The present disclosure provides for an electronic sensor for detecting a root of a plant in soil, the electronic sensor that includes a first conductor plate configured to be disposed in soil, a switch, a power supply, and a signal extractor. The switch is electrically coupled to the first conductor plate and is configured to switch between a first mode and a second mode. The power supply is electrically coupled to the switch and is configured to provide an electrical charge to the first conductor plate in the first mode of the switch. The signal extractor is electrically coupled to the switch and is configured to extract a signal response at the first conductor plate in the second mode of the switch. The present disclosure further provides a second conductor plate configured to be disposed in soil adjacent to and substantially parallel to the first conductor plate. The second conductor plate is electrically coupled to ground.

The present disclosure provides for an electronic sensor for detecting a root of a plant in soil, the electronic sensor that includes a first conductor plate configured to be disposed in soil, a switch, a power supply, and a signal extractor. The switch is electrically coupled to the first conductor plate and is configured to switch between a first mode and a second mode. The power supply is electrically coupled to the switch and is configured to provide an electrical charge to the first conductor plate in the first mode of the switch. The signal extractor is electrically coupled to the switch and is configured to extract a signal response at the first conductor plate in the second mode of the switch. The present disclosure further provides a second conductor plate configured to be disposed in soil adjacent to and substantially parallel to the first conductor plate. The second conductor plate is electrically coupled to ground.

An impedance measurement jig may include a first contact plate, a second contact plate, a cover plate, a plug, and an analyzer. The first contact plate may make electrical contact with an ESC in a substrate-processing apparatus. The second contact plate may make electrical contact with a focus ring configured to surround the ESC. The cover plate may be configured to cover an upper surface of the substrate-processing apparatus. The plug may be installed at the cover plate to selectively make contact with the first contact plate or the second contact plate. The analyzer may individually apply a power to the first contact plate and the second contact plate through the plug to measure an impedance of the ESC and an impedance of the focus ring. Thus, the impedances of the ESC and the focus ring may be individually measured to inspect the ESC and/or the focus ring.

An LCR meter to increase accuracy of balancing uses sub-balancing method, additional to analog balancing by trans-impedance amplifier (TIA). For this, the LCR meter, based on TIA, to correct analog auto-balancing, applies the inverted voltage equal to unbalanced voltage to noninverting input of the TIA. And only one measurement of voltages is needed for.

The method for measuring of quick changes of low surface conductivity of dielectrics under electromagnetic interference of line voltage is based on a comparison measurement on a voltage divider and synchronisation of measuring pulses with periodic sinusoidal course of interference when voltage with pre-set parameters of square pulse is brought to the tested dielectric surface and potential is sampled in the voltage divider consisting of the measured dielectric surface and a resistor with preselected resistivity in certain time intervals both before application of the measuring pulse and immediately before its end, and then based on a difference between the values measured using a differential amplifier, the value corresponding to that measured without effect of electromagnetic interference 60 Hz is derived and the result is the possibility to measure quick changes of low surface conductivity of dielectric surface.

The equipment for measurement of quick changes of low surface conductivity of dielectrics under electromagnetic interference of line voltage contains the sensing element (1) monitoring electromagnetic interference and the block (2) monitoring electromagnetic interference that is connected to the sensing element, and the comparative block (3) for control of generation of time sequences is connected to the first output from the block (2) and the block (4) for generation of pulses is also connected to the first output from the block (2), and the output of the block (4) are square pulses 1 ms/±5 V, and the first output 10 μs/±5 V and the second output 10 μs/±5 V are connected to inputs of the block (6) of logic elements, and another output of the block (2) monitoring electromagnetic interference is connected to the comparative element (5), the output of which is connected to the fourth input of the block (6) of logic elements, and the first output of the bloc (6) of logic elements is connected through the block (7) for modulation of pulses to the with the output as pulse 0 to 300 mV to the tested surface in the block (8) of the voltage divider surface/divider-resistor where output from this block (8) of the voltage divider surface/resistor-divider is connected through the block (11) of the voltage follower to the divider with very high input impedance to signal inputs of the first sample-and-hold amplifier (9) and of the second sample-and-hold amplifier (10), and the second input for control of sampling of the first sample-and-hold amplifier (9) and the second input for control of sampling of the second sample

