An analysis device for quantifying a state of a fluorescent image containing a plurality of bright spots comprises an area setting unit in which states of a plurality of bright spots contained in a plurality of areas set in the fluorescent image in accordance with positions of the plurality of bright spots are quantified as numerical values.

Metrology systems and methods are provided herein, which comprise an optical element that is positioned between an objective lens of the system and a target. The optical element is arranged to enhance evanescent modes of radiation reflected by the target. Various configurations are disclosed: the optical element may comprise a solid immersion lens, a combination of Moir-elements and solid immersion optics, dielectric-metal-dielectric stacks of different designs, and resonating elements to amplify the evanescent modes of illuminating radiation. The metrology systems and methods are configurable to various metrology types, including imaging and scatterometry methods.

Metrology systems and methods are provided herein, which comprise an optical element that is positioned between an objective lens of the system and a target. The optical element is arranged to enhance evanescent modes of radiation reflected by the target. Various configurations are disclosed: the optical element may comprise a solid immersion lens, a combination of Moir-elements and solid immersion optics, dielectric-metal-dielectric stacks of different designs, and resonating elements to amplify the evanescent modes of illuminating radiation. The metrology systems and methods are configurable to various metrology types, including imaging and scatterometry methods.

The present disclosure concerns a device for forming at least one focused beam in a near zone, from an electromagnetic wave incident on said device. Such device is remarkable in that it comprises at least one layer of a dielectric material comprising at least partially a first element, said first element having a first refractive index value, said first element comprising at least partially a second element, said second element having a second refractive index value greater than said first index value, and wherein said second element comprises at least a base surface, defined with respect to an arrival direction of said electromagnetic wave, and wherein said at least a base surface comprises at least two opposite edge line segments whose shape and associated base angles between said at least a base surface and a lateral surface of said second element, in a vertical plane with respect to said at least a base surface, control a shape of said at least one focused beam.

The present disclosure concerns a device for forming at least one focused beam in a near zone, from an electromagnetic wave incident on said device. Such device is remarkable in that it comprises at least one layer of a dielectric material comprising at least partially a first element, said first element having a first refractive index value, said first element comprising at least partially a second element, said second element having a second refractive index value greater than said first index value, and wherein said second element comprises at least a base surface, defined with respect to an arrival direction of said electromagnetic wave, and wherein said at least a base surface comprises at least two opposite edge line segments whose shape and associated base angles between said at least a base surface and a lateral surface of said second element, in a vertical plane with respect to said at least a base surface, control a shape of said at least one focused beam.

The present disclosure concerns a device for forming a field intensity pattern in the near zone, from electromagnetic waves which are incident on said device. Notably, such a device allows confining electromagnetic waves, which are incident on the device, into beams of radiation in the near zone. It comprises at least one layer of dielectric material, which surface has at least one abrupt change of level forming a step. A lower and lateral part of said surface with respect to said step is in contact with a substance having a refractive index lower than that of said dielectric material. For an incident electromagnetic wave impinging upon the device in the vicinity of such a step, the corresponding step of index it encounters produces a complex electromagnetic phenomenon, which allows generating low-dispersive condensed beams and specific field patterns in the near zone.

The present disclosure concerns a device for forming a field intensity pattern in the near zone, from electromagnetic waves which are incident on said device. Notably, such a device allows confining electromagnetic waves, which are incident on the device, into beams of radiation in the near zone. It comprises at least one layer of dielectric material, which surface has at least one abrupt change of level forming a step. A lower and lateral part of said surface with respect to said step is in contact with a substance having a refractive index lower than that of said dielectric material. For an incident electromagnetic wave impinging upon the device in the vicinity of such a step, the corresponding step of index it encounters produces a complex electromagnetic phenomenon, which allows generating low-dispersive condensed beams and specific field patterns in the near zone.

The total internal reflection microscope has an illumination optical system that relays light from a light source with a relay optical system, forms an image of the light source on the incident pupil plane of the objective lens and irradiates a sample with the illumination light via an objective lens, has an angle adjustment mirror for changing the position of the image of the light source in a direction orthogonal to the optical axis, an optical detector for detecting the intensity of the returning illumination light reflected by the sample and collected by the objective lens, and a controller for determining the operation amount of the angle adjustment mirror, wherein the controller determines the operation amount of the angle adjustment mirror so that the illumination light is totally reflected at the sample based on the change in intensity of the returning light when the angle adjustment mirror is changed.

The total internal reflection microscope has an illumination optical system that relays light from a light source with a relay optical system, forms an image of the light source on the incident pupil plane of the objective lens and irradiates a sample with the illumination light via an objective lens, has an angle adjustment mirror for changing the position of the image of the light source in a direction orthogonal to the optical axis, an optical detector for detecting the intensity of the returning illumination light reflected by the sample and collected by the objective lens, and a controller for determining the operation amount of the angle adjustment mirror, wherein the controller determines the operation amount of the angle adjustment mirror so that the illumination light is totally reflected at the sample based on the change in intensity of the returning light when the angle adjustment mirror is changed.

The disclosure relates to an optically-transparent device (100) comprising a main part (10) of dielectric material having a refractive index n.sub.2. Such an optically-transparent device is configured for forming a field intensity distribution in a near zone of said device, from electromagnetic waves incidentally illuminating said device, when said device is embedded in a dielectric material having a refractive index n.sub.1 lower than said refractive index n.sub.2. Said device (100) further comprises at least one insert (11) of dielectric material having a refractive index n.sub.3 lower than said refractive index n.sub.2 and different from said refractive index n.sub.1, said at least one insert being inserted into said main part, and each one of said at least one insert and said main part having respectively an edge of a step formed by a base surface of said at least one insert or said main part and a lateral surface of said at least one insert or said main part, said base surface being defined with respect to an arrival direction of said electromagnetic wave. The disclosure also relates to a system comprising a plurality of above-described optically-transparent devices uniformly distributed within a dielectric host medium, so as to form a far-field device for far-field applications.