Aspects of the present disclosure provide a gimbal assembly test system including: a protective cover affixed to a test surface of a wafer probe card mounted within a gimbal bearing, wherein the protective cover includes an exterior surface oriented outward from the test surface of the wafer probe card; and a recess extending into the exterior surface of the protective cover and shaped to matingly engage a load cell tip therein.

A method and apparatus for nondestructive testing of a gas discharge tube (GDT) comprising: electrically connecting a first terminal of the GDT to a first port of a vector network analyzer (VNA); electrically connecting a second terminal of the GDT to a second port of the VNA; measuring S parameters with the VNA; determining GDT capacitance and insertion loss based on the measured S parameters; comparing the determined capacitance and insertion loss of the GDT with a threshold value to determine if the GDT is functional.

Aspects of the present disclosure provide a gimbal assembly test system including: a protective cover affixed to a test surface of a wafer probe card mounted within a gimbal bearing, wherein the protective cover includes an exterior surface oriented outward from the test surface of the wafer probe card; and a recess extending into the exterior surface of the protective cover and shaped to matingly engage a load cell tip therein.

Aspects of the present disclosure provide a gimbal assembly test system including: a protective cover affixed to a test surface of a wafer probe card mounted within a gimbal bearing, wherein the protective cover includes an exterior surface oriented outward from the test surface of the wafer probe card; and a recess extending into the exterior surface of the protective cover and shaped to matingly engage a load cell tip therein.

Embodiments of the present invention provide an improved two-cable connection system for connecting electrical test instrumentation to a device under test (DUT). In one embodiment, a single pair of equal-length triaxial cables each has a desired characteristic impedance. Each cable has a center connecter, intermediate conductor, and outer conductor. The proximal end of each cable is connected to the test instrumentation, and the distal ends are located at the DUT. At the distal end, the center conductors are connected to the DUT, the intermediate conductors are allowed to float, and the outer conductors are connected to each other. The proximal end of each cable is connected to the device using an appropriate connection for the test that will be performed. This allows the test instrumentation to perform different types of tests without changing connections to the DUT.

Embodiments of the present invention provide an improved two-cable connection system for connecting electrical test instrumentation to a device under test (DUT). In one embodiment, a single pair of equal-length triaxial cables each has a desired characteristic impedance. Each cable has a center connecter, intermediate conductor, and outer conductor. The proximal end of each cable is connected to the test instrumentation, and the distal ends are located at the DUT. At the distal end, the center conductors are connected to the DUT, the intermediate conductors are allowed to float, and the outer conductors are connected to each other. The proximal end of each cable is connected to the device using an appropriate connection for the test that will be performed. This allows the test instrumentation to perform different types of tests without changing connections to the DUT.

A method and system of remotely monitoring an operational status of electronic discharge devices in an air purification system senses emitted radiation at a location proximate the air purification system, alone or in combination with a determination of an amount of time remaining in an operational lifetime of the electronic discharge device, or an amount of power delivered to at least one of the electronic discharge devices. A determination of the operational status of at least one of the electronic discharge devices is made based on at least emitted radiation, and the status information is transmitted to a remote monitoring unit that receives the status information and displays an indicator of operational status. In one embodiment, the operational status of a UV-C germicidal lamp may be monitored using optically sensitive devices located within a purification system.

A method and system of remotely monitoring an operational status of electronic discharge devices in an air purification system senses emitted radiation at a location proximate the air purification system, alone or in combination with a determination of an amount of time remaining in an operational lifetime of the electronic discharge device, or an amount of power delivered to at least one of the electronic discharge devices. A determination of the operational status of at least one of the electronic discharge devices is made based on at least emitted radiation, and the status information is transmitted to a remote monitoring unit that receives the status information and displays an indicator of operational status. In one embodiment, the operational status of a UV-C germicidal lamp may be monitored using optically sensitive devices located within a purification system.

Evaluating the performance of an X-ray tube by: recording arcing events that occurred during the use of the X-ray tube; classifying the arcing events by severity; generating, on the basis of the classified arcing events, a first growth pattern for occurrences of arcing events; and determining a level of bubbles in the X-ray tube by finding, on the basis of the first growth pattern, a matching second growth pattern associated with a known level of bubbles in the X-ray tube. An X-ray tube may be checked and replaced in a timely manner, without the need for an on-site inspection, by remotely predicting trends or patterns for growth of levels of bubbles in the X-ray tube.

A method and apparatus for detecting substrate arcing and breakage within a processing chamber is provided. A controller monitors chamber data, e.g., parameters such as RF signals, voltages, and other electrical parameters, during operation of the processing chamber, and analyzes the chamber data for abnormal spikes and trends. Using such data mining and analysis, the controller can detect broken substrates without relying on glass presence sensors on robots, but rather based on the chamber data.