The present disclosure relates to a manipulator used for clamping probes, a detection device having a manipulator, and a method for detecting the physical features of micro-nano components. The manipulator comprises a positioning adjustment assembly, which comprises a slide rail assembly. The slide rail assembly comprises a slide rail cover and an elastic element. The slide rail cover comprises a slide rail received in a slide groove of a slide rail base, and the two ends of the elastic element respectively fixed to the slide rail base and the slide rail cover. The manipulator further includes a handwheel assembly, a cantilever connected to the positioning adjustment assembly, and a clamping member comprising a hole. The handwheel assembly can contact the slide rail cover, and a connecting member is received within a groove of the cantilever.

The present disclosure relates to a manipulator used for clamping probes, a detection device having a manipulator, and a method for detecting the physical features of micro-nano components. The manipulator comprises a positioning adjustment assembly, which comprises a slide rail assembly. The slide rail assembly comprises a slide rail cover and an elastic element. The slide rail cover comprises a slide rail received in a slide groove of a slide rail base, and the two ends of the elastic element respectively fixed to the slide rail base and the slide rail cover. The manipulator further includes a handwheel assembly, a cantilever connected to the positioning adjustment assembly, and a clamping member comprising a hole. The handwheel assembly can contact the slide rail cover, and a connecting member is received within a groove of the cantilever.

The present disclosure relates to a method of operating an SPM system including a landing procedure. The landing procedure comprises a first landing stage including a first translation over a first actuation distance by a coarse translation means to bring a probe tip held by an SPM head from an initial separation from a substrate to be probed to a second, more proximal, separation as defined by a characteristic transitional response of the probe tip in proximity to the substrate. Following the first stage a second translation is applied, over a second actuation distance by a fine translation means under feedback control to bring the probe tip to a working separation. Prior to applying the first (coarse) actuation distance an initial optical distance is determined which is indicative of the initial separation, using a detector, preferably a mark sensor. The measured initial optical distance is related to a reference distance so as to determine a deviation. The first actuation distance corresponds the reference distance and the deviation. The disclosure also relates to an SPM system and software product arranged to implement the landing method.

The present disclosure relates to a method of operating an SPM system including a landing procedure. The landing procedure comprises a first landing stage including a first translation over a first actuation distance by a coarse translation means to bring a probe tip held by an SPM head from an initial separation from a substrate to be probed to a second, more proximal, separation as defined by a characteristic transitional response of the probe tip in proximity to the substrate. Following the first stage a second translation is applied, over a second actuation distance by a fine translation means under feedback control to bring the probe tip to a working separation. Prior to applying the first (coarse) actuation distance an initial optical distance is determined which is indicative of the initial separation, using a detector, preferably a mark sensor. The measured initial optical distance is related to a reference distance so as to determine a deviation. The first actuation distance corresponds the reference distance and the deviation. The disclosure also relates to an SPM system and software product arranged to implement the landing method.