A sensor system includes a sensor having a charge storage device controllably connected to a voltage source under control of a signal under test; and a readout circuit coupled to the charge storage device to determine whether the pulse width of the signal under test has changed greater than a threshold amount according to a voltage at the charge storage device. In some cases, the determination of whether the pulse width of the signal under test has changed includes determining whether the voltage satisfies a condition with respect to a comparison voltage. In some cases, the determination of whether the pulse width of the signal under test has changed is based on a propagation delay through a delay chain, where the propagation delay is dependent on the voltage.

A signal processing apparatus includes a processor, a memory storing a program, and an integration circuit that performs filter processing on an input signal to output a processed signal. The processor samples an output signal output from the integration circuit in a sampling period Ts and stores a sampled value of the output signal in accordance with the program, and detects a duty of the input signal based on a difference between a value of the output signal at a time t.sub.0 representing a present time point and a sampled value of the output signal obtained at a time t.sub.0−n representing an earlier time than the time t.sub.0 by an n sampling period when n is a positive integer, the value of the output signal, a value of the integer n, the sampling period Ts, and a time constant of a filter of the integration circuit.

Disclosed are an apparatus for monitoring pulsed high-frequency power and a substrate processing apparatus including the same. The apparatus includes an attenuation module configured to attenuate a pulsed high-frequency power signal; a rectifier module configured to convert the pulsed high-frequency power signal into a direct current signal; and a detection module configured to detect a pulse parameter based on the direct current signal.

Disclosed are an apparatus for monitoring pulsed high-frequency power and a substrate processing apparatus including the same. The apparatus includes an attenuation module configured to attenuate a pulsed high-frequency power signal; a rectifier module configured to convert the pulsed high-frequency power signal into a direct current signal; and a detection module configured to detect a pulse parameter based on the direct current signal.

Disclosed are circuit and method for width measurement of digital pulse signals. The circuit comprises: a sample clock, used to drive all registers in the circuit; an edge detection and interrupt control unit, used to detect a rising edge and a falling edge of a pulse signal on an input pin Input to control signal collection; an integer encoding unit comprising a counter and registers and used to measure an integer part of the width of a high or low level on the input pin Input with one period 1/f of the sample clock as a reference unit; a signal capture chain, used to sample an output level of each delay cell DLL; a decimal encoding unit, used to find out and record the propagation position of the pulse edge on the signal capture chain; and a calibration control unit, used to perform calibration.

Various implementations described herein are directed to a device having alarm circuitry that receives a clock signal and provides alarm chain signals based on the clock signal. The device may include delay chain circuitry that receives the alarm chain signals from the alarm circuitry and provides delay chain signals. The device may include output circuitry that receives the delay chain signals from the delay chain circuitry and provides an alarm control signal based on the delay chain signals.

In one embodiment, a system including a duty-cycle-monitoring circuit is configured to receive a monitored signal having cycles that have a high portion and a low portion. The duty-cycle-monitoring circuit includes: a cascade of buffers including a first buffer, wherein the first buffer is configured to receive a first signal based on the monitored signal, a plurality of corresponding flip-flops. Each flip-flop is triggered by a second signal based on the monitored signal. The data input of each flip-flop is connected to an output of a corresponding buffer. The duty-cycle-monitoring circuit further includes a control circuit configured to determine, based on a state of the plurality of flip-flops, a measure of the duration of the high portion of a cycle of the monitored signal and determine, based on a state of the plurality of flip-flops, a measure of duration of the low portion of a cycle of the monitored signal.

A current measurement circuit for determining a start time t.sub.START, an end time t.sub.END, and/or a peak time t.sub.MAX for a current pulse passing through a current conductor. The current measurement circuit includes a pickup coil and a threshold crossing detector. The pickup coil generates a voltage V.sub.SENSE proportional to a magnetic field around the conductor, which is proportional to a change in current over time. The threshold crossing detector compares V.sub.SENSE and a threshold voltage and generates an output signal indicative of a transition time and whether a slope of V.sub.SENSE is positive or negative. The current measurement circuit can also include an integrator and a sample and hold circuit. The integrator integrates V.sub.SENSE over time and generates an integrated signal V.sub.SENSE. The sample and hold circuit compares V.sub.SENSE to t.sub.MAX and generates a second output signal which can be used to measure the pulse current.

A physical quantity measurement apparatus includes a first resonator, a second oscillator, and an integrated circuit device. The integrated circuit device includes a first oscillation circuit that causes the first resonator to oscillate, and thus generate a first clock signal having a first clock frequency, a second oscillation circuit that causes the second oscillator to oscillate, and thus generate a second clock signal having a second clock frequency which is different from the first clock frequency, and a measurement unit that is provided with a time-to-digital conversion circuit which converts time into a digital value by using the first clock signal and the second clock signal.

A physical quantity measurement apparatus includes a first resonator, a second oscillator, and an integrated circuit device. The integrated circuit device includes a first oscillation circuit that causes the first resonator to oscillate, and thus generate a first clock signal having a first clock frequency, a second oscillation circuit that causes the second oscillator to oscillate, and thus generate a second clock signal having a second clock frequency which is different from the first clock frequency, and a measurement unit that is provided with a time-to-digital conversion circuit which converts time into a digital value by using the first clock signal and the second clock signal.