G02B26/08

CALIBRATION SYSTEM FOR AN EXTREME ULTRAVIOLET LIGHT SOURCE

A metrology system includes a light beam metrology apparatus configured to sense one or more aspects of an amplified light beam and to make adjustments to the amplified light beam based on the sensed one or more aspects; a target metrology apparatus configured to measure one or more properties of a modified target after a target has interacted with the amplified light beam, and to determine a moment when the modified target achieves a reference calibration state; and a control apparatus configured to: receive the reference calibration state and the moment at which the reference calibration state is achieved from the target metrology apparatus; determine a light beam calibration state of the amplified light beam based on the received reference calibration state and the moment at which the reference calibration state is achieved; and provide the light beam calibration state to the light beam metrology apparatus.

Dynamic adjustment of micromirror for heads-up display using photochromatic material

Systems, apparatus, computer implemented methods, and computer program products to enhance the operation of a vehicle. A HUD apparatus includes a laser light source to generate laser light to be reflected an optical member, one or more elastically deformable position adjustment members, and one or more UV light sources. The elastically deformable position adjustment members are operable to adjust a spatial orientation of the optical member, and include one or more photochromatic regions to facilitate movement of the one or more elastically deformable position adjustment members from a contracted state to an expanded state in response to exposure to UV light emitted by the U light source(s). In that way, adjustments in the spatial orientation of the optical member and a change in direction of laser light reflected by the optical member as obtained.

METHOD FOR ALIGNMENT OF A LASER BEAM EMITTED FROM AN OPTICAL COMMUNICATION TRANSMITTER WITH A RECEIVING STATION

The present invention relates to a method, system and device for transmitting information from an optical communication transmitter to a receiving station via a laser beam and for alignment of said laser beam emitted from said optical communication transmitter with said receiving station, wherein: said optical communication transmitter is displaced relative to said receiving station and comprises a laser, a radio receiver, a microprocessor and a liquid crystal on silicon spatial light modulator comprising a diffractive element, whereby said laser beam is emitted from said laser and is projected over an area by diffraction and reflection using said liquid crystal on silicon spatial light modulator, wherein said laser and said diffractive element are controlled by said microprocessor, wherein said laser beam has a longitudinal axis parallel to the propagation path of said laser beam, said receiving station comprises a photodiode receiver for detecting said transmitted laser beam and a radio transmitter, and said method comprises using a pointing diffraction mask and a tracking diffraction mask, wherein each pointing diffraction mask is generated in combination with a tracking diffraction mask in said diffractive element.

ACTUATOR AND OPTICAL REFLECTIVE ELEMENT
20230018624 · 2023-01-19 ·

An actuator that includes: a first driving body that includes a first piezoelectric material that extends in a first axis direction; a second driving body that includes a second piezoelectric material shorter than the first piezoelectric material in the first axis direction; and a base that holds the first driving body and the second driving body at proximal end portions of the first driving body and the second driving body in the first axis direction. The first driving body and the second driving body are aligned and coupled together in a polarization axis direction in a state in which a polarization axis of the first piezoelectric material and a polarization axis of the second piezoelectric material correspond with each other. A length of the second piezoelectric material in a second axis direction is greater than a length of the first piezoelectric material in the second axis direction.

DIGITAL MICROMIRROR DEVICE FOR AN ILLUMINATION OPTICAL COMPONENT OF A PROJECTION EXPOSURE SYSTEM
20230221649 · 2023-07-13 ·

A micromirror array is a constituent part of an illumination-optical component of a projection exposure apparatus for projection lithography. A multiplicity of micromirrors are in groups in a plurality of mirror modules, each of which has a rectangular module border. The mirror modules are in module columns. At least some of the module columns are displaced with respect to one another along a column boundary line so that at least some of the mirror modules adjacent to one another over the boundary line are arranged displaced with respect to one another. Their module border sides running transversely to the boundary line are not aligned flush with one another. This micromirror array can have a relatively standardized production and can have a relatively small reflection folding angle on the object if the micromirror array represents a final illumination-optical component upstream of a reflective object to be illuminated.

DISPLAY SYSTEM WITH VARIABLE BEAM EXPANSION FOR MULTIPLE LASERS
20230015702 · 2023-01-19 ·

Display systems, such as near eye display systems or wearable heads up displays, may include a laser projection system having an optical engine and an optical scanner. Light output by the optical engine may be directed into the optical scanner as two angularly separated laser light beams. The angularly separated laser light beams typically have different angles of incidence on a second scan mirror of the optical scanner. Respectively different levels of magnification are applied to the beam diameter of each of the angularly separated laser light beams in a first dimension, such that the angularly separated laser light beams have respectively different beam diameters upon incidence at the second scan mirror. In some embodiments, the different beam diameters of the angularly separated laser light beams result in regions of incidence of each of the angularly separated laser light beams on the second scan mirror being equal or substantially similar.

DIRECTIONAL ILLUMINATOR AND DISPLAY DEVICE WITH PUPIL STEERING BY TILTABLE REFLECTOR
20230014577 · 2023-01-19 ·

A directional illuminator includes a light source, a pupil-replicating lightguide, and a tiltable reflector coupling the light source to the pupil-replicating lightguide. The exit beam angle of the light outputted by the pupil-replicating lightguide follows the in-coupling angle, and accordingly depends on the tilting angle of the tiltable reflector. The directional illuminator with steered light beam may be used to illuminate a display panel. Steering the illuminating light by the tiltable reflector enables one to steer the exit pupil of the display device to match the user's eye location(s).

Head-up display device

A head-up display device includes: light sources; a light source driver that drives the light sources; a second control unit that illuminates the light sources via the light source driver on the basis of illumination control data; and a DMD display element that generates display light on the basis of illumination light emitted by the light sources. The illumination control data includes control modes for generating the illumination light brightness corresponding to a requested brightness. The control modes have differing brightness ranges, which partially overlap each other. The second control unit switches modes between the control modes when the requested brightness has reached a mode switching value, which is located in a non-end part of an overlapping region where one of the brightness ranges of one of the control modes and another one of the brightness ranges of another one of the control modes overlap.

OPTICAL DEVICE

In an optical device, a base and a movable unit are constituted by a semiconductor substrate including a first semiconductor layer, an insulating layer, and a second semiconductor layer in this order from one side in a predetermined direction. The base is constituted by the first semiconductor layer, the insulating layer, and the second semiconductor layer. The movable unit includes an arrangement portion that is constituted by the second semiconductor layer. The optical function unit is disposed on a surface of the arrangement portion on the one side. The first semiconductor layer that constitutes the base is thicker than the second semiconductor layer that constitutes the base. A surface of the base on the one side is located more to the one side than the optical function unit.

Drive device and distance measurement apparatus
11555892 · 2023-01-17 · ·

A drive device (10) includes a support (23), a first movable portion (21), a first magnet (41), a second magnet (42), a first coil (31), and a second coil (32). The first movable portion (21) is swingable in two axial directions with respect to the support (23). The first magnet (41) is positioned inside the first movable portion (21) when viewed from a first direction. The second magnet (42) is positioned outside the first movable portion (21) when viewed from the first direction. Magnetic flux from the first magnet (41) acts on the first coil (31). Magnetic flux from the second magnet (42) acts on the second coil (32).