A magnetic field sensor comprises a sensor bridge having multiple sensor legs. Each sensor leg includes magnetoresistive sense elements, each comprising a pinned layer having a reference magnetization parallel to a plane of the sensor and a sense layer having a sense magnetization. A permanent magnet layer spaced apart from the sense elements magnetically biases the sense magnetization into an out-of-plane direction that is non-perpendicular to the plane of the sensor. The sense magnetization of a portion of the sense elements is oriented in a first direction and the sense magnetization of a different portion of the sense elements is oriented in a second direction differing from the first direction to generate two unique bias field vectors of the sense layers which enables detection of the external magnetic field in a sensing direction that is perpendicular to the plane of the magnetic field sensor without inter-axis coupling of sensor response.

A magnetic field sensor comprises a sensor bridge having multiple sensor legs. Each sensor leg includes magnetoresistive sense elements, each comprising a pinned layer having a reference magnetization parallel to a plane of the sensor and a sense layer having a sense magnetization that is skewed away from three orthogonal axes. The sense magnetization of a portion of the sense elements is oriented in a first direction and the sense magnetization of a different portion of the sense elements is magnetically biased in a second direction by a permanent magnet layer. The second direction differs from the first direction by an opposing angular magnitude to yield a balanced sensor bridge that produces a zero-offset outcome in the absence of an external magnetic field.

A magnetic field sensor comprises a sensor bridge having multiple sensor legs. Each sensor leg includes magnetoresistive sense elements, each comprising a pinned layer having a reference magnetization parallel to a plane of the sensor and a sense layer having a sense magnetization that is skewed away from three orthogonal axes. The sense magnetization of a portion of the sense elements is oriented in a first direction and the sense magnetization of a different portion of the sense elements is magnetically biased in a second direction by a permanent magnet layer. The second direction differs from the first direction by an opposing angular magnitude to yield a balanced sensor bridge that produces a zero-offset outcome in the absence of an external magnetic field.

A magnetic field sensor comprises a sensor bridge having multiple sensor legs. Each sensor leg includes magnetoresistive sense elements, each comprising a pinned layer having a reference magnetization parallel to a plane of the sensor and a sense layer having a sense magnetization. A permanent magnet layer spaced apart from the sense elements magnetically biases the sense magnetization into an out-of-plane direction that is non-perpendicular to the plane of the sensor. The sense magnetization of a portion of the sense elements is oriented in a first direction and the sense magnetization of a different portion of the sense elements is oriented in a second direction differing from the first direction to generate two unique bias field vectors of the sense layers which enables detection of the external magnetic field in a sensing direction that is perpendicular to the plane of the magnetic field sensor without inter-axis coupling of sensor response.

A magnetic field sensor comprises a sensor bridge having multiple sensor legs. Each sensor leg includes magnetoresistive sense elements, each comprising a pinned layer having a reference magnetization parallel to a plane of the sensor and a sense layer having a sense magnetization. A permanent magnet layer spaced apart from the sense elements magnetically biases the sense magnetization into an out-of-plane direction that is non-perpendicular to the plane of the sensor. The sense magnetization of a portion of the sense elements is oriented in a first direction and the sense magnetization of a different portion of the sense elements is oriented in a second direction differing from the first direction to generate two unique bias field vectors of the sense layers which enables detection of the external magnetic field in a sensing direction that is perpendicular to the plane of the magnetic field sensor without inter-axis coupling of sensor response.

A magnetic field sensor comprises a sensor bridge having multiple sensor legs. Each sensor leg includes magnetoresistive sense elements, each comprising a pinned layer having a reference magnetization parallel to a plane of the sensor and a sense layer having a sense magnetization that is skewed away from three orthogonal axes. The sense magnetization of a portion of the sense elements is oriented in a first direction and the sense magnetization of a different portion of the sense elements is magnetically biased in a second direction by a permanent magnet layer. The second direction differs from the first direction by an opposing angular magnitude to yield a balanced sensor bridge that produces a zero-offset outcome in the absence of an external magnetic field.

A magnetic field sensor comprises a sensor bridge having multiple sensor legs. Each sensor leg includes magnetoresistive sense elements, each comprising a pinned layer having a reference magnetization parallel to a plane of the sensor and a sense layer having a sense magnetization that is skewed away from three orthogonal axes. The sense magnetization of a portion of the sense elements is oriented in a first direction and the sense magnetization of a different portion of the sense elements is magnetically biased in a second direction by a permanent magnet layer. The second direction differs from the first direction by an opposing angular magnitude to yield a balanced sensor bridge that produces a zero-offset outcome in the absence of an external magnetic field.

A magnetic field sensor comprises a sensor bridge having multiple sensor legs. Each sensor leg includes magnetoresistive sense elements located in a plane of the magnetic field sensor. Each sense element comprises a pinned layer and a sense layer. The pinned layer has a reference magnetization oriented parallel to the plane and the sense layer has a sense magnetization oriented out-of-plane. A permanent magnet layer may be spaced apart from the sense elements which magnetically biases the sense magnetization of the sense layer into an out-of-plane direction that is non-perpendicular to the plane of the sensor. The sense magnetization is orientable from the out-of-plane direction toward the plane of the sensor in response to an external magnetic field. The permanent magnet layer enables detection of the external magnetic field in a sensing direction that is also perpendicular to the plane of the magnetic field sensor.

A magnetic field sensor comprises a sensor bridge having multiple sensor legs. Each sensor leg includes magnetoresistive sense elements located in a plane of the magnetic field sensor. Each sense element comprises a pinned layer and a sense layer. The pinned layer has a reference magnetization oriented parallel to the plane and the sense layer has a sense magnetization oriented out-of-plane. A permanent magnet layer may be spaced apart from the sense elements which magnetically biases the sense magnetization of the sense layer into an out-of-plane direction that is non-perpendicular to the plane of the sensor. The sense magnetization is orientable from the out-of-plane direction toward the plane of the sensor in response to an external magnetic field. The permanent magnet layer enables detection of the external magnetic field in a sensing direction that is also perpendicular to the plane of the magnetic field sensor.

A magnetic field sensor apparatus for determining two or three components of a magnetic field includes at least one Wheatstone bridge with two half-bridges, wherein each half-bridge includes at least two bridge resistors, and at least one of the two bridge resistors is a magnetic-field-sensitive resistor with respect to a magnetic field component in an X/Y magnetic field sensor plane. Arranged symmetrically between the two magnetic-field-sensitive bridge resistors is a ferromagnetic flux concentration element which generates magnetic field components which are anti-symmetric with respect to a Z magnetic field component oriented perpendicular to the X/Y magnetic field sensor plane and are in the X/Y magnetic field sensor plane. A coordinate aspect proposes a method for determining a two-dimensional or three-dimensional orientation of an external magnetic field by such a magnetic field sensor apparatus.