Systems, devices, computer-implemented methods, and/or computer program products that facilitate low power, wideband multitone generation. In one example, a multitone generator device can comprise a controller operatively coupled to first and second digital-to-analog converters (DACs). The controller can apply different delays of a sampling signal to the first and second DACs to facilitate sideband suppression of signals output by the first and second DACs. One aspect of such a multitone generator device is that the multitone generator device can facilitate low power, wideband multitone generation.

An apparatus includes a near-field probe having loops or coils of electrically-conductive material, where the near-field probe is configured to generate a magnetic field. The apparatus also includes a power amplifier configured to drive the near-field probe. The apparatus further includes a shunt capacitance coupled in parallel across the loops or coils of the near-field probe. The shunt capacitance and an inductance of the loops or coils of the near-field probe form part of a resistive-inductive-capacitive (RLC) network. The RLC network is configured to transform a smaller resistance of the near-field probe into a larger resistance. In some cases, the apparatus may include multiple near-field probes coupled in series, and the power amplifier may be configured to drive the multiple near-field probes. For each near-field probe, the apparatus may include a shunt capacitance coupled in parallel across the loops or coils of the near-field probe.

Methods and systems for multi-level RF pulse monitoring and RF pulsing parameter optimization at a manufacturing system are provided. A radio frequency (RF) signal is pulsed within a processing chamber in accordance with a set of RF pulsing parameters. Sensor data is received from one or more sensors that indicates a multi-level RF pulse waveform detected within the processing chamber based on the RF signal pulsing. One or more peaks are identified in the detected multi-level RF pulse waveform. Each identified peak corresponds to at least one RF signal pulse of the RF signal pulsing within the processing chamber. A determination is made, based on the identified one or more peaks, whether the detected multi-level RF pulse waveform corresponds to the target multi-level RF pulse waveform. An indication of whether the detected multi-level RF pulse waveform corresponds to the target multi-level RF pulse waveform is provided to a client device.

A vector network analyzer configured to analyze a high-frequency signal received is described. The vector network analyzer includes three or more reflectometers, each reflectometer operating at a respective frequency range and having a first terminal and a second terminal. The reflectometers are connected with each other in series such that a combined frequency range of the vector network analyzer is established. A first reflectometer is connected to one of a load or a signal source via its first terminal. A last reflectometer is connected to a test port via its second terminal. At least two reflectometers are interconnected with each other by an interposed frequency selective absorptive filter.

A vector network analyzer configured to analyze a high-frequency signal received is described. The vector network analyzer includes three or more reflectometers, each reflectometer operating at a respective frequency range and having a first terminal and a second terminal. The reflectometers are connected with each other in series such that a combined frequency range of the vector network analyzer is established. A first reflectometer is connected to one of a load or a signal source via its first terminal. A last reflectometer is connected to a test port via its second terminal. At least two reflectometers are interconnected with each other by an interposed frequency selective absorptive filter.

A signal gain determination circuit including a digital comparator, a digital controller and an arithmetic module, and a signal gain determination method are provided. A sensing integration circuit generates a first count during a first integration time according to a first sensing signal. The digital comparator compares the first count and a predetermined count to generate a comparison result. The digital controller generates a control signal for indicating a signal gain to a signal amplifier of the sensing integration circuit according to the comparison result. The signal amplifier adjusts the first sensing signal according to the signal gain to generate a second sensing signal, so that the sensing integration circuit generates a second count corresponding to the second sensing signal during a second integration time. The arithmetic module generates an output count corresponding to the first sensing signal according to the second count and the signal gain.

A signal gain determination circuit including a digital comparator, a digital controller and an arithmetic module, and a signal gain determination method are provided. A sensing integration circuit generates a first count during a first integration time according to a first sensing signal. The digital comparator compares the first count and a predetermined count to generate a comparison result. The digital controller generates a control signal for indicating a signal gain to a signal amplifier of the sensing integration circuit according to the comparison result. The signal amplifier adjusts the first sensing signal according to the signal gain to generate a second sensing signal, so that the sensing integration circuit generates a second count corresponding to the second sensing signal during a second integration time. The arithmetic module generates an output count corresponding to the first sensing signal according to the second count and the signal gain.

Devices and methods to perform AC impedance measurement of a device which use an excitation signal including a root mean squared current or a root mean squared voltage in a sequence of one or more frequency groups, wherein each of said frequency groups includes a summation of one or more frequencies within a frequency spread.

The present disclosure relates to a measurement system for a parallel measurement with multiple tones, comprising: an RF signal source being configured to generate a continuous wave, CW, signal having at least two CW tones, the RF signal source being configured to feed said CW signal to an output port of the system which is arranged for being connected to a device-under-test, DUT; an input port being arranged to receive a response signal from the DUT, the response signal having at least two tones which are based on the at least two CW tones; a conversion unit being configured to convert the response signal to an intermediate frequency, IF, signal by means of analog mixing, thereby converting the at least two tones of the response signal to at least two IF tones; an analog-to-digital converter being configured to convert the IF signal to a digital signal; a parallel processing unit being configured to isolate the at least two IF tones of the IF signal using a digital down conversion, DDC, technique; the parallel processing unit being further configured to perform a measurement on the at least two CW tones and the at least two IF tones to determine at least one scattering parameter of the DUT.

A system may include an array of sensor elements, the array of sensor elements each comprising a first type of passive reactive element, a second type of passive reactive element electrically coupled to the array of sensor elements, a driver configured to drive the array of sensor elements and the second type of passive reactive element, and control circuitry configured to control enabling and disabling of individual sensor elements of the array of sensor elements to ensure no more than one of the array of sensor elements is enabled at a time such that when one of the array of sensor elements is enabled, the one of the array of sensor elements and the second type of passive reactive element together operate as a resonant sensor.