Patent classifications
G01Q70/16
Measuring device for a scanning probe microscope, scanning probe microscope and method for operating the scanning probe microscope
The invention relates to a measuring device for a scanning probe microscope including a measuring probe a first probe holding device on which the measuring probe is arranged, a detection device including a measurement light source which is adapted to provide light beams directed toward the measuring probe, a sensor device which is adapted, during the operation to receive measurement light beams reflected from the measuring probe. A first measuring arrangement in which the first probe holding device with the measuring probe is arranged in a first position spaced from the detection device, and a second measuring arrangement is formed in which a lengthening device is changeably arranged between the detection device and the measuring probe which lengthens the respective optical beam path for the light beams and the measurement light beams in such a manner that the first probe holding device or a second probe holding device which is different from the first probe holding device is arranged with the measuring probe at a second position spacing from the detection device which is greater than the first position spacing.
METHODS AND DEVICES FOR EXTENDING A TIME PERIOD UNTIL CHANGING A MEASURING TIP OF A SCANNING PROBE MICROSCOPE
The present invention relates to methods and devices for extending a time period until changing a measuring tip of a scanning probe microscope. In particular, the invention relates to a method for hardening a measuring tip for a scanning probe microscope, comprising the step of: Processing the measuring tip with a beam of an energy beam source, the energy beam source being part of a scanning electron microscope.
Methods and devices for extending a time period until changing a measuring tip of a scanning probe microscope
The present invention relates to methods and devices for extending a time period until changing a measuring tip of a scanning probe microscope. In particular, the invention relates to a method for hardening a measuring tip for a scanning probe microscope, comprising the step of: Processing the measuring tip with a beam of an energy beam source, the energy beam source being part of a scanning electron microscope.
Methods and devices for extending a time period until changing a measuring tip of a scanning probe microscope
The present invention relates to methods and devices for extending a time period until changing a measuring tip of a scanning probe microscope. In particular, the invention relates to a method for hardening a measuring tip for a scanning probe microscope, comprising the step of: Processing the measuring tip with a beam of an energy beam source, the energy beam source being part of a scanning electron microscope.
Scanning Probe and Electron Microscope Probes and Their Manufacture
Methods are described for the economical manufacture of Scanning Probe and Electron Microscope (SPEM) probe tips. In this method, multiple wires are mounted on a stage and ion milled simultaneously while the stage and mounted probes are tilted at a selected angle relative to the ion source and rotated. The resulting probes are also described. The method provides sets of highly uniform probe tips having controllable properties for stable and accurate scanning probe and electron microscope (EM) measurements.
Scanning Probe and Electron Microscope Probes and Their Manufacture
Methods are described for the economical manufacture of Scanning Probe and Electron Microscope (SPEM) probe tips. In this method, multiple wires are mounted on a stage and ion milled simultaneously while the stage and mounted probes are tilted at a selected angle relative to the ion source and rotated. The resulting probes are also described. The method provides sets of highly uniform probe tips having controllable properties for stable and accurate scanning probe and electron microscope (EM) measurements.
Method for Producing a Substrate Comprising Multiple Tips for Scanning Probe Microscopy
One embodiment of the present disclosure is related to a method for producing a substrate comprising a plurality of tips suitable to be used in scanning probe microscopy (SPM), wherein as a first step, a substrate is produced or provided comprising a plurality of nano-sized tips, preferably arranged in a regular array and spaced apart by nano-sized interspacings. A mask is applied to this substrate, comprising multiple mask portions, wherein each mask portion covers at least one tip, whereafter the substrate is subjected to an etching process relative to the mask portions. After the removal of the mask portions, the method results in the creation of a substrate comprising multiple pedestals having each at least one nanotip on the upper surface thereof and spaced apart at a distance suitable for performing an SPM measurement of a given type.
Method for Producing a Substrate Comprising Multiple Tips for Scanning Probe Microscopy
One embodiment of the present disclosure is related to a method for producing a substrate comprising a plurality of tips suitable to be used in scanning probe microscopy (SPM), wherein as a first step, a substrate is produced or provided comprising a plurality of nano-sized tips, preferably arranged in a regular array and spaced apart by nano-sized interspacings. A mask is applied to this substrate, comprising multiple mask portions, wherein each mask portion covers at least one tip, whereafter the substrate is subjected to an etching process relative to the mask portions. After the removal of the mask portions, the method results in the creation of a substrate comprising multiple pedestals having each at least one nanotip on the upper surface thereof and spaced apart at a distance suitable for performing an SPM measurement of a given type.
METHODS FOR DESIGNING AND PROCESSING A MICROCANTILEVER-BASED PROBE WITH AN IRREGULAR CROSS SECTION APPLIED IN AN ULTRA-LOW FRICTION COEFFICIENT MEASUREMENT AT A NANOSCALE SINGLE-POINT CONTACT
A method for designing and processing a microcantilever-based probe with an irregular cross section applied in the ultra-low friction coefficient measurement at a nanoscale single-point contact includes: first, establishing a universal theoretical model of the friction coefficient measurement; then, combined with the structural features of the microcantilever-based probe with the irregular cross section, establishing a specific theoretical model of the friction coefficient measurement suitable for the microcantilever-based probe with the irregular cross section; and based on above, combined with constraint conditions such as the friction coefficient resolution, the loadable maximum positive pressure or the measurable minimum friction force, and the atomic force microscope characteristics, etc., designing the microcantilever-based probe with the irregular cross section meeting the measurement requirements.
METHODS FOR DESIGNING AND PROCESSING A MICROCANTILEVER-BASED PROBE WITH AN IRREGULAR CROSS SECTION APPLIED IN AN ULTRA-LOW FRICTION COEFFICIENT MEASUREMENT AT A NANOSCALE SINGLE-POINT CONTACT
A method for designing and processing a microcantilever-based probe with an irregular cross section applied in the ultra-low friction coefficient measurement at a nanoscale single-point contact includes: first, establishing a universal theoretical model of the friction coefficient measurement; then, combined with the structural features of the microcantilever-based probe with the irregular cross section, establishing a specific theoretical model of the friction coefficient measurement suitable for the microcantilever-based probe with the irregular cross section; and based on above, combined with constraint conditions such as the friction coefficient resolution, the loadable maximum positive pressure or the measurable minimum friction force, and the atomic force microscope characteristics, etc., designing the microcantilever-based probe with the irregular cross section meeting the measurement requirements.