A chip carrier exchanging device receives a used chip carrier from a head of a scanning probe microscope that performs measurement by using the chip carrier configured such that a measurement means is attached to a carrier made of a magnetic material, and the chip carrier exchanging device supplies a new chip carrier to the head. The chip carrier exchanging device includes: a permanent magnet; a magnetism flow connecting unit made of a magnetic material that allow magnetism to flow therethrough, the magnetism flow connecting unit being configured to fix the chip carrier by exerting a magnetic effect on the carrier; and a drive unit configured to operate the permanent magnet to change magnetic force between the carrier and the magnetism flow connecting unit.

This specification discloses a method and implementations improving the field of holding or mounting Scanning Probe Microscopy probe tips for use and alignment. Specifically, the invention allows probes to be mounted replaceably to a very small SPM actuator and aligned in 5 axis permitting alignment of cantilever to beam and reflected beam to detector. The invention allows for great simplification of SPM design while allowing reduction in sizes and masses of tip mounting apparatus thereby improving performance.

This specification discloses a method and implementations improving the field of holding or mounting Scanning Probe Microscopy probe tips for use and alignment. Specifically, the invention allows probes to be mounted replaceably to a very small SPM actuator and aligned in 5 axis permitting alignment of cantilever to beam and reflected beam to detector. The invention allows for great simplification of SPM design while allowing reduction in sizes and masses of tip mounting apparatus thereby improving performance.

A handling apparatus for handling a measuring probe of a scanning probe microscope is disclosed. The measuring probe has a probe body and a probe tip which is coupled with the probe body by a cantilever. The handling apparatus includes a receiving device for receiving the measuring probe at a receiving area, a guide structure, in which the measuring probe is guidable while at the same time the probe body is at least partially limited and the cantilever and the probe tip are supported without contact, and a transport device for transporting the measuring probe from the receiving area along the guide structure to a target area.

A handling apparatus for handling a measuring probe of a scanning probe microscope is disclosed. The measuring probe has a probe body and a probe tip which is coupled with the probe body by a cantilever. The handling apparatus includes a receiving device for receiving the measuring probe at a receiving area, a guide structure, in which the measuring probe is guidable while at the same time the probe body is at least partially limited and the cantilever and the probe tip are supported without contact, and a transport device for transporting the measuring probe from the receiving area along the guide structure to a target area.

A scanning probe microscope includes a position change unit that relatively changes positions of a fixed end of a cantilever and a surface of a sample S in a Z direction, a deflection amount measurement unit that measures a deflection amount of the cantilever, a Z direction movement distance detector that detects a movement distance in the Z direction while the fixed end is relatively moved with respect to the surface of the sample S from a predetermined initial position until a tip of a probe comes into contact with the surface of the sample S and the deflection amount becomes a predetermined value, and an initial position change unit that changes the initial position to a position further away from the surface of the sample S when the movement distance is below a predetermined lower limit.

A scanning probe microscope includes a position change unit that relatively changes positions of a fixed end of a cantilever and a surface of a sample S in a Z direction, a deflection amount measurement unit that measures a deflection amount of the cantilever, a Z direction movement distance detector that detects a movement distance in the Z direction while the fixed end is relatively moved with respect to the surface of the sample S from a predetermined initial position until a tip of a probe comes into contact with the surface of the sample S and the deflection amount becomes a predetermined value, and an initial position change unit that changes the initial position to a position further away from the surface of the sample S when the movement distance is below a predetermined lower limit.

A probe assembly is provided, which is applied to an electrical testing device. The probe assembly includes a probe body, which includes a testing end configured to contact with a to-be-tested device and a connection end opposite to the testing end; an elastic connection structure configured to be deformed when the probe body is subjected to a pressure; and a fixing base. The connection end is fixedly connected to the fixing base via the elastic connection structure. A testing device is further provided.

A probe assembly is provided, which is applied to an electrical testing device. The probe assembly includes a probe body, which includes a testing end configured to contact with a to-be-tested device and a connection end opposite to the testing end; an elastic connection structure configured to be deformed when the probe body is subjected to a pressure; and a fixing base. The connection end is fixedly connected to the fixing base via the elastic connection structure. A testing device is further provided.

A numerically controlled rotary probe switching device based on an environment-controllable atomic force microscope (AFM) includes a cavity upper cover and a probe switching structure. The cavity upper cover is provided with an irregular rectangular boss, an inner groove, a rectangular optical window structure and a sealing flange structure. The irregular rectangular boss is provided with the rectangular optical window structure; a front end of the boss is provided with the sealing flange structure; and a lower portion of the boss is provided with an inner groove for accommodating the probe switching structure and a transition groove for matching with a linear movement of a sample carrier and a rotary switching of probes. The probe switching structure is configured inside the inner groove, and the probe switching structure is provided with at least one probe assembly.