The method for measuring of quick changes of low surface conductivity of dielectrics under electromagnetic interference of line voltage is based on a comparison measurement on a voltage divider and synchronisation of measuring pulses with periodic sinusoidal course of interference when voltage with pre-set parameters of square pulse is brought to the tested dielectric surface and potential is sampled in the voltage divider consisting of the measured dielectric surface and a resistor with preselected resistivity in certain time intervals both before application of the measuring pulse and immediately before its end, and then based on a difference between the values measured using a differential amplifier, the value corresponding to that measured without effect of electromagnetic interference 60 Hz is derived and the result is the possibility to measure quick changes of low surface conductivity of dielectric surface.

The equipment for measurement of quick changes of low surface conductivity of dielectrics under electromagnetic interference of line voltage contains the sensing element (1) monitoring electromagnetic interference and the block (2) monitoring electromagnetic interference that is connected to the sensing element, and the comparative block (3) for control of generation of time sequences is connected to the first output from the block (2) and the block (4) for generation of pulses is also connected to the first output from the block (2), and the output of the block (4) are square pulses 1 ms/±5 V, and the first output 10 μs/±5 V and the second output 10 μs/±5 V are connected to inputs of the block (6) of logic elements, and another output of the block (2) monitoring electromagnetic interference is connected to the comparative element (5), the output of which is connected to the fourth input of the block (6) of logic elements, and the first output of the bloc (6) of logic elements is connected through the block (7) for modulation of pulses to the with the output as pulse 0 to 300 mV to the tested surface in the block (8) of the voltage divider surface/divider-resistor where output from this block (8) of the voltage divider surface/resistor-divider is connected through the block (11) of the voltage follower to the divider with very high input impedance to signal inputs of the first sample-and-hold amplifier (9) and of the second sample-and-hold amplifier (10), and the second input for control of sampling of the first sample-and-hold amplifier (9) and the second input for control of sampling of the second sample

The present disclosure relates to a method and a corresponding circuit for the fault detection of an electrical circuit, wherein the electrical circuit includes a first inductive interface, at least a first branch, and a second branch, wherein the first and the second branches are connected in parallel, wherein the first branch includes two parallel and counter-currently-connected diodes, and wherein the first and second branches are connected to the first inductive interface. The method includes applying an alternating voltage or an alternating current across the first inductive interface via a second inductive interface, wherein the applied voltage or current is low enough that essentially no current flows through either the first or the second diode; measuring the impedance across the first inductive interface via the second inductive interface; and determining whether a fault is present in the second branch.

A method of extracting complex impedance from selected volumes of the material under test (MUT) combined with various embodiments of electrode sensor arrays. Configurations of linear and planar electrode arrays provide measured data of complex impedance of selected volumes, or voxels, of the MUT, which then can be used to extract the impedance of selected sub-volumes or sub-voxels of the MUT through application of circuit theory. The complex impedance characteristics of the sub-voxels may be used to identify variations in the properties of the various sub-voxels of the MUT, or be correlated to physical properties of the MUT using electromagnetic impedance tomography and/or spectroscopy.

A method of extracting complex impedance from selected volumes of the material under test (MUT) combined with various embodiments of electrode sensor arrays. Configurations of linear and planar electrode arrays provide measured data of complex impedance of selected volumes, or voxels, of the MUT, which then can be used to extract the impedance of selected sub-volumes or sub-voxels of the MUT through application of circuit theory. The complex impedance characteristics of the sub-voxels may be used to identify variations in the properties of the various sub-voxels of the MUT, or be correlated to physical properties of the MUT using electromagnetic impedance tomography and/or spectroscopy.

An impedance sensing circuit includes first and second current sources and first and second bias current sources that are appropriately coupled to first and second resistors. The impedance sensing circuit also includes a comparator that compares a first voltage based on the first terminal of the first resistor to a second voltage based on the first terminal of the second resistor to generate a comparator output signal. Either the comparator output signal or a digital signal based on the comparator output signal operates to regulate the current signals output from the first and second current sources so that the first voltage is same as the second voltage. The comparator output signal and the digital signal is representative of a difference between the first voltage and the second voltage that is based on an impedance difference between the first resistor and the second resistor.