When a liquid surface is detected based on a detection signal from a photodetector during the approaching operation, a photodetector movement processor moves the photodetector to a position where reflected light from a cantilever is incident with the cantilever being in liquid. When the reflected light from the cantilever is incident on the photodetector during the approaching operation continued after the movement of the photodetector by the photodetector movement processor, an optical axis adjustment processor adjusts an optical axis of the reflected light incident on the photodetector. When a surface of a solid sample is detected based on a detection signal from the photodetector during the approaching operation continued after the adjustment of the optical axis by the optical axis adjustment processor, an approaching processor stops the approaching operation.

The surface of the atomic force microscopy (AFM) cantilever is defined by a main cantilever body and an island. The island is partly separated from the main body by a separating space between facing edges of the main body and the island. At least one bridge connects the island to the main body, along a line around which the island is able to rotate through torsion of the at least one bridge. The island has a probe tip located on the island at a position offset from said line and a reflection area. In an AFM a light source directs light to the reflection area and a light spot position detector detects a displacement of a hght spot formed from light reflected by the reflection area, for measuring an effect of forces exerted on the probe tip.

The surface of the atomic force microscopy (AFM) cantilever is defined by a main cantilever body and an island. The island is partly separated from the main body by a separating space between facing edges of the main body and the island. At least one bridge connects the island to the main body, along a line around which the island is able to rotate through torsion of the at least one bridge. The island has a probe tip located on the island at a position offset from said line and a reflection area. In an AFM a light source directs light to the reflection area and a light spot position detector detects a displacement of a hght spot formed from light reflected by the reflection area, for measuring an effect of forces exerted on the probe tip.

A MEMS microforce sensor for high temperature nanoindentation is used for determining a mechanical property of a sample by sensing a deflection and measuring a force. The MEMS microforce sensor includes at least a cold movable body, a heatable movable body, a heating resistor and capacitor electrodes. The cold movable body and the heatable movable body are mechanically connected by at least one bridge and the capacitor electrodes measure a force applied on the sample by sensing the deflection of the cold movable body relative to the outer frame by a change of electrical capacitance.

Device and system for characterizing samples using multiple integrated tips scanning probe microscopy. Multiple Integrated Tips (MiT) probes are comprised of two or more monolithically integrated and movable AFM tips positioned to within nm of each other, enabling unprecedented micro to nanoscale probing functionality in vacuum or ambient conditions. The tip structure is combined with capacitive comb structures offering laserless high-resolution electric-in electric-out actuation and sensing capability and novel integration with a Junction Field Effect Transistor for signal amplification and low-noise operation. This platform-on-a-chip approach is a paradigm shift relative to current technology based on single tips functionalized using stacks of supporting gear: lasers, nano-positioners and electronics.

Methods and apparatuses are provided for automatically controlling and stabilizing aspects of a scanning probe microscope (SPM), such as an atomic force microscope (AFM), using Peak Force Tapping (PFT) Mode. In an embodiment, a controller automatically controls periodic motion of a probe relative to a sample in response to a substantially instantaneous force determined and automatically controls a gain in a feedback loop. A gain control circuit automatically tunes a gain based on separation distances between a probe and a sample to facilitate stability. Accordingly, instability onset is quickly and accurately determined during scanning, thereby eliminating the need of expert user tuning of gains during operation.

Methods and apparatuses are provided for automatically controlling and stabilizing aspects of a scanning probe microscope (SPM), such as an atomic force microscope (AFM), using Peak Force Tapping (PFT) Mode. In an embodiment, a controller automatically controls periodic motion of a probe relative to a sample in response to a substantially instantaneous force determined and automatically controls a gain in a feedback loop. A gain control circuit automatically tunes a gain based on separation distances between a probe and a sample to facilitate stability. Accordingly, instability onset is quickly and accurately determined during scanning, thereby eliminating the need of expert user tuning of gains during operation.

A new resonant-cavity-enhanced Atomic Force Microscopy (AFM) active optical probe integrates a semiconductor laser source and an aperture AFM/near-field scanning optical microscopy (NSOM) probe in either external-resonant-cavity or internal-resonant-cavity configuration to enable both conventional AFM measurements and optical imaging and spectroscopy at the nanoscale.

Articles and methods related to scanning probe microscopy probes are generally provided. A scanning probe microscopy probe may comprise a chip, a mechanical resonator attached to the chip, a tip attached to the mechanical resonator, and a handle attached to the chip. The handle may have a length of at least 5 mm and an average thickness of less than or equal to 500 microns. The probe may further comprise an insulating coating covering both the chip and the handle.

Device and system for characterizing samples using multiple integrated tips scanning probe microscopy. Multiple Integrated Tips (MiT) probes are comprised of two or more monolithically integrated and movable AFM tips positioned to within nm of each other, enabling unprecedented micro to nanoscale probing functionality in vacuum or ambient conditions. The tip structure is combined with capacitive comb structures offering laserless high-resolution electric-in electric-out actuation and sensing capability and novel integration with a Junction Field Effect Transistor for signal amplification and low-noise operation. This platform-on-a-chip approach is a paradigm shift relative to current technology based on single tips functionalized using stacks of supporting gear: lasers, nano-positioners and electronics.