A method for measuring damage (D) of a substrate (1) caused by an electron beam (2). The method comprises using an atomic force microscope (AFM) to provide a measurement (S2) of mechanical and/or chemical material properties (P2) of the substrate (1) at an exposure area (1a) of the electron beam (2). The method further comprises calculating a damage parameter (Sd) indicative for the damage (D) based on the measurement (S2) of the material properties (P2) at the exposure area (1a).

A particle beam device comprises a first particle beam column for providing a first particle beam and a second particle beam column for providing a second particle beam. Operating the particle beam device may include: supplying the second particle beam with second charged particles onto an object using the second particle beam column, loading a value of a control parameter into a control unit from a database or calculating the value of the control parameter in the control unit, setting an objective lens excitation of a first objective lens of the first particle beam column using the value of the control parameter, detecting second interaction particles using a particle detector. The second interaction particles may emerge from an interaction of the second particle beam with the object when the second particle beam is incident on the object.

The present invention aims to provide a method for analyzing a fiber structure comprising a fiber and inorganic particles. An analysis method according to the present invention is a method for evaluating a structure comprising a fiber and inorganic particles, said method comprising the steps of: (A) capturing a two-dimensional image of the surface of the fiber structure using a scanning electron microscope; (B) denoising the captured image by adjusting each contrast value; and (C) calculating the standard deviation of the contrast value after denoising.

A spin polarimeter includes: a particle beam source or a photon beam source that is a probe for a sample; a sample chamber in which the sample is accommodated; a spin detector that includes a target to be irradiated with an electron generated from the sample by a particle beam or a photon beam from the probe, and a target chamber in which the target is accommodated, and is configured to detect a spin of the sample by detecting an electron scattered on the target; a first exhaust system that is configured to exhaust the sample chamber; a second exhaust system that is configured to exhaust the target chamber; and an orifice that is disposed between the target chamber and the sample chamber.

A method for analyzing a rock sample includes segmenting a digital image volume corresponding to an image of the rock sample, to associate voxels in the digital image volume with a plurality of rock fabrics of the rock sample. The method also includes identifying a set of digital planes through the digital image volume. The set of digital planes intersects with each of the plurality of rock fabrics. The method further includes machining the rock sample to expose physical faces that correspond to the identified digital planes, performing scanning electron microscope (SEM) imaging of the physical faces to generate two-dimensional (2D) SEM images of the physical faces, and performing image processing on the SEM images to determine a material property associated with each of the rock fabrics.

A method for analyzing a rock sample includes segmenting a digital image volume corresponding to an image of the rock sample, to associate voxels in the digital image volume with a plurality of rock fabrics of the rock sample. The method also includes identifying a set of digital planes through the digital image volume. The set of digital planes intersects with each of the plurality of rock fabrics. The method further includes machining the rock sample to expose physical faces that correspond to the identified digital planes, performing scanning electron microscope (SEM) imaging of the physical faces to generate two-dimensional (2D) SEM images of the physical faces, and performing image processing on the SEM images to determine a material property associated with each of the rock fabrics.

The present application discloses a coal consumption online measuring system, which belongs to the field of analysis and measurement technology. The system includes an equivalent atomic number measuring device, a flow rate measuring device, an ash content measuring device, a volatile content measuring device, a moisture content measuring device and a data acquisition and processing device. The data acquisition and processing device iteratively corrects the measured real-time density, real-time ash content, real-time moisture content and/or real-time volatile content; and the data acquisition and processing device performs online calculation of the coal consumption according to a real-time volume flow rate and the iteratively-corrected real-time density, real-time ash content, real-time moisture content and real-time volatile content. The coal consumption online measuring system of the present application is an independent and complete working system which only uses the measured data from the coal consumption online measuring system itself and does not need to use any data from any production equipment of the energy consumption plant to participate in the calculation thereof or directly serve as an intermediate measuring result, so that the system is not easily disturbed by human factors, and a complete and independent on-line real-time measuring of coal consumption is realized, with accurate measuring results.

An object of the invention is to easily acquire images of a position corresponding among a plurality of sample sections in an imaging device that acquires images of the plurality of sample sections. The imaging device according to the invention generates a cursor for specifying a first observation region and a contour portion of a first sample section, and superimposes the cursor on a contour portion of a second sample section so as to calculate coordinates of a second observation region of the second sample section.

Disclosed herein is a detector, comprising: a pixel comprising a first subpixel and a second subpixel, wherein the first subpixel is configured to generate a first electrical signal upon exposure to radiation, and wherein the second subpixel is configured to generate a second electrical signal upon exposure to the radiation; wherein the detector is configured to determine a number of particles of the radiation incident on the first subpixel over a first period of time, based on the first electrical signal; wherein the detector is configured to determine an intensity of the radiation by integrating the second electrical signal over a second period of time.

A metrology target includes a first set of pattern elements compatible with a first metrology mode along one or more directions, and a second set of pattern elements compatible with a second metrology mode along one or more directions, wherein the second set of pattern elements includes a first portion of the first set of pattern elements, and wherein the second set of pattern elements is surrounded by a second portion of the first set of pattern elements not included in the second set of pattern elements.