A method of patterning lithographic substrates that includes using a free electron laser to generate EUV radiation and delivering the EUV radiation to a lithographic apparatus which projects the EUV radiation onto lithographic substrates. The method further includes reducing fluctuations in the power of EUV radiation delivered to the lithographic substrates by using a feedback-based control loop to monitor the free electron laser and adjust operation of the free electron laser accordingly, and applying variable attenuation to EUV radiation that has been output by the free electron laser in order to further control the power of EUV radiation delivered to the lithographic apparatus.

Methods for imaging a sample using fluorescence microscopy, systems for imaging a sample using fluorescence microscopy, and illumination systems for fluorescence microscopes. In some examples, a method includes positioning a dual convex paraboloidal mirror enclosure around the sample. The dual convex paraboloidal mirror enclosure includes an upper paraboloidal mirror and a lower paraboloidal mirror oriented antiparallel to each other. An aperture is defined in the lower paraboloidal mirror, a hemispherical dome is mounted in the aperture, and the sample is surrounded by the hemispherical dome. The method includes directing excitation light onto the sample to form a primary image at an upper vertex of the upper paraboloidal mirror and a secondary image at a lower vertex of the lower paraboloidal minor. The method includes imaging the sample through a detection objective of a microscope.

In one aspect, a device includes a frame, at least one lens coupled to the frame, at least one membrane at least partially covering at least one face of the lens, a reservoir in fluid communication with the membrane and containing fluid, and a fluid control assembly which controls fluid communication of the fluid between the reservoir and the membrane.

The disclosed liquid lens array may include a plurality of independently operable array sections, each of which may include (1) a transparent base layer, (2) an aperture plate overlapping the transparent base layer, the aperture plate defining a plurality of apertures extending through the aperture plate between an inner surface of the aperture plate facing the transparent base layer and an outer surface of the aperture plate, and (3) a liquid reservoir disposed between the base layer and the aperture plate. The liquid lens array may also include driving circuit for operating at least one array section of the plurality of array sections to change liquid volumes extending from the liquid reservoir at least partially through the apertures defined in the aperture plate of the at least one array section. Various other methods, systems, and devices are also disclosed.

Provided is a micro-lens capable of changing a focal length. The micro-lens includes a plurality of electrodes, and an electrowetting liquid layer that is separable from the electrodes and that has a focal length that is controlled by a voltage applied to the electrodes.

An optical lens includes a first transparent portion and a first flange portion arranged around the first transparent portion. The first transparent portion and the first flange portion are symmetrical about an optical axis of the optical lens. The first flange portion includes a connecting portion and a peripheral portion. The connecting portion is coupled between the first transparent portion and the peripheral portion. An object side of the first transparent portion includes a first transparent surface. The connecting portion includes a connecting surface coupled to the first transparent surface. The connecting surface is a textured surface.

An optical lens includes a first transparent portion and a first flange portion arranged around the first transparent portion. The first transparent portion and the first flange portion are symmetrical about an optical axis of the optical lens. The first flange portion includes a connecting portion and a peripheral portion. The connecting portion is coupled between the first transparent portion and the peripheral portion. An object side of the first transparent portion includes a first transparent surface. The connecting portion includes a connecting surface coupled to the first transparent surface. The connecting surface is a textured surface.

Disclosed herein is a shape-variable optical element including: a shape-variable lens; a first electrode unit configured to be connected to the shape-variable lens; a second electrode unit configured to face the first electrode unit; and a deformation part configured to be disposed between the first electrode unit and the second electrode unit.

An optoelectronic apparatus (10) having a light transmitter (22) and/or a light receiver (16) and an optics (24, 14) arranged in front of the light transmitter (22) and/or the light receiver (16) is provided that has an adaptive lens (26) with variable tilt. In this respect an alignment unit (18) is provided which is configured to tilt the adaptive lens (26) in such a way that manufacturing tolerances and/or assembly tolerances are compensated.

A focus module contains a boundary element and a focus element. The focus element includes a fluid and a deformable membrane, with the fluid being entrapped between the boundary element and the deformable membrane. The focus module also includes a pressure element, which is capable of deforming the focus element by pressing on the deformable membrane in the direction of the boundary element.