Patent classifications
G
PHYSICS
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G01
MEASURING; TESTING
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G01Q
SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
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10/00
Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
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G01Q10/02
Coarse scanning or positioning
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