A measurement circuit is arranged to make several measurements, either at different times or in respect of different frequency components of currents measured by current sensors in respective phases of a multiphase supply system. The measurements are then used to correct for discrepancies in the transfer function of the sensors.

Techniques are described for power detection of an amplified signal. For example, power detection described herein can receive an amplified signal from a power amplifier, and can generate an output signal that can be fed back to help regulate an output level of the power amplifier. Embodiments receive the amplified signal can be received by a transistor. A first measurement can be obtained at the transistor's emitter corresponding to an average bias level of the amplified signal, and a second measurement can be obtained at the transistor's base. The output signal can be generated as a function of a difference between the two measurements. Some embodiments further compensate for a measured effective diode voltage corresponding to a base-emitter voltage. Such an approach can generate the power detector output signal to be independent of the of the transistor, and therefore less affected by variations in process corners and temperature.

A temperature controller for a substrate support in a substrate processing system includes a power parameter module configured to calculate a power parameter indicative of power supplied to the substrate support. A coolant temperature parameter module configured to calculate a coolant temperature parameter indicative of a temperature of a coolant supplied to the substrate support. A heat transfer gas parameter module is configured to calculate a heat transfer gas parameter indicative of flow rates of a heat transfer gas supplied to the substrate support. A temperature calculation module is configured to calculate a temperature of the substrate support using the power parameter, the coolant temperature parameter, and the heat transfer gas parameter.

A temperature controller for a substrate support in a substrate processing system includes a power parameter module configured to calculate a power parameter indicative of power supplied to the substrate support. A coolant temperature parameter module configured to calculate a coolant temperature parameter indicative of a temperature of a coolant supplied to the substrate support. A heat transfer gas parameter module is configured to calculate a heat transfer gas parameter indicative of flow rates of a heat transfer gas supplied to the substrate support. A temperature calculation module is configured to calculate a temperature of the substrate support using the power parameter, the coolant temperature parameter, and the heat transfer gas parameter.

A system for energy metering with temperature monitoring that includes a plurality of current sensors, suitable to sense a changing current in a respective power cable, that provide a respective first output. The energy metering system includes a support and current sensors interconnected to the support at spaced apart locations along the support. A temperature sensor that provides a second output and is interconnected to the support. The energy metering system receives the respective first output and the second output and determines characteristics of the energy system based upon the second output.

A system for energy metering with temperature monitoring that includes a plurality of current sensors, suitable to sense a changing current in a respective power cable, that provide a respective first output. The energy metering system includes a support and current sensors interconnected to the support at spaced apart locations along the support. A temperature sensor that provides a second output and is interconnected to the support. The energy metering system receives the respective first output and the second output and determines characteristics of the energy system based upon the second output.

A measuring system for performing over the air power measurements is provided. The measuring system comprises, within a single housing, a detector module, comprising a detector input, a transmitter module, comprising a transmitter output, and an antenna. The detector input and the transmitter output are at least temporarily connected. At least the transmitter output or the detector input are at least temporarily connected to the antenna.

A measuring system for performing over the air power measurements is provided. The measuring system comprises, within a single housing, a detector module, comprising a detector input, a transmitter module, comprising a transmitter output, and an antenna. The detector input and the transmitter output are at least temporarily connected. At least the transmitter output or the detector input are at least temporarily connected to the antenna.

A system for energy metering with temperature monitoring.

A remote radio frequency (RF) power sensing unit including a first module and a second module. The first module may be configured to generate a digital output representative of a power level of a radio frequency (RF) signal. The second module may be configured to convert the digital output of the first module to a digital signal communicating the power level and transmit the digital signal communicating the power level over a wireless communication channel using a wireless protocol.