A hybrid MEMS microfluidic gyroscope is disclosed. The hybrid MEMS microfluidic gyroscope may include a micro-machined base enclosure having a top fluid enclosure, a fluid sensing enclosure and a bottom fluid enclosure. The hybrid MEMS microfluidic gyroscope may include a plurality of cantilevers disposed within the bottom semi-circular portion of the micro-machined base enclosure or a single membrane disposed within the bottom semi-circular portion of the micro-machined base enclosure.

The disclosure discloses an acceleration sensor, where the acceleration sensor comprises: a housing, and a mass block in the housing and connected with the housing via at least two hanging beams, where an auxiliary buffer component is further provided between the mass block and a bottom surface of the housing, and an elastic coefficient of the auxiliary buffer component decreases as force applied thereon increases.

A device includes a channel, a slit, and a cap. The channel is formed on a surface of the device. The slit separates the channel to a first portion and a second portion. The first portion comprises liquid metal, e.g., gallatin. The second portion comprises gas. The liquid metal moves within the channel between the first and the second portions in response to external stimuli, e.g., pressure. The liquid metal moving within the channel changes electrical characteristics, e.g., capacitive value, inductance value, resistance value, resonance frequency, etc., of the device.

Disclosed are a motion-sensitive field effect transistor (MSFET), a motion detection system, and a method. The MSFET includes a gate structure with a reservoir containing conductive fluid and gate electrode(s). Given position(s) of the gate electrode(s) and a fill level of the fluid within the reservoir, contact between the gate electrode(s) and the fluid depends upon the orientation the MSFET channel region relative to the top surface of the conductive fluid and the orientation of the MSFET channel region relative to the top surface of the conductive fluid depends upon position in space and/or movement of the MSFET and, particularly, position in space and/or movement of the chip on which the MSFET is formed. An electrical property of the MSFET in response to specific bias conditions varies depending on whether or not or to what extent the gate electrode(s) contact the fluid and is, thus, measurable for sensing chip motion.

A flexible electronic device includes a flexible electronic circuit and a flexible microfluidic sensor homogeneously integrated into the flexible circuit. The flexible sensor includes a flexible microfluidic structure, a first material, a second material, and an electrode arrangement. At least one of the first and second materials is a fluid. The structure defines at least one microfluidic chamber. The first and second materials are disposed in the chamber. The second material has a physical property and an electrical property different from the first material. The electrode arrangement includes at least one pair of electrodes spaced apart from each other with at least a portion of the at least one chamber located functionally directly therebetween such that at least one electronic property measured across the pair is based on a relationship between the second material and the electrode pair. The relationship is based on a physical condition of the microfluidic structure.

Techniques are described herein that perform pressure sensing using pressure sensor(s) that include deformable pressure vessel(s). A pressure vessel is an object that has a cross section that defines a void. A deformable pressure vessel is a pressure vessel that has at least one curved portion that is configured to structurally deform (e.g., bend, shear, elongate, etc.) based on a pressure difference between a cavity pressure in a cavity in which at least a portion of the pressure vessel is suspended and a vessel pressure in the pressure vessel.

A micromechanical component is provided, the micromechanical component enclosing a cavity, the micromechanical component including a sensor element situated in the cavity, and the micromechanical component including a getter situated in the cavity. The micromechanical component includes a structure, situated between the sensor element and the getter, which is designed in such a way that a particle that is desorbed by the getter is sorbed onto and/or into an area of the micromechanical component that is spaced apart from the sensor element.

An acceleration sensor includes an upper base plate; a lower base plate; and a gallium-based liquid metal encapsulated in graphene. The lower base plate includes a first surface including at least one diamond channel, and the upper base plate includes a second surface including a metal electrode corresponding to the at least one diamond channel in position; the liquid metal is disposed in a center of the at least one diamond channel; the first surface is bonded to the second surface through an adhesive; the liquid metal is movable in the at least one diamond channel and is in electrical contact with the metal electrode of the upper base plate during movement.

Impact or acceleration sensor, which contains a liquid droplet and is designed such that the position and/or distribution of the liquid indicates whether an impact or any other acceleration of a predetermined minimum magnitude has occurred, includes: first and second foils, a cavity disposed between the foil faces of the foils and at least one retaining structure disposed on the foil face of the first and/or second foil and functions to maintain the liquid in a predetermined first sub-volume of the cavity. The retaining structure is a region of the first and/or second foil formed as a local elevation, depression or irregularity of the foil face, which forms a passable barrier for the wetting and/or contacting of the first and/or second foil by the liquid and defines an area piece of the foil face of the first and/or second foil corresponding to the first sub-volume.

A micromechanical component is provided, the micromechanical component enclosing a cavity, the micromechanical component including a sensor element situated in the cavity, and the micromechanical component including a getter situated in the cavity. The micromechanical component includes a structure, situated between the sensor element and the getter, which is designed in such a way that a particle that is desorbed by the getter is sorbed onto and/or into an area of the micromechanical component that is spaced apart from the sensor element.