The present application relates to an apparatus for a scanning probe microscope, said apparatus having: (a) at least one first measuring probe having at least one first cantilever, the free end of which has a first measuring tip; (b) at least one first reflective area arranged in the region of the free end of the at least one first cantilever and embodied to reflect at least two light beams in different directions; and (c) at least two first interferometers embodied to use the at least two light beams reflected by the at least one first reflective area to determine the position of the first measuring tip.

To enhance the measurement sensitivity of a scanning probe microscope. In a cross sectional view, a cantilever includes a vertex portion that is a portion close to a sample and is covered by a metallic film, a ridge that is connected to the vertex portion and is covered by the metallic film, and an upper corner portion that is connected to the ridge. Here, the upper corner portion and a part of the ridge are portions to be irradiated with excitation light emitted from a light source of the scanning probe microscope.

To enhance the measurement sensitivity of a scanning probe microscope. In a cross sectional view, a cantilever includes a vertex portion that is a portion close to a sample and is covered by a metallic film, a ridge that is connected to the vertex portion and is covered by the metallic film, and an upper corner portion that is connected to the ridge. Here, the upper corner portion and a part of the ridge are portions to be irradiated with excitation light emitted from a light source of the scanning probe microscope.

Disclosed is a multipurpose scanning microscopy probe comprising a probe holder, a cantilever connected to the probe holder, and a probe tip connected to the cantilever, wherein the probe tip is a three-dimensional geometry, and wherein the probe tip is a 3D printed part. In some embodiments the probe is made from SU8 epoxy-based resin. In some embodiments the probe is made from a combination of SU8 and nanomaterial such as carbon nanotubes. In some embodiments the probe includes cavities and voids. In some embodies the probe includes fluidic features and elements. Scanning microscopy probe methods are also disclosed.

The present document relates to a scanning probe microscopy system and method for mapping nanostructures on the surface of a sample. The system comprises a sample support structure, a scan head including a probe comprising a cantilever and a probe tip, and an actuator for scanning the probe tip relative to the sample surface. The system also includes an optical source, and a sensor unit for obtaining a sensor signal indicative of a position of the probe tip. The sensor unit includes a partially reflecting element for reflecting a reference fraction and for transmitting a sensing fraction of the optical signal. It further includes directional optics for directing the sensing fraction as an optical beam towards the probe tip, and for receiving a reflected fraction thereof to provide a sensed signal. Moreover the sensor includes an interferometer for providing one or more output signals, and signal conveyance optics for conveying the sensed signal and the reference signal to the interferometer. The directional optics is configured for directing the sensing fraction such that at least a part of the sensing fraction is reflected by the probe tip such as to form the reflected fraction.

The present document relates to a scanning probe microscopy system and method for mapping nanostructures on the surface of a sample. The system comprises a sample support structure, a scan head including a probe comprising a cantilever and a probe tip, and an actuator for scanning the probe tip relative to the sample surface. The system also includes an optical source, and a sensor unit for obtaining a sensor signal indicative of a position of the probe tip. The sensor unit includes a partially reflecting element for reflecting a reference fraction and for transmitting a sensing fraction of the optical signal. It further includes directional optics for directing the sensing fraction as an optical beam towards the probe tip, and for receiving a reflected fraction thereof to provide a sensed signal. Moreover the sensor includes an interferometer for providing one or more output signals, and signal conveyance optics for conveying the sensed signal and the reference signal to the interferometer. The directional optics is configured for directing the sensing fraction such that at least a part of the sensing fraction is reflected by the probe tip such as to form the reflected fraction.

An atomic force microscope is provided having a controller configured to store one or more positional parameters output by a sensor assembly when a light spot is located at a first preset position on the surface of the cantilever. The controller is further configured to operate an actuator assembly so as to induce movement of the spot away from the first preset position, to detect said movement of the first spot based on a change in the one or more positional parameters output by the sensor assembly, and to operate an optical assembly in response to the detected movement of the first spot to return the first spot to the first preset position.

An atomic force microscope is provided having a controller configured to store one or more positional parameters output by a sensor assembly when a light spot is located at a first preset position on the surface of the cantilever. The controller is further configured to operate an actuator assembly so as to induce movement of the spot away from the first preset position, to detect said movement of the first spot based on a change in the one or more positional parameters output by the sensor assembly, and to operate an optical assembly in response to the detected movement of the first spot to return the first spot to the first preset position.

An article of manufacture includes a support structure including a cladding material and defining therein a plurality of substantially parallel cores. The article also includes a plurality of conically-shaped spikes protruding from a first side of the support structure. Each respective conically-shaped spike of the plurality of conically-shaped spikes includes a core material (i) extending through a corresponding core of the plurality of substantially parallel cores and (ii) comprising an axial protrusion that protrudes axially from the cladding material at the first side of the support structure. The axial protrusion of the core material is tapered to form the respective conically-shaped spike. The article also includes a refractory metal layer coating at least a portion of each respective conically-shaped spike and one or more electrodes connected to the refractory metal layer and configured to apply a voltage to the refractory metal layer.

An article of manufacture includes a support structure including a cladding material and defining therein a plurality of substantially parallel cores. The article also includes a plurality of conically-shaped spikes protruding from a first side of the support structure. Each respective conically-shaped spike of the plurality of conically-shaped spikes includes a core material (i) extending through a corresponding core of the plurality of substantially parallel cores and (ii) comprising an axial protrusion that protrudes axially from the cladding material at the first side of the support structure. The axial protrusion of the core material is tapered to form the respective conically-shaped spike. The article also includes a refractory metal layer coating at least a portion of each respective conically-shaped spike and one or more electrodes connected to the refractory metal layer and configured to apply a voltage to the refractory metal layer.