A telecentric optical apparatus that is capable of suppressing an increase in the number of components as well as achieving high precision optical axis alignment, is provided. The telecentric optical apparatus of the present invention is characterized in that it is provided with: a first telecentric lens surface that is provided on an object side; a second telecentric lens surface that is provided on an image side and that shares a focus position with the first telecentric lens surface; and an optical path trimming part that is provided, between the first telecentric lens surface and the second telecentric lens surface, in an outside region, which is located on a side further out than a light passing region having a center thereof located at the focus position, and that changes an optical path such that a light beam incident on the outside region is prevented from contributing to image formation.

A telecentric optical apparatus that is capable of suppressing an increase in the number of components as well as achieving high precision optical axis alignment, is provided. The telecentric optical apparatus of the present invention is characterized in that it is provided with: a first telecentric lens surface that is provided on an object side; a second telecentric lens surface that is provided on an image side and that shares a focus position with the first telecentric lens surface; and an optical path trimming part that is provided, between the first telecentric lens surface and the second telecentric lens surface, in an outside region, which is located on a side further out than a light passing region having a center thereof located at the focus position, and that changes an optical path such that a light beam incident on the outside region is prevented from contributing to image formation.

Described is a telecentric illuminator that can be used, for example, in a mask aligner system for semiconductor wafer processing or as part of a solar simulator system for characterization of solar cells. The telecentric illuminator includes a tapered optic, a lens group having a plurality of lenses and an aperture stop, and a hybrid Fresnel lens. The Fresnel lens is disposed at a position along the optical axis of the telecentric illuminator to generate a telecentric image of the aperture stop at an illumination plane. The Fresnel lens may have a curved central portion and the aperture stop may be apodized to achieve desired illumination characteristics and improve the resolution of a mask aligner system.

A holographic imaging system may include an optical source configured to output a source beam, a splitter configured to split the source beam into a reference beam and an object beam that is incident on a target to form a scattered object beam, and a pre-filter comprising a telecentric lens and a spatial filter. The pre-filter may be configured to receive the scattered object beam and filter diffuse light from the scattered object beam to form a filtered scattered object beam. The system may also include a combiner configured to combine the filtered scattered object beam with the reference beam to form an interference beam, and an imaging array configured to receive the interference beam and generate raw holographic data based on the interference beam.

A holographic imaging system may include an optical source configured to output a source beam, a splitter configured to split the source beam into a reference beam and an object beam that is incident on a target to form a scattered object beam, and a pre-filter comprising a telecentric lens and a spatial filter. The pre-filter may be configured to receive the scattered object beam and filter diffuse light from the scattered object beam to form a filtered scattered object beam. The system may also include a combiner configured to combine the filtered scattered object beam with the reference beam to form an interference beam, and an imaging array configured to receive the interference beam and generate raw holographic data based on the interference beam.

An imaging device (110) and a method for imaging at least one object (112), specifically for multispectral imaging or hyperspectral imaging, are disclosed. The imaging device (110) comprises I. at least one image sensor (114) located in at least one image plane (116) of the imaging device (110), the image sensor (114) comprising a plurality of photosensitive elements (118); II. at least one first imaging system (120) configured for generating at least one intermediate image (122) of the object (112) in at least one intermediate image plane (124); III. at least one second imaging system (132) configured for generating at least one image (134) of the intermediate image (122) on the image sensor (114) in the image plane (116); IV. at least one diffractive optical element (142) arranged in the intermediate image plane (124); and V. at least one aperture (144) arranged in a beam path (146) of the second imaging system (132) between the intermediate image plane (124) and the image sensor (114),
wherein the diffractive optical element (142), the second imaging system (132) and the aperture (144) are arranged such that at least two different images for at least two different wavelengths of the intermediate image (122) are generated on at least two different groups of the photosensitive elements (118).

An imaging device (110) and a method for imaging at least one object (112), specifically for multispectral imaging or hyperspectral imaging, are disclosed. The imaging device (110) comprises I. at least one image sensor (114) located in at least one image plane (116) of the imaging device (110), the image sensor (114) comprising a plurality of photosensitive elements (118); II. at least one first imaging system (120) configured for generating at least one intermediate image (122) of the object (112) in at least one intermediate image plane (124); III. at least one second imaging system (132) configured for generating at least one image (134) of the intermediate image (122) on the image sensor (114) in the image plane (116); IV. at least one diffractive optical element (142) arranged in the intermediate image plane (124); and V. at least one aperture (144) arranged in a beam path (146) of the second imaging system (132) between the intermediate image plane (124) and the image sensor (114),
wherein the diffractive optical element (142), the second imaging system (132) and the aperture (144) are arranged such that at least two different images for at least two different wavelengths of the intermediate image (122) are generated on at least two different groups of the photosensitive elements (118).

A spectral imaging device comprises: an optical modifier system (SYS1) to form axial light beams (LB2) from received light beams (LB1), the axial light beams (LB2) being parallel with an optical axis (AX1) of the imaging device (500), a Fabry-Perot interferometer (FPI) to provide filtered axial light beams (LB3) by filtering light of the axial light beams (LB2), an image sensor (SEN1), and an array (ARR1) of lenses (LNS.sub.0,0, LNS.sub.0,1) to form a plurality of sub-images (S.sub.0,0, S.sub.0,1) on the image sensor (SEN1) by focusing light of the filtered light beams (LB3).

Provided is an optical imaging system, adapted for presenting an image of a particle. The optical imaging system includes a collimated light source, a flow channel, and a telecentric lens. The collimated light source is adapted for emitting a parallel beam. The flow channel is arranged on the transmission path of the parallel beam and is adapted for allowing the particle to pass through. The telecentric lens is arranged on the transmission path of the parallel beam. The parallel beam passes through the flow channel before transmitted to the telecentric lens, and the telecentric lens is adapted for converging the parallel beam onto an imaging plane.

Provided is an optical imaging system, adapted for presenting an image of a particle. The optical imaging system includes a collimated light source, a flow channel, and a telecentric lens. The collimated light source is adapted for emitting a parallel beam. The flow channel is arranged on the transmission path of the parallel beam and is adapted for allowing the particle to pass through. The telecentric lens is arranged on the transmission path of the parallel beam. The parallel beam passes through the flow channel before transmitted to the telecentric lens, and the telecentric lens is adapted for converging the parallel beam onto an imaging plane.