A method for analyzing an object, includes irradiating the object with incident photon radiation, acquiring a spectrum transmitted by the object using a spectrometric transmission detector, determining at least one first property of the object from the transmission spectrum, verifying that at least one doubt criterion relating to the first property of the object is met, and translating the fact that the object contains a material that is potentially dubious for the application under consideration. A second part, carried out only when the doubt criterion is met, includes acquiring an energy spectrum scattered by the object using a spectrometric scattering detector at an angle of 1 to 15, and determining a second property of the object from at least the scatter spectrum and comparing at least the second property of the object with properties of standard materials stored in a database to identify the objects composition material.

A computed tomography (CT) detector apparatus includes a plurality of detectors arranged in a ring, each detector being arranged inside a Faraday cage having a plurality of voltage-biased side-electrodes arranged on a side surface of the Faraday cage. The detectors include photon-counting detectors (PCDs). A voltage applied to the voltage-biased side-electrodes decreases from the anode side of the PCD to the cathode side of the PCD.

The present disclosure discloses an inspection device, an inspection method and an inspection system. The device comprises a distributed ray source comprising multiple source points; a light source collimator configured to converge the rays generated by the distributed ray source to form an inverted fan-shaped ray beam; a scatter collimator configured to only allow rays scattered at one or more particular scattering angles which are generated by the rays from the light source collimator interacting with inspected objects to pass; at least one detector each comprising multiple detection units which have an energy resolution capability and are substantially arranged in a cylindrical surface to receive the scattered rays passing through the scatter collimator; and a processing apparatus configured to calculate energy spectrum information of the scattered rays from the inspected objects based on a signal output by the detectors.

An X-ray inspection device includes an X-ray detection element that outputs a pulse signal with a peak value corresponding to an energy of an X-ray passing through an inspection region, an X-ray detection unit consisting of a plurality of pixels that detect the number of the pulse signals exceeding a predetermined threshold voltage, among the pulse signals output from the X-ray detection element, a storage unit that stores, for each pixel, a correspondence relationship between a value of a control parameter to cause the number of the pulse signals exceeding the threshold voltage to change and the number of the pulse signals detected by respective pixels, and an output unit that outputs abnormal pixel information based on the correspondence relationship between the value of the control parameter and the number of the pulse signals detected by respective pixels, the correspondence relationship being read out from the storage unit.

Some embodiments relate to a computer system for determining a structural image of a sample. The computer system is configured to receive and process raw measured data produced by a scanning microscope and being indicative of at least one scan dataset (I.sub.M).sub.N acquired in a scan session and corresponding to a sequence of N measurements on a sample located in proximity to a focal plane of the scanning microscope. Each measurement includes data provided by M detection channels associated with M-segment detector (M3). The computer system includes a data analyzer capable of processing at least one scan dataset to compensate image shifts induced by off-axis detection channels for sample features at defocus plane to thereby obtain data indicative of parallax corrected scan image of the sample which enables separation between phase and depth information and extraction of a depth contrast image of the sample from the single scan dataset.

Disclosed are an X-ray transmission inspection apparatus and an inspection method using the same that are capable of preventing over-detection and erroneous detection of foreign matter even when variations in vertical position of the sample occur. The X-ray transmission inspection apparatus includes: an X-ray source (2) irradiating a sample with X-rays; a sample moving device (3) moving the sample S continuously to a predetermined direction while X-rays X are emitted from the X-ray source; a time delay integration sensor (TDI sensor) (4) provided opposed to the X-ray source based on the sample, and detecting the X-rays transmitted through the sample; a distance sensor (5) measuring a distance between the X-ray source and the sample; and a TDI controller (6) controlling the TDI sensor by changing a charge transfer speed of the TDI sensor (4) in real time based on variations in the distance measured by the distance sensor.

An X-ray inspection apparatus includes a conveying unit configured to convey an article, an irradiation unit configured to irradiate the article conveyed by the conveying unit with X-rays, a sensor unit in which detecting elements are arranged in a planar shape, an image generation unit configured to read detection results output from at least some of the detecting elements and generate an image, and a mode switching unit configured to switch an operation mode between a first mode in which a first electric power is supplied to the irradiation unit and a second mode in which a second electric power less than the first electric power is supplied to the irradiation unit, where the mode switching unit changes, when switching the operation mode from the first mode to the second mode, a read frequency at which the image generation unit reads the detection results.

A radiation detector unit includes a read-out integrated circuit (ROIC) including a plurality of core circuit blocks located on a continuous uninterrupted substrate adjacent to one another along a first direction, and a plurality of radiation sensors bonded to a front side surface of the ROIC, where each radiation sensor of the plurality of radiation sensors is bonded to a respective core circuit block of the plurality of core circuit blocks of the ROIC. Additional embodiments include detector modules and detector arrays formed by assembling the detector units, and methods of operating and manufacturing the same.

Methods, apparatuses, and software are disclosed for multilayer metrology. One method includes obtaining image data of an object with an SEM system, with the image data acquired at multiple landing energy levels. A composed image is generated by performing pixel-by-pixel image processing of the image data. A metrology characteristic is determined from the composed image and metrology is performed on a feature based on the metrology characteristic.

There is provided a transmission X-ray diffraction (XRD) apparatus, the transmission XRD apparatus including an X-ray source for generating a direct X-ray beam; sample holder for receiving the sample, the sample being positioned to receive the direct X-ray beam when held by the sample holder; a detector for receiving X-rays transmitted through the sample and outputting an X-ray diffraction pattern therefrom; and an optical element positioned between the X-ray source and the detector, the optical element including a Montel optic and a secondary pin-hole collimator collectively adapted to focus the direct X-ray beam on the detector, wherein a ratio between a dimension of the direct X-ray beam projected on the detector and a sample-to-detector distance is equal or smaller than 1/570. Related methods are also provided.