A laser machining device includes a laser light source, a spatial light modulator which includes a display unit, an objective lens, an image-transfer optical system, a camera and a controller. The controller executes first display processing and second display processing. According to first display processing, when the camera captures the image, the display unit displays a first phase pattern for adjusting a condensing position of laser light condensed by the objective lens to a first condensing position. According to second display processing, when the camera captures the image, the display unit displays a second phase pattern for adjusting the condensing position of the laser light condensed by the objective lens to a second condensing position different from the first condensing position in an irradiation direction of the laser light.

Method and apparatus for generating and controlling pulses in a light detection and ranging (LiDAR) system. An opto-mechanical phase shifter (OMPS) device has an array of unit cells supported by a semiconductor substrate. Each unit cell includes a resonator extending between opposing first and second doped regions and a flexible layer extending above the resonator separated by an intervening gap. Application of voltage across the doped regions establishes an electric field that extends through the resonator and controllably deforms the flexible layer to direct a beam of light in a desired direction and with a desired phase. A detector derives range information associated with a target illuminated by the directed beam of light. The derived range information can be used to adjust the voltage(s) applied to the OMPS device. Each unit cell can be independently activated and controlled, or groups of unit cells can be operated as a set.

Method and apparatus for generating and controlling pulses in a light detection and ranging (LiDAR) system. An opto-mechanical phase shifter (OMPS) device has an array of unit cells supported by a semiconductor substrate. Each unit cell includes a resonator extending between opposing first and second doped regions and a flexible layer extending above the resonator separated by an intervening gap. Application of voltage across the doped regions establishes an electric field that extends through the resonator and controllably deforms the flexible layer to direct a beam of light in a desired direction and with a desired phase. A detector derives range information associated with a target illuminated by the directed beam of light. The derived range information can be used to adjust the voltage(s) applied to the OMPS device. Each unit cell can be independently activated and controlled, or groups of unit cells can be operated as a set.

In an example, a method of manufacturing a MEMS device includes forming a via. The method also includes depositing metal in the via and depositing a first layer of a non-photoactive organic polymer on the metal. The method includes baking the first layer of the non-photoactive organic polymer. The method also includes depositing a second layer of the non-photoactive organic polymer on the first layer of the non-photoactive organic polymer after baking the first layer of the non-photoactive organic polymer. The method includes baking the second layer of the non-photoactive organic polymer. The method also includes etching the first layer and the second layer of the non-photoactive organic polymer.

In an example, a method of manufacturing a MEMS device includes forming a via. The method also includes depositing metal in the via and depositing a first layer of a non-photoactive organic polymer on the metal. The method includes baking the first layer of the non-photoactive organic polymer. The method also includes depositing a second layer of the non-photoactive organic polymer on the first layer of the non-photoactive organic polymer after baking the first layer of the non-photoactive organic polymer. The method includes baking the second layer of the non-photoactive organic polymer. The method also includes etching the first layer and the second layer of the non-photoactive organic polymer.

An active metasurface includes a number of periodically-repeated unit cells arranged on a substrate that each include a plasmonic waveguide shaped and sized to provide a cutoff mode that captures light of a target wavelength. The active metasurface includes an index modulation controller that controllably varies a voltage differential across each one of the periodically-repeated cells to change a phase of light incident on the metasurface.

A freeform varifocal optical assembly includes at least three optical modules including a first plurality of optical elements including Pancharatnam-Berry phase (PBP) lenses, polarization sensitive hologram (PSH) lenses, metamaterials, or combinations thereof. The plurality of optical elements of each optical module include a property associated with a Zernike polynomial. Each of the first and the three optical modules are configurable between a plurality of optical powers. The freeform varifocal optical assembly is configurable to output a predetermined wavefront in response to an input wavefront.

A device for thermally actuating a deformable mirror includes a monolithic block that includes a mirror plate having a front face forming or configured to support a mirror, a base, and a one-dimensional array of thermally expandable actuators. The thermally expandable actuators mechanically connect a rear face of the mirror plate to the base such that shape, tilt, and/or location of the front face depend on temperature of the thermally expandable actuators. The mirror plate, base, and thermally expandable actuators are defined by slits that span between opposite-facing top and bottom surfaces of the monolithic block. The monolithic block may be made of a metal and may be manufactured at relatively low cost by wire eroding the slits in a metal block, using a wire that passes through the metal block between its top and bottom surfaces.

Apparatus for producing a multiplicity of photons having quantum-entangled single-photon states is provided. The single photon includes two quantum-entangled degrees of freedom, and the apparatus includes a source apparatus of the multiplicity of photons having quantum-entangled single-photon states including first- and second-generation stages. The first stage includes a first element having a source generating a multiplicity of photons, the first element selects a first degree of freedom of two degrees of freedom of the single photon, which includes only one pair of values, and a second element that selects a second degree of freedom of two degrees of freedom of the single photon. The second degree of freedom includes only one pair of values, the second stage: generates a coherent superposition of the two degrees of freedom of the single photon; selects one value of a first and a second of said two degrees of freedom.

Apparatus for producing a multiplicity of photons having quantum-entangled single-photon states is provided. The single photon includes two quantum-entangled degrees of freedom, and the apparatus includes a source apparatus of the multiplicity of photons having quantum-entangled single-photon states including first- and second-generation stages. The first stage includes a first element having a source generating a multiplicity of photons, the first element selects a first degree of freedom of two degrees of freedom of the single photon, which includes only one pair of values, and a second element that selects a second degree of freedom of two degrees of freedom of the single photon. The second degree of freedom includes only one pair of values, the second stage: generates a coherent superposition of the two degrees of freedom of the single photon; selects one value of a first and a second of said two degrees of freedom.