The techniques and device provided herein relate to regulating a source generator in an X-ray based equipment. In particular, an X-ray system is provided that comprises an X-ray generator and a reference detector system that regulates the output of the X-ray generator. The reference detector system comprises a direct channel that allows at least a portion of the photons to directly reach the detector crystal and a plurality of fluorescent channels, such that photon flux entering the reference detector from the fluorescent channels is negligibly impacted by variations of beam spots, shapes and/or positions.

Provided are an image acquisition device and an image acquisition method capable of acquiring the internal and external contours of a measured object with a high degree of accuracy. An image acquisition device 1 includes: a first X-ray source 10 that applies X-rays having a first focal point size; a first detector 20 that detects X-rays applied from the first X-ray source 10 and having passed through a measured object O; a first image generation means 30 that generates a first X-ray CT image on the basis of the X-rays detected by the first detector 20; a second X-ray source 40 that applies X-rays having a second focal point size smaller than the first focal point size; a second detector 50 that detects X-rays applied from the second X-ray source and having passed through the measured object O; a second image generation means 60 that generates a second X-ray CT image on the basis of the X-rays detected by the second detector 50; and an image correction means 70 that corrects the first X-ray CT image generated by the first image generation means 30 on the basis of the second X-ray CT image generated by the second image generation means 60.

An inspection apparatus for inspecting an inspection target surface arranged on an inspection plane, includes an X-ray generation tube having a target including an X-ray generation portion that generates X-rays by irradiation with an electron beam, and configured to emit X-rays to the inspection plane, and an X-ray detector configured to detect X-rays emitted from a foreign substance existing on the inspection target surface irradiated with the X-rays from the X-ray generation portion and totally reflected by the inspection target surface. The X-ray detector includes a long X-ray receiver.

A ray scanning apparatus, including: a conveying device for conveying an object under inspection to pass through a scanning area; a ray source assembly including a plurality of ray source modules arranged around the scanning area on an upper side of the conveying device and fixed in a plane perpendicular to a conveying direction of the object under inspection; and a detector assembly including a plurality of detector sets fixed in a plane perpendicular to the conveying direction of the object under inspection; the detector assembly is located between the ray source assembly and the scanning area in a direction perpendicular to the conveying direction of the object under inspection, the ray source assembly and the detector assembly are arranged to overlap at least partially in the conveying direction of the object under inspection, and the plurality of ray source modules are mounted and detached independently of each other.

An x-ray imaging system and method for reconstructing three-dimensional images of a region of interest from spatially and temporally overlapping x-rays using novel reconstruction techniques.

An apparatus includes a transmission x-ray source having a window including a target layer of at least one x-ray generating material and an internal aperture configured to allow a first portion of an electron beam to bombard the target layer and to block a second portion of the electron beam from bombarding the target. The first portion of the electron beam has a full-width-at-half-maximum width at the target less than or equal to 1 micron. The window is spaced from the internal aperture by a first distance D.sub.1. The apparatus further includes an x-ray detector system having a scintillator, an optical assembly, at least one image sensor configured to receive and respond to visible light by generating electrical signals, and a motorized stage configured to controllably adjust a position of the scintillator such that the scintillator is spaced from the window by a second distance D.sub.2, wherein D.sub.2.sup.2/(D.sub.1+D.sub.2).sup.2 is less than 0.2.

A defect inspection system includes an X-ray generator that generates X-ray to be irradiated to a structure, and an X-ray detector that detects the X-ray generated by the X-ray generator and transmitted through the structure. In particular, the X-ray generator is configured to be moved by a first transporting means, and the X-ray detector is configured to be moved by a second transporting means. The system further includes a control unit configured to control and operate the first transporting means and the second transporting means.

Disclosed herein is a method of operating an imaging system which comprises (A) an image sensor comprising (a) a top surface, (b) M physically separate active areas on the top surface, and (c) a dead zone on the top surface and between the M active areas, and (B) a radiation source system which comprises an electron bombardment target, the method comprising: for i=1, . . . , N, sequentially causing emission of X-ray photons (i) from a radiation position (i) by causing electrons to bombard a target surface of the electron bombardment target at the radiation position (i); and for i=1, . . . , N, in response to the emission of the X-ray photons (i), capturing M images (i) of portions (i) of a same object, respectively in the M active areas, resulting in MN images, wherein each point of the object is captured in at least one image of the MN images.

The present disclosure is related to a Schottky thermal field (TFE) source for emitting an electron beam. Electron optics can adjust a shape of the electron beam before the electron beam impacts a scintillator screen. Thereafter, the scintillator screen generates an emission image in the form of light. An emission image can be adjusted and captured by a camera sensor in a camera at a desired magnification to create a final image of the Schottky TFE source's tip. The final image can be displayed and analyzed to for defects.

The techniques and device provided herein relate to regulating a source generator in an X-ray based equipment. In particular, an X-ray system is provided that comprises an X-ray generator and a reference detector system that regulates the output of the X-ray generator. The reference detector system comprises a direct channel that allows at least a portion of the photons to directly reach the detector crystal and a plurality of fluorescent channels, such that photon flux entering the reference detector from the fluorescent channels is negligibly impacted by variations of beam spots, shapes and/or positions.