A detection apparatus used for detecting an object includes a first platform, a second platform and a plurality of screws. The first platform includes a plurality of first circuit boards that are joggle jointed and combined with each other, at least part of the first circuit boards are electrically connected to each other, and a carrying table for carrying the object to be detected is disposed on the first platform. The second platform includes at least one second circuit board, a detection module being disposed on the second platform for detecting the object, and the detection module is electrically connected to at least a part of the second circuit board. The screws are connected between the first platform and the second platform. The detection apparatus is mainly made by joggle jointing the circuit boards, so that the manufacturing is easy, costs are low, and the detection apparatus is easy to assemble, has small volume and light weight, and is convenient to carry.

Method for positioning and orienting a first object relative to a second object. The method includes positioning a near field transducer having an aperture on the first object, and directing a laser light toward the aperture of the near field transducer on the first object to create an effervescent wave on the other side of the aperture. Positioning a sensor on the second object for detecting the effervescent wave from the near field transducer. Providing an algorithm, and using information obtained from the sensor on the second object in the algorithm to control a nanopositioning system to position one of the first object and the second object in a desired position and orientation relative to the other one of the first object and the second object.

Method for positioning and orienting a first object relative to a second object. The method includes positioning a near field transducer having an aperture on the first object, and directing a laser light toward the aperture of the near field transducer on the first object to create an effervescent wave on the other side of the aperture. Positioning a sensor on the second object for detecting the effervescent wave from the near field transducer. Providing an algorithm, and using information obtained from the sensor on the second object in the algorithm to control a nanopositioning system to position one of the first object and the second object in a desired position and orientation relative to the other one of the first object and the second object.

The invention provides a scanning probe microscope capable of eliminating the influence of vibration noise and obtaining, accurately and with high resolution, surface information of a sample S. A scanning probe microscope 1 includes: a main body unit 10; a control unit 30; and a wireless stand 60 that is connected to the control unit 30 through a power supply signal cable 42 and includes a power supplying coil 63 and a transmission and reception unit 64. The main body unit 10 includes: a cantilever 21 with a probe 21a; a sensor 23 for detecting displacement of the cantilever 21; an XYZ drive mechanism 25 that is controlled by the control unit 30 to move the cantilever 21 or the sample S; a vibration isolation mechanism 12; a power receiving coil 13; and a transmission and reception unit 14 for communicating with the transmission and reception unit 64.

The invention provides a scanning probe microscope capable of eliminating the influence of vibration noise and obtaining, accurately and with high resolution, surface information of a sample S. A scanning probe microscope 1 includes: a main body unit 10; a control unit 30; and a wireless stand 60 that is connected to the control unit 30 through a power supply signal cable 42 and includes a power supplying coil 63 and a transmission and reception unit 64. The main body unit 10 includes: a cantilever 21 with a probe 21a; a sensor 23 for detecting displacement of the cantilever 21; an XYZ drive mechanism 25 that is controlled by the control unit 30 to move the cantilever 21 or the sample S; a vibration isolation mechanism 12; a power receiving coil 13; and a transmission and reception unit 14 for communicating with the transmission and reception unit 64.

The present invention relates to a scan head for a scanning probe microscope arranged for moving a probe including a conductive cantilever relatively to a substrate surface, the head comprising: a first electrode positioned such that a capacitor is formed across a gap between the first electrode and a second electrode, wherein the second electrode is formed by the conductive cantilever; a voltage source for actuating the conductive cantilever by applying a voltage to the capacitor; and at least a first resistor arranged in series between the voltage source and one of the first and second electrodes such as to form an RC circuit for damping a vibration of the cantilever.

A semiconductor carrier profiling method utilizes a scanning tunneling microscope and shielded probe with an attached spectrum analyzer to measure power loss of a microwave frequency comb generated in a tunneling junction. From this power loss and by utilizing an equivalent circuit or other model, spreading resistance may be determined and carrier density from the spreading resistance. The methodology is non-destructive of the sample and allows scanning across the surface of the sample. By not being destructive, additional analysis methods, like deconvolution, are available for use.

A semiconductor carrier profiling method utilizes a scanning tunneling microscope and shielded probe with an attached spectrum analyzer to measure power loss of a microwave frequency comb generated in a tunneling junction. From this power loss and by utilizing an equivalent circuit or other model, spreading resistance may be determined and carrier density from the spreading resistance. The methodology is non-destructive of the sample and allows scanning across the surface of the sample. By not being destructive, additional analysis methods, like deconvolution, are available for use.

The present invention relates to an atomic force microscope for evaluating a surface of a sample, comprising a sample holder, having a first zone suitable for receiving the sample mounted in a stationary manner, a probe having a tip able to be positioned facing the surface of the sample, the microscope being configured to allow an adjustment of a position of the tip relative to the surface, and a support, the sample holder having at least one second zone, separate from the first zone and stationary relative to the support, the sample holder being deformable so as to allow a relative movement of the first zone with respect to the second zone, and the microscope comprising a detector able to detect a movement of the first zone relative to the second zone.

A method of detecting the positions of a plurality of probes. An input beam is directed into an optical device and transformed into a plurality of output beamlets which are not parallel with each other. Each output beamlet is split into a sensing beamlet and an associated reference beamlet. Each of the sensing beamlets is directed onto an associated one of the probes with an objective lens to generate a reflected beamlet which is combined with its associated reference beamlet to generate an interferogram. Each interferogram is measured to determine the position of an associated one of the probes. A similar method is used to actuate a plurality of probes. A scanning motion is generated between the probes and the sample. An input beam is directed into an optical device and transformed into a plurality of actuation beamlets which are not parallel with each other.