System and method can support a measurement module on a movable object. The measurement module includes a first circuit board with one or more sensors. Additionally, the measurement module includes a weight block assembly, wherein the weight block assembly is configured to have a mass that keeps an inherent frequency of the measurement module away from an operation frequency of the movable object. Furthermore, said first circuit board can be disposed in an inner chamber within the weight block assembly.

An inertial measurement unit includes: a sensor unit including an inertial sensor, a case accommodating the inertial sensor, and a first fixing part having the case fixed thereto; an elastic member having a first elastic member mainly damping a vibration at a predetermined frequency in a first direction and a second elastic member mainly damping a vibration at a predetermined frequency in a second direction that is different from the first direction; a second fixing part where the sensor unit and the elastic member are arranged; and a fixing member fixing the sensor unit and the elastic member to the second fixing part.

In order to provide a technology capable of suppressing degradation of measurement accuracy ale to fluctuation of detection sensitivity of an MEMS by suppressing fluctuation in natural frequency of the MEMS caused by a stress, first, fixed portions 3a to 3d are displaced outward in a y-direction of a semiconductor substrate 2 by deformation of the semiconductor substrate 2. Since a movable body 5 is disposed in a state of floating above the semiconductor substrate 2, it is not affected and displaced by the deformation of the semiconductor substrate 2. Therefore, a tensile stress (+.sub.1) occurs in the beam 4a and a compressive stress (.sub.2) occurs in the beam 4b. At this time, in terms of a spring system made by combining the beam 4a and the beam 4b, increase in spring constant due to the tensile stress acting on the beam 4a and decrease in spring constant due to the compressive stress acting on the beam 4b are offset against each other.

A handheld device includes a base comprising a handgrip for receiving a vibration movement, a gripping element linked to the base for releasably connecting the handheld device to an object, at least one inertia sensor for detecting an acceleration of the vibration movement to generate an acceleration signal, a processing unit for determining to generate a cancellation decision according to the acceleration signal, and at least one actuator for controlling movement of the gripping element according to the cancellation decision, such that the acceleration is counteracted.

Systems and methods for isolated sensor device protection are provided. In one embodiment, an isolated sensor device comprises: a housing having an isolation chamber; an isolator sealed within the isolation chamber; an inertial sensor assembly sealed within the isolation chamber, the inertial sensor assembly coupled to an inner surface of the isolation chamber by the isolator; and at least one progressive impact interface applied to a periphery of the inertial sensor assembly, wherein the at least one progressive impact interface extends outward from the inertial sensor assembly towards the inner surface.

A mechanical low-pass filter positioned between a vibration source, which generates a high-energy phenomenon, and an acceleration sensor is provided. The mechanical low-pass filter is placed on one side of the acceleration sensor and is formed of an elastomer and configured to absorb an external vibration transmitted to the acceleration sensor, to filter out a frequency higher than a cut-off frequency, and to remove an influence of a high-frequency excitation. The cut-off frequency is adjustable by a number and size of through holes formed in an interior of the mechanical low-pass filter and an initial compression strain.

A sensor assembly comprises a case structure, a support structure having a plurality of surfaces and located within the case structure, and at least one sensor package having a sensor lid. The sensor lid is mechanically coupled to one of the surfaces of the support structure. At least one sensor board is connected to the at least one sensor package. At least one isolator structure is coupled between at least one of the surfaces of the support structure and the case structure.

An accelerometer system including an accelerometer comprising a proof mass assembly the proof mass assembly comprising: a plurality of dampening plates; at least two proof mass elements, wherein each proof mass element of the at least two proof mass elements is disposed between two dampening plates of the plurality of dampening plates; and a plurality of resonators, wherein at least two resonators of the plurality of resonators is coupled to each proof mass element of the at least two proof mass elements.