In certain embodiments, a gimbal assembly includes an enclosure, a window, and a pivot assembly. The enclosure is centered on a first axis and the window is coupled to the enclosure. The pivot assembly is coupled to an interior portion of the enclosure and configured to pivot within the enclosure about a second axis, the second axis being perpendicular to the first axis. The pivot assembly includes a base portion, a mirror coupled at an angle to the base portion and configured to reflect light received through the window, and a sensor configured to receive the light reflected by the mirror. The pivot assembly is further configured to move within the enclosure in a direction that is perpendicular to the first axis and rotate about the first axis.

In a color separation prism that includes a first and second prism blocks bonded to each other, the first and second prism blocks are bonded to the first and second adhesive portions of the first and second base plates, respectively. The first and second base plates are fixed to the first and second base plate-fixing portions of a base with the first and second base-fixing portion interposed therebetween, respectively. The second adhesive portion is disposed between the first and second base plate-fixing portions so that a direction in which the second base plate-fixing portion is displaced from the first base plate-fixing portion and a direction in which the second adhesive portion is displaced from the second base-fixing portion are opposite to each other in a case in which the base and the second base plate expand or contract due to a change in temperature.

An optical element driving mechanism is provided, including a fixed part, a movable part and a driving assembly. The fixed part has a main axis, includes an outer frame and a base. The outer frame has a top surface and a sidewall. The top surface intersects the main axis. The sidewall extends from the edge of the top surface along the main axis. The base includes a base plate intersecting the main axis and securely connected to the outer frame. The movable part moves relative to the fixed part, and connects to an optical element having an optical axis. The driving assembly drives the movable part to move relative to the fixed part. The main axis is not parallel to the optical axis.

The disclosure provides a method that includes filling a cavity in a substrate with a second material, wherein the substrate includes a first material. The method also includes using galvanic and/or chemical deposition of a third material to apply an overcoating to a first surface of the substrate in a region of the cavity. The method further includes removing the second material from the cavity. In addition, the method includes, before or after removing the second material from the cavity, applying a reflective layer to the overcoating. The disclosure also provides related optical articles and systems.

An improved mount for, and method of mounting an, optical structure is provided. The mount has an optical structure comprising at least one mirror panel, the mirror panel comprising a reflective surface and a back surface substantially opposite the reflective surface, a protruding member extending from the back surface of the optical structure, the protruding member having a shape and the shape having an outside surface there-around, a base comprising a mounting element and an upper element extending from the mounting element, the upper element having a cavity for secured receipt therein of at least a portion of the protruding member, wherein the receiving cavity of the upper element has a shape identical to that of the shape of the protruding member, but where the shape of the protruding member is ten thousandths ( 1/10,000) of an inch smaller than the shape of the receiving cavity so that the outside surface of the protruding member is ten thousandths ( 1/10,000) of an inch away from the corresponding parts of the receiving cavity when the protruding member is secured within the cavity.

The disclosure provides an arrangement for the thermal actuation of a mirror, in particular in a microlithographic projection exposure apparatus, as well as related methods and systems.

A mirror array having a total surface extending perpendicularly to a surface normal, comprises a multiplicity of mirror elements each having a reflection surface and at least one degree of freedom of displacement, wherein the totality of the mirror elements form a parqueting of a total reflection surface of the mirror array, and wherein the mirror array is embodied modularly as a tile element in such a way that the parqueting of the total reflection surface can be extended by a tiling of a plurality of such mirror arrays.

An optical path changing device includes: a reflective member that reflects a light beam incident thereto, in a predetermined reflection direction; and a housing holding the reflective member. The housing has a first surface and a second surface with the reflective member interposed therebetween in a direction orthogonal to the reflection direction. The first surface and the second surface have openings, respectively, and a cooling gas is circulated from the opening in the first surface to the opening in the second surface.

The present invention relates to a light guide mirror assembly, which includes at least two thin prisms in combination with a rotating module. The thin prisms are oriented to direct the light beam towards the designated spot. The bases carrying the thin prisms are fixed by base fasteners or a moveable holder module, and the thin prisms are adjusted in terms of the spacings among them, the inclined angle thereof and the settings thereof to improve the output orientation and beam convergence of the light beam. The invention is useful in illumination, photo-thermal power generation, photovoltaic power generation, heat extraction air conditioner and light beam communication. The invention is also useful in other applications, such as weather control, fire extinguishment, pest control, energy transmission, telecommunication, rock cutting, molten lava casting and light beam probing.

The present invention relates to a method for controlling land surface temperature using stratospheric airships and a reflector. In the method for controlling land surface temperature using stratospheric airships and a reflector, four corners are connected to a lower end of support lines coupled to be disposed vertically downward from a plurality of airships, and sunlight is reflected by a reflector unfolded into a tetragonal shape in the air, wherein the reflecting surface of the reflector plate is maintained at an angle to remain perpendicular to an incident angle of sunlight to shield, or redirect, the land surface from incident sunlight.