Provided is an electrostatic capacitance sensor which can remove an influence of a noise occurring from a static eliminator or a driving source and accurately perform measurement even on electrostatic capacitance detected by a thin-type detection unit which can be passed to a finger surface of a wafer transfer robot. The present invention is provided with an AC supply source which supplies an AC voltage to a detection unit, a parasitic capacitance compensation circuit, an operational amplifier, a differential amplifier, a phase detection means, and a low pass filter. An operational amplification output terminal is connected to an inversion input terminal of the differential amplifier through a first band pass filter, the AC supply source is connected to a non-inversion input terminal of the differential amplifier through a second band pass filter, an output terminal of the differential amplifier is connected to an input terminal of the phase detection means, and the phase detection means takes, as a reference signal, an AC signal output from the AC supply source.

According to one embodiment, a current detecting circuit includes: a normally-ON type first switching element that includes a drain, a source, and a gate; a normally-OFF type second switching element including a drain that is connected to the source of the first switching element, a source that is connected to the gate of the first switching element, and a gate; and a differential amplification circuit that outputs a voltage according to a voltage between the drain and the source of the second switching element.

A self-powered current sensor is described. The self-powered current sensor including an electrical signal input configured to receive a current signal. Further, the self-powered current sensor includes a power circuit configured to generate a power voltage from an electrical signal. The self-powered current sensor also includes a variable resistor configured to set a value corresponding to one or more indicators on the electrical sensor and an amplifier coupled with a variable resistor and a power circuit. And, the self-powered current sensor includes an alarm coupled with an amplifier, an alarm configured to activate based on a value set by said variable resistor.

A detection circuit includes a charge amplifier, a calculation unit, and first and second paths. The charge amplifier converts the amount of electric charge generated by a sensor element into a voltage. The first path and the second path each connect the charge amplifier and the calculation unit. The amplification factor of the first path is higher than the amplification factor of the second path. When a voltage output from the first path is lower than a threshold voltage, the calculation unit detects a pressing force by using the output voltage. When the output voltage is equal to or higher than the threshold voltage, the calculation unit detects a pressing force by using a voltage output through the second path.

Techniques for improving current sensing via a shunt resistance are provided. In an example, an apparatus for sensing current can include a substrate, and a plurality of metal layers stacked on the substrate and separated from the substrate and from each other by an insulation material. In certain examples, a first one or more metal layers can form a sense resistance configured to pass current between a source and a load, and a second one or more metal layers can form one or more gain resistances coupled to the sense resistance and configured to couple to a current sense amplifier. In some example, a metal layer can include portions of both the sense resistance and the gain resistance to compensate for environmental anomalies, material anomalies or manufacturing anomalies.

Techniques for improving current sensing via a shunt resistance are provided. In an example, an apparatus for sensing current can include a substrate, and a plurality of metal layers stacked on the substrate and separated from the substrate and from each other by an insulation material. In certain examples, a first one or more metal layers can form a sense resistance configured to pass current between a source and a load, and a second one or more metal layers can form one or more gain resistances coupled to the sense resistance and configured to couple to a current sense amplifier. In some example, a metal layer can include portions of both the sense resistance and the gain resistance to compensate for environmental anomalies, material anomalies or manufacturing anomalies.

A detection and protection circuit includes: a comparator, six resistors, and two diodes. A first resistor is connected to a second resistor. The second resistor (30) is grounded. A positive input end, a negative input end, a power supply end, a ground end, and an output end of the comparator are connected to a third resistor, a fourth resistor, a power management device power supply pin, the ground, and a main controller. The other end of the third resistor is connected between the first resistor and the second resistor. The other end of the fourth resistor is connected to the first resistor. A first power supply is connected between the fourth resistor and the first resistor. A fifth resistor is connected to a sixth resistor. The sixth resistor (70) is grounded. The other end of the fifth resistor is connected to the main controller.

A detection and protection circuit includes: a comparator, six resistors, and two diodes. A first resistor is connected to a second resistor. The second resistor (30) is grounded. A positive input end, a negative input end, a power supply end, a ground end, and an output end of the comparator are connected to a third resistor, a fourth resistor, a power management device power supply pin, the ground, and a main controller. The other end of the third resistor is connected between the first resistor and the second resistor. The other end of the fourth resistor is connected to the first resistor. A first power supply is connected between the fourth resistor and the first resistor. A fifth resistor is connected to a sixth resistor. The sixth resistor (70) is grounded. The other end of the fifth resistor is connected to the main controller.

According to one embodiment, a current detecting circuit includes: a normally-ON type first switching element that includes a drain, a source, and a gate; a normally-OFF type second switching element including a drain that is connected to the source of the first switching element, a source that is connected to the gate of the first switching element, and a gate; and a differential amplification circuit that outputs a voltage according to a voltage between the drain and the source of the second switching element.

A two-wire reference accelerometer includes integrated mechanical transducing and self-calibration capability based on gravity only. The reference accelerometer includes an external two-wire connector and an internal three-wire transducer that responds to both steady-state acceleration and time-varying accelerations by producing a modulated transducer output signal having a steady-state waveform when the transducer senses steady state acceleration and a time-varying waveform when the transducer senses time-varying accelerations. A signal conditioning circuit conditions the transducer output signal and applies it to the two-wire electrical connector as a modulated reference accelerometer output signal. The transducer and the signal conditioning circuit can operate without modification in either a DUT calibration mode or a self-calibration mode. The self-calibration mode determines the 1 g output sensitivity of the reference accelerometer from first and second readings of the reference accelerometer output signal taken while the reference accelerometer rests on a non-accelerating surface in respective non-inverted and inverted orientations.