurality of characteristic thicknesses, each being associated with a calibration material. The method includes acquiring an energy spectrum transmitted through the sample, located in an X and/or gamma spectral band; for each spectrum of a plurality of calibration spectra, calculating a likelihood from said calibration spectrum, and from the spectrum transmitted through the sample, each calibration spectrum corresponding to the energy spectrum transmitted through a stack of gauge blocks, each formed of a known thickness of a calibration material; and estimating the characteristic thicknesses associated with the sample according to the criterion of maximum likelihood.
Methods and systems for acquiring three-dimensional electron diffraction data
Crystallographic information of crystalline sample can be determined from one or more three-dimensional diffraction pattern datasets generated based on diffraction patterns collected from multiple crystals. The crystals for diffraction pattern acquisition may be selected based on a sample image. At a location of each selected crystal, multiple diffraction patterns of the crystal are acquired at different angles of incidence by tilting the electron beam, wherein the sample is not rotated while the electron beam is directed at the selected crystal.
Method and devices for determining metrology sites
Methods for determining metrology sites for products includes detecting corresponding objects in measurement data of one or more product samples, and aligning the detected objects are aligned. The methods also include analyzing the aligned objects, and determining metrology sites based on the analysis. Devices use such methods to determine metrology sites for products.
INSPECTION SYSTEM AND INSPECTION METHOD
To shorten a waiting time for a belongings inspection, the present invention provides an inspection system 10 including: an electromagnetic wave transmission/reception unit 11 that irradiates an electromagnetic wave having a wavelength of equal to or more than 30 micrometers and equal to or less than one meter, and receives a reflection wave; a detection unit 12 that performs detection processing of detecting an abnormal state, based on a signal of the reflection wave; a decision unit 13 that decides, for an inspection target person from which the abnormal state is detected, whether to perform a secondary inspection at a place or perform a secondary inspection later; and a registration unit 16 that registers, in association with a result of the detection processing, identification information about the inspection target person decided that a secondary inspection is performed later.
Non-destructive testing methods and apparatus
A non-destructive testing method of analyzing a sample comprising a composite material is disclosed. The method comprises: emitting an electromagnetic signal onto the sample, the electromagnetic signal having a range of frequencies; detecting a response signal transmitted and/or reflected by the sample in response to the electromagnetic signal; processing the response signal to determine variation with frequency of a dielectric permittivity of the sample over the range of frequencies; and determining an indication of a structural characteristic of the sample from a measure of the variation with frequency of the dielectric permittivity of the sample.
Sample holder
A sample holder for holding a sample comprising a drill core sample or drill cuttings during X-ray transmission measurements and fluorescence measurements is disclosed. The sample holder comprises a confining structure having an axial direction and being adapted to, during measurement, at least partially enclose the sample and to restrict movement of the sample in a direction intersecting the axial direction. The confining structure comprises at least one region facing away from the axial direction and allowing exciting radiation impinging on, and fluorescent radiation emanating from, the sample during measurement to pass therethrough. An apparatus adapted for receiving such a sample holder is also disclosed, comprising a ray source, an X-ray transmission detector, a fluorescence detector and rotating means for rotating at least one of the sample holder, the X-ray source, the X-ray transmission detector and the fluorescence detector. Further, a system comprising such a sample holder and apparatus is disclosed.