The present invention pertains to a surface analysis device (1) and provides a technology that can increase accuracy and quality of measurement and analysis even when a local deviation is generated in height information of a measurement result of a scanning probe microscope (SPM) (2), due to an atmospheric pressure change with respect to an airtight tank (10). The surface analysis device (1) is provided with: an airtight tank (10); a stage (6) that holds a sample (5) in the airtight tank (10); the SPM (2) that is fixed to a structure configuring the airtight tank (1) and that measures the surface of the sample (5); a sensor (4) that is disposed outside of the airtight tank (10) and that measures atmospheric pressure; and a computer system that analyzes the surface of the sample by using a first signal obtained through measurement by the SPM (2) and a second signal obtained through measurement by the sensor (4).

A surface analysis device (1) is provided with a sample stage (30) for placing a sample thereon, a cantilever to be arranged to face the sample stage (30), and a cantilever drive unit for driving the cantilever. The drive mechanism is configured, when taking out the sample stage (30), to shift the sample stage (30) relative to a measurement unit (20) so that the measurement unit (20) and the sample stage (30) separate from each other in a first direction in which the cantilever and the sample stage (30) face each other, and then slidably move the stage (30) in a direction intersecting with the first direction.

A surface analysis device (1) is provided with a sample stage (30) for placing a sample thereon, a cantilever to be arranged to face the sample stage (30), and a cantilever drive unit for driving the cantilever. The drive mechanism is configured, when taking out the sample stage (30), to shift the sample stage (30) relative to a measurement unit (20) so that the measurement unit (20) and the sample stage (30) separate from each other in a first direction in which the cantilever and the sample stage (30) face each other, and then slidably move the stage (30) in a direction intersecting with the first direction.

An apparatus, including: a scanning probe microscope head with a frame configured to fit within an insert of a cryostat, and a scanner, a probe and a sample holder all disposed within the frame; and a coarse motor assembly disposed within the frame and comprising: a positionable component; and coarse motors. The coarse motors are configured to move the positionable component relative to the frame along an X axis, a Y axis, and a Z axis. The apparatus further includes a universal electrical base connection with half of a plug/socket arrangement. The plug/socket arrangement is configured to provide electrical communication between the scanning probe microscope head and a base which has a second half of the plug/socket arrangement when the scanning probe microscope head is lowered onto the base.

An apparatus, including: a scanning probe microscope head with a frame configured to fit within an insert of a cryostat, and a scanner, a probe and a sample holder all disposed within the frame; and a coarse motor assembly disposed within the frame and comprising: a positionable component; and coarse motors. The coarse motors are configured to move the positionable component relative to the frame along an X axis, a Y axis, and a Z axis. The apparatus further includes a universal electrical base connection with half of a plug/socket arrangement. The plug/socket arrangement is configured to provide electrical communication between the scanning probe microscope head and a base which has a second half of the plug/socket arrangement when the scanning probe microscope head is lowered onto the base.

Provided is a conversion mechanism that can be applied to a surface analyzer, etc., the mechanism being capable of smoothly converting a movement direction using a ling mechanism. The moving mechanism is composed of: a link mechanism including a first block, a second block, and a link member pivotally supported by the first block and the second block; a slide mechanism configured to reciprocate the first block in a first direction; and a contact member configured to come into contact with the second block or link member to guide a lifting and lowering movement of the second block in a second direction. The link member is pivotally supported by the first block and the second block so that it can be pivoted about a rotation axis in the third direction perpendicular to the first direction and the second direction. The contact member has a circular cross-section when viewed from the third direction. When the first block moves toward the contact member, the second block or the link member initially comes into contact with the contact member at a first contact point positioned obliquely above a central axis of the circular cross-section.

Provided is a conversion mechanism that can be applied to a surface analyzer, etc., the mechanism being capable of smoothly converting a movement direction using a ling mechanism. The moving mechanism is composed of: a link mechanism including a first block, a second block, and a link member pivotally supported by the first block and the second block; a slide mechanism configured to reciprocate the first block in a first direction; and a contact member configured to come into contact with the second block or link member to guide a lifting and lowering movement of the second block in a second direction. The link member is pivotally supported by the first block and the second block so that it can be pivoted about a rotation axis in the third direction perpendicular to the first direction and the second direction. The contact member has a circular cross-section when viewed from the third direction. When the first block moves toward the contact member, the second block or the link member initially comes into contact with the contact member at a first contact point positioned obliquely above a central axis of the circular cross-section.

A method for optical metrology of a sample, the method may include illuminating areas of the sample by sets of pulses of different wavelengths, during a movement of a variable speed of the sample; collecting light reflected from the sample, as a result of the illuminating, to provide sets of frames, each set of frames comprises partially overlapping frames associated with the different wavelengths; and processing the frames to provide optical metrology results indicative of one or more evaluated parameters of elements of the areas of the sample; wherein the processing is based on a mapping between the sets of frames and reference measurements obtained by an other optical metrology process that exhibits a higher spectral resolution than a spectral resolution obtained by the illuminating and the collecting.

The present disclosure relates to a method for analyzing an electrode for a battery, which has the advantage of being capable of more easily distinguishing between the constituent materials of the electrode such as the electrode active material, the conductive material, and the pores, by using scanning spreading resistance microscopy.

The present disclosure relates to a method for analyzing an electrode for a battery, which has the advantage of being capable of more easily distinguishing between the constituent materials of the electrode such as the electrode active material, the conductive material, and the pores, by using scanning spreading resistance microscopy.