The X-ray phase imaging apparatus includes a position switching mechanism for switching a relative position of one or more gratings between a retreated position which is an outside of a detection range on a detection surface of an image signal detector and a detection positon which is an inside of the detection range on the detection surface of the image signal detector and a focal diameter changing unit configured to change a focal diameter of the X-ray source in conjunction with switching of the relative position of the one or more gratings.

A hybrid inspection system of the present invention is an inspection system including a first inspection device (1) for inspecting a sample (11) based on X-ray measurement data obtained by irradiating the sample (11) with X-rays, and a second inspection device (2) for inspecting the sample (11) by a measuring method using no X-rays. The X-ray measurement data obtained by the first inspection device or an analysis result of the X-ray measurement data is output to the second inspection device (2). In the second inspection device (2), the structure of the sample (11) is analyzed by using the X-ray measurement data input from the first inspection device (1) or the analysis result of the X-ray measurement data.

Methods and systems for selecting mode(s) for inspection of specimens are provided. One method includes statistically predicting if data points in a set correspond to defects or nuisances on a specimen. The data points include attribute(s) determined for discrete locations on the specimen from output generated by two or more modes of an inspection system. Events have been detected at the discrete locations with at least one of the modes. The method also includes determining a quantitative measure for each of two or more different combinations of the modes thereby determining different quantitative measures. The quantitative measure for each of the different combinations is responsive to how well one of the combinations detects the defects and minimizes detection of the nuisances. The method further includes selecting one or more of the modes for inspection of specimens of the same type as the specimen based on the determined quantitative measures.

Methods and systems for characterizing dimensions and material properties of semiconductor devices by full beam x-ray scatterometry are described herein. A full beam x-ray scatterometry measurement involves illuminating a sample with an X-ray beam and detecting the intensities of the resulting zero diffraction order and higher diffraction orders simultaneously for one or more angles of incidence relative to the sample. The simultaneous measurement of the direct beam and the scattered orders enables high throughput measurements with improved accuracy. The full beam x-ray scatterometry system includes one or more photon counting detectors with high dynamic range and thick, highly absorptive crystal substrates that absorb the direct beam with minimal parasitic backscattering. In other aspects, model based measurements are performed based on the zero diffraction order beam, and measurement performance of the full beam x-ray scatterometry system is estimated and controlled based on properties of the measured zero order beam.

Methods and systems for characterizing dimensions and material properties of semiconductor devices by full beam x-ray scatterometry are described herein. A full beam x-ray scatterometry measurement involves illuminating a sample with an X-ray beam and detecting the intensities of the resulting zero diffraction order and higher diffraction orders simultaneously for one or more angles of incidence relative to the sample. The simultaneous measurement of the direct beam and the scattered orders enables high throughput measurements with improved accuracy. The full beam x-ray scatterometry system includes one or more photon counting detectors with high dynamic range and thick, highly absorptive crystal substrates that absorb the direct beam with minimal parasitic backscattering. In other aspects, model based measurements are performed based on the zero diffraction order beam, and measurement performance of the full beam x-ray scatterometry system is estimated and controlled based on properties of the measured zero order beam.

Provided is a polymer composite material which has a high proton spin polarization even though it is a polymer composite material containing carbon black. The present invention relates to a polymer composite material for .sup.1H dynamic nuclear polarization experiments, containing carbon black, having a thickness of 0.8 mm or less, and being doped with a paramagnetic radical compound.

Embodiments provide a multi-cone X-ray imaging Bragg crystal spectrometer for spectroscopy of small x-ray sources with a well-defined spectral resolution. The spectrometer includes a glass substrate machined to a multi-cone form; and a thin crystal slab attached to the glass substrate, whereby the multi-cone X-ray imaging Bragg crystal spectrometer provides rotational symmetry of a ray pattern, providing for accurate imaging, for each wavelength in the spectral range of interest. One or more embodiments include a streak camera and/or a gated strip detector.

A resin discriminating apparatus includes an X-ray tube which emits X-rays, an X-ray detector which detects X-rays emitted from a sample irradiated with X-rays, a data processing section which creates a spectrum on the basis of a detection signal obtained by the X-ray detector, a peak extraction section which extracts a spectral line due to Compton scattering and a spectral line due to Rayleigh scattering derived from a target element of the X-ray tube on the spectrum, and obtains a peak intensity, and a discrimination section which calculates a scattering intensity ratio which is a ratio of the Rayleigh scattering intensity to the Compton scattering intensity and discriminates the type of resin contained in the sample from the scattering intensity ratio.

A method and a system for fast inspecting a vehicle based on a length measuring device, including: when a subject vehicle enters an inspection region, measuring a first length and a second length of the subject vehicle; determining whether the first length and the second length is respectively larger than or equal to a preset second length threshold; if so, determining whether a gap portion of the subject vehicle between a first portion and a second portion of the subject vehicle appears in a beam emitting region formed by a beam of radiation rays emitted by the system for fast inspecting a vehicle; and when the gap portion appears in the beam emitting region, emitting a beam of radiation rays of a first radiation dose to the subject vehicle according to the gap portion, wherein the subject vehicle moves with respect to the system for fast inspecting a vehicle.

An apparatus for cosmogenic neutron sensing to detect moisture includes a thermal neutron proportional counter. A housing is formed at least partially from a moderating material, which is positioned around the thermal neutron proportional counter. A proportional counter electronics unit is within the housing and has a preamplifier and a shaping amplifier. The preamplifier and shaping amplifier are directly connected to the thermal neutron proportional counter. At least one photovoltaic panel provides electrical power to the thermal neutron proportional counter. A data logger is positioned vertically above the thermal neutron proportional counter and proportional counter electronics unit. A signal from the thermal neutron proportional counter is transmitted through the proportional counter electronics unit and is received by the data logger. The signal indicates a moisture content within a measurement surface of the thermal neutron proportional counter.