Patent classifications
G01Q20/04
Method and Apparatus of Using Peak Force Tapping Mode to Measure Physical Properties of a Sample
Methods and apparatuses are provided for automatically controlling and stabilizing aspects of a scanning probe microscope (SPM), such as an atomic force microscope (AFM), using Peak Force Tapping (PFT) Mode. In an embodiment, a controller automatically controls periodic motion of a probe relative to a sample in response to a substantially instantaneous force determined and automatically controls a gain in a feedback loop. A gain control circuit automatically tunes a gain based on separation distances between a probe and a sample to facilitate stability. Accordingly, instability onset is quickly and accurately determined during scanning, thereby eliminating the need of expert user tuning of gains during operation.
Method and Apparatus of Using Peak Force Tapping Mode to Measure Physical Properties of a Sample
Methods and apparatuses are provided for automatically controlling and stabilizing aspects of a scanning probe microscope (SPM), such as an atomic force microscope (AFM), using Peak Force Tapping (PFT) Mode. In an embodiment, a controller automatically controls periodic motion of a probe relative to a sample in response to a substantially instantaneous force determined and automatically controls a gain in a feedback loop. A gain control circuit automatically tunes a gain based on separation distances between a probe and a sample to facilitate stability. Accordingly, instability onset is quickly and accurately determined during scanning, thereby eliminating the need of expert user tuning of gains during operation.
Microfabricated optical probe
A microfabricated optical probe includes: a cantilever; an optical waveguide disposed at a periphery of the cantilever and including an optical loop, the optical loop being disposed coplanar with the cantilever; a mechanical support interposed between and interconnecting the cantilever and the optical waveguide with the mechanical support such that the cantilever and optical waveguide move together; and a substrate on which the cantilever is disposed and from which the cantilever and the optical loop protrude, wherein the cantilever and the optical waveguide flex independently of the substrate.
SCATTERING-TYPE SCANNING NEAR-FIELD OPTICAL MICROSCOPY WITH AKIYAMA PIEZO-PROBES
A scattering-type scanning near-field optical microscope at cryogenic temperatures (cryo-SNOM) configured with Akiyama probes for studying low energy excitations in quantum materials present in high magnetic fields. The s-SNOM is provided with atomic force microscopy (AFM) control, which predominantly utilizes a laser-based detection scheme for determining the cantilever tapping motion of metal-coated Akiyama probes, where the cantilever tapping motion is detected through a piezoelectric signal. The Akiyama-based cryo-SNOM attains high spatial resolution, good near-field contrast, and is able to perform imaging with a significantly more compact system capable of handling simultaneous demands of vibration isolation, low base temperature, precise nano-positioning, and optical access. Results establish the potential of s-SNOM based on self-sensing piezo-probes, which can easily accommodate near-IR and far-infrared wavelengths and high magnetic fields. Using a tuning fork-based Akiyama probe provides nano-imaging capability at room and low temperatures and is used for near-field photocurrent mapping.
SCATTERING-TYPE SCANNING NEAR-FIELD OPTICAL MICROSCOPY WITH AKIYAMA PIEZO-PROBES
A scattering-type scanning near-field optical microscope at cryogenic temperatures (cryo-SNOM) configured with Akiyama probes for studying low energy excitations in quantum materials present in high magnetic fields. The s-SNOM is provided with atomic force microscopy (AFM) control, which predominantly utilizes a laser-based detection scheme for determining the cantilever tapping motion of metal-coated Akiyama probes, where the cantilever tapping motion is detected through a piezoelectric signal. The Akiyama-based cryo-SNOM attains high spatial resolution, good near-field contrast, and is able to perform imaging with a significantly more compact system capable of handling simultaneous demands of vibration isolation, low base temperature, precise nano-positioning, and optical access. Results establish the potential of s-SNOM based on self-sensing piezo-probes, which can easily accommodate near-IR and far-infrared wavelengths and high magnetic fields. Using a tuning fork-based Akiyama probe provides nano-imaging capability at room and low temperatures and is used for near-field photocurrent mapping.
Piezoelectric actuator and method of measuring motion by using the same
A piezoelectric actuator and a method of measuring a motion by using the piezoelectric actuator are provided. The piezoelectric actuator includes: a movable member that is disposed to face the fixed member; a piezoelectric element that is disposed between the fixed member and the movable member, and configured to operate in a shear mode based on input voltages applied to the piezoelectric element and move the movable member relative to the fixed member; and a position sensor that is disposed between the piezoelectric element and the movable member, and configured to measure a motion of the movable member.
Piezoelectric actuator and method of measuring motion by using the same
A piezoelectric actuator and a method of measuring a motion by using the piezoelectric actuator are provided. The piezoelectric actuator includes: a movable member that is disposed to face the fixed member; a piezoelectric element that is disposed between the fixed member and the movable member, and configured to operate in a shear mode based on input voltages applied to the piezoelectric element and move the movable member relative to the fixed member; and a position sensor that is disposed between the piezoelectric element and the movable member, and configured to measure a motion of the movable member.
Microwave impedance microscopy using a tuning fork
A microwave impedance microscope including a tuning fork having a high-aspect ratio etched metal tip electrode extending transversely to one tine of the fork and having a high aspect ratio to thereby reduce parasitic capacitance. The metal tip may be electrochemically etched from a wire, then bonded to the tine. The fork is slightly inclined from the surface of the sample and the tip electrode projects transversely to the fork. A microwave signal is impressed on the tip. Microwave circuitry receives microwave signals reflected from the sample back into the tip and demodulates the reflected signal according to the impressed signal. Further circuitry further demodulates the reflected signal according to the lower-frequency signal causing the fork to oscillate at its mechanically resonant frequency. A multi-wavelength matching circuit interposed between the microwave circuitry and the probe includes a coaxial cable of length half a fundamental microwave wavelength.
Microwave impedance microscopy using a tuning fork
A microwave impedance microscope including a tuning fork having a high-aspect ratio etched metal tip electrode extending transversely to one tine of the fork and having a high aspect ratio to thereby reduce parasitic capacitance. The metal tip may be electrochemically etched from a wire, then bonded to the tine. The fork is slightly inclined from the surface of the sample and the tip electrode projects transversely to the fork. A microwave signal is impressed on the tip. Microwave circuitry receives microwave signals reflected from the sample back into the tip and demodulates the reflected signal according to the impressed signal. Further circuitry further demodulates the reflected signal according to the lower-frequency signal causing the fork to oscillate at its mechanically resonant frequency. A multi-wavelength matching circuit interposed between the microwave circuitry and the probe includes a coaxial cable of length half a fundamental microwave wavelength.
Polymeric Micro-Arm Apparatus And Method To Use The Same
A polymeric micro-arm apparatus and method to use the same. The apparatus comprises of an elongated hollow polymeric structure with a distal end and a proximal end, an opening near the distal end, a main body attached to the polymeric structure means to move the polymeric structure, means to generate fluid flow through the opening, means to measure a flowrate of the fluid flow through the opening; and an element embedded in the polymeric structure, wherein the element is configured to detect when the polymeric structure contacts an object and measures the force that the object exerts upon the polymeric structure.