The present invention relates to methods and devices for extending a time period until changing a measuring tip of a scanning probe microscope. In particular, the invention relates to a method for hardening a measuring tip for a scanning probe microscope, comprising the step of: Processing the measuring tip with a beam of an energy beam source, the energy beam source being part of a scanning electron microscope.

A scanning probe microscope has a probe configured to move across the surface of a sample to be monitored. A scanner, to which the probe is mounted, moves the probe across the sample surface such that the probe is deflected in accordance with the structure of the sample surface. A beam system directs a light beam at the probe during the movement of the probe across the sample surface and a detector monitors the deflection of the probe using the light beam. The arrangement is such that the scanner is physically independent of the beam system.

A scanning probe microscope has a probe configured to move across the surface of a sample to be monitored. A scanner, to which the probe is mounted, moves the probe across the sample surface such that the probe is deflected in accordance with the structure of the sample surface. A beam system directs a light beam at the probe during the movement of the probe across the sample surface and a detector monitors the deflection of the probe using the light beam. The arrangement is such that the scanner is physically independent of the beam system.

A multi-tip nano-probe apparatus and a method for probing a sample while using the multi-tip nano-probe apparatus each employ located over a substrate: (1) an immovable probe tip with respect to the substrate; (2) a movable probe tip with respect to the substrate; and (3) a motion sensor that is coupled with the movable probe tip. The multi-tip nano-probe apparatus and related method provide for improved sample probing due to close coupling of the motion sensor with the movable probe tip, and also retractability of the movable probe tip with respect to the immovable probe tip.

A multi-tip nano-probe apparatus and a method for probing a sample while using the multi-tip nano-probe apparatus each employ located over a substrate: (1) an immovable probe tip with respect to the substrate; (2) a movable probe tip with respect to the substrate; and (3) a motion sensor that is coupled with the movable probe tip. The multi-tip nano-probe apparatus and related method provide for improved sample probing due to close coupling of the motion sensor with the movable probe tip, and also retractability of the movable probe tip with respect to the immovable probe tip.

A microfabricated optical probe includes: a cantilever; an optical waveguide disposed at a periphery of the cantilever and including an optical loop, the optical loop being disposed coplanar with the cantilever; a mechanical support interposed between and interconnecting the cantilever and the optical waveguide with the mechanical support such that the cantilever and optical waveguide move together; and a substrate on which the cantilever is disposed and from which the cantilever and the optical loop protrude, wherein the cantilever and the optical waveguide flex independently of the substrate.

A microfabricated optical probe includes: a cantilever; an optical waveguide disposed at a periphery of the cantilever and including an optical loop, the optical loop being disposed coplanar with the cantilever; a mechanical support interposed between and interconnecting the cantilever and the optical waveguide with the mechanical support such that the cantilever and optical waveguide move together; and a substrate on which the cantilever is disposed and from which the cantilever and the optical loop protrude, wherein the cantilever and the optical waveguide flex independently of the substrate.

The invention is directed at a method of refurbishing a probe for use in a scanning probe microscopy device, wherein the probe is a used or damaged probe and includes a cantilever and a probe tip. The method comprises receiving the probe, determining an existing probe structure of the probe and mapping the existing probe structure for obtaining existing probe structure data. The method further includes identifying, based on the existing probe structure data, a deviation from an original probe structure of the probe prior to said using or damaging thereof. Based on the deviation, structural modification data indicative of a structural modification for modifying the probe will be determined, and, in accordance with the structural modification data, the existing probe structure will be modified by at least one of a precision material deposition process or precision material removal process, for performing said refurbishing of the probe. The method is further directed at a system and a computer program product for operating a system.

The invention is directed at a method of refurbishing a probe for use in a scanning probe microscopy device, wherein the probe is a used or damaged probe and includes a cantilever and a probe tip. The method comprises receiving the probe, determining an existing probe structure of the probe and mapping the existing probe structure for obtaining existing probe structure data. The method further includes identifying, based on the existing probe structure data, a deviation from an original probe structure of the probe prior to said using or damaging thereof. Based on the deviation, structural modification data indicative of a structural modification for modifying the probe will be determined, and, in accordance with the structural modification data, the existing probe structure will be modified by at least one of a precision material deposition process or precision material removal process, for performing said refurbishing of the probe. The method is further directed at a system and a computer program product for operating a system.

The present invention relates to methods and devices for extending a time period until changing a measuring tip of a scanning probe microscope. In particular, the invention relates to a method for hardening a measuring tip for a scanning probe microscope, comprising the step of: Processing the measuring tip with a beam of an energy beam source, the energy beam source being part of a scanning electron microscope.