G01Q70/06

SCANNING PROBE MICROSCOPE USING SENSOR MOLECULES TO IMPROVE PHOTO-INDUCED FORCE ON SAMPLES

A scanning probe microscope and method of operating the microscope uses a resonant material between a metallic probe tip and a surface of a sample with at least one material having a dielectric constant . When electromagnetic radiation from a light source is transmitted to an interface between the metallic probe tip and the sample, absorption of the electromagnetic radiation by the resonant sensor material that is dependent on the dielectric constant of the at least one material of the sample is detected.

SCANNING PROBE MICROSCOPE USING SENSOR MOLECULES TO IMPROVE PHOTO-INDUCED FORCE ON SAMPLES

A scanning probe microscope and method of operating the microscope uses a resonant material between a metallic probe tip and a surface of a sample with at least one material having a dielectric constant . When electromagnetic radiation from a light source is transmitted to an interface between the metallic probe tip and the sample, absorption of the electromagnetic radiation by the resonant sensor material that is dependent on the dielectric constant of the at least one material of the sample is detected.

Probe for scanning probe microscope and binary state scanning probe microscope including the same

Provided is a scanning probe microscope, and in particular, a scanning probe microscope capable of scanning a large area using a probe including a plurality of conductive tips and capable of simply generating a surface image of a sample with high resolution by recognizing only two binary states of contact/non-contact between the conductive tips and a surface of the sample.

Probe for scanning probe microscope and binary state scanning probe microscope including the same

Provided is a scanning probe microscope, and in particular, a scanning probe microscope capable of scanning a large area using a probe including a plurality of conductive tips and capable of simply generating a surface image of a sample with high resolution by recognizing only two binary states of contact/non-contact between the conductive tips and a surface of the sample.

Multiple integrated tips scanning probe microscope
10895585 · 2021-01-19 · ·

Device and system for characterizing samples using multiple integrated tips scanning probe microscopy. Multiple Integrated Tips (MiT) probes are comprised of two or more monolithically integrated and movable AFM tips positioned to within nm of each other, enabling unprecedented micro to nanoscale probing functionality in vacuum or ambient conditions. The tip structure is combined with capacitive comb structures offering laserless high-resolution electric-in electric-out actuation and sensing capability and novel integration with a Junction Field Effect Transistor for signal amplification and low-noise operation. This platform-on-a-chip approach is a paradigm shift relative to current technology based on single tips functionalized using stacks of supporting gear: lasers, nano-positioners and electronics.

Multiple integrated tips scanning probe microscope
10895585 · 2021-01-19 · ·

Device and system for characterizing samples using multiple integrated tips scanning probe microscopy. Multiple Integrated Tips (MiT) probes are comprised of two or more monolithically integrated and movable AFM tips positioned to within nm of each other, enabling unprecedented micro to nanoscale probing functionality in vacuum or ambient conditions. The tip structure is combined with capacitive comb structures offering laserless high-resolution electric-in electric-out actuation and sensing capability and novel integration with a Junction Field Effect Transistor for signal amplification and low-noise operation. This platform-on-a-chip approach is a paradigm shift relative to current technology based on single tips functionalized using stacks of supporting gear: lasers, nano-positioners and electronics.

Integrated measurement and micromechanical positioning apparatus for real-time test control
10828785 · 2020-11-10 · ·

The invention relates to a measurement device (120), for example for testing, comprising a micromechanical positioning actuator (130) for causing movement of a sensor (150) with respect to a target (110), a positioning controller (145), the positioning controller (145) having an output coupled to the actuator (130) for controlling the movement, and the having an input coupled to the sensor (150) for receiving a sensor signal from the sensor (150) to the positioning controller (145), and the positioning controller (145) arranged to control the movement based on the sensor signal. The measurement device (120) may have memory for storing positioning control instructions (300). The positioning controller (145) may be arranged to control said movement based on said sensor signal and said positioning control instructions (300).

Apparatus and methods for non-destructive inspection using microwave microscopy

Methods and apparatus for non-destructive inspection using microwave microscopy are disclosed. In one embodiment, a method for inspecting an electrically-conductive mesh in a composite component using microwave microscopy comprises generating radio-frequency electromagnetic radiation using a microwave microscopy probe disposed adjacent the composite component so that the radio-frequency electromagnetic radiation interacts with the electrically-conductive mesh in the composite component, and, detecting a characteristic associated with the microwave microscopy probe. The detected characteristic is indicative of a condition of the electrically-conductive mesh.

Apparatus and methods for non-destructive inspection using microwave microscopy

Methods and apparatus for non-destructive inspection using microwave microscopy are disclosed. In one embodiment, a method for inspecting an electrically-conductive mesh in a composite component using microwave microscopy comprises generating radio-frequency electromagnetic radiation using a microwave microscopy probe disposed adjacent the composite component so that the radio-frequency electromagnetic radiation interacts with the electrically-conductive mesh in the composite component, and, detecting a characteristic associated with the microwave microscopy probe. The detected characteristic is indicative of a condition of the electrically-conductive mesh.

ATOMIC FORCE MICROSCOPY SYSTEM, METHOD FOR MAPPING ONE OR MORE SUBSURFACE STRUCTURES LOCATED IN A SEMICONDUCTOR DEVICE OR FOR MONITORING LITHOGRAPHIC PARAMETERS IN A SEMICONDUCTOR DEVICE AND USE OF SUCH AN ATOMIC FORCE MICROSCOPY SYSTEM

Atomic force microscopy system comprising an atomic force microscopy device and a substrate carrier having a carrier surface carrying a substrate. The substrate has a substrate main surface and a substrate scanning surface opposite the substrate main surface. The atomic force microscopy device comprises a scan head including a probe. The probe comprises a cantilever and a probe tip arranged on the cantilever. The atomic force device further comprises an actuator cooperating with at least one of the scan head or the substrate carrier for moving the probe tip and the substrate carrier relative to each other in one or more directions parallel to the carrier surface for scanning of the substrate scanning surface with the probe tip. A signal application actuator applies, during said scanning, an acoustic input signal to the substrate, said acoustic input signal generating a first displacement field in a first displacement direction only. A tip position detector monitors motion of the probe tip relative to the scan head during said scanning for obtaining an output signal. The tip position detector is arranged for monitoring motion of the probe tip only in a direction orthogonal to the displacement direction.