The invention relates to an interferometric method, in which the light scattered by an object is imaged onto an electronic camera, wherein a sample light component is assigned to scattering sites on a sectional face in the interior of the object. This sample light component can be separated from the contributions of the other sample light components by processing of the camera image and leads to a sectional image. A particular advantage of the invention lies in the fact that multiple parallel sectional faces can be exposed sequentially at predetermined intervals from each other in the interior of the object. Such a sequence of sectional images can be used to calculate a solid model of the object.

There is provided a lighting device arranged to produce a controllable light beam for illuminating a scene. The device comprises an addressable spatial light modulator arranged to provide a selectable phase delay distribution to a beam of incident light. The device further comprises Fourier optics arranged to receive phase-modulated light from the spatial light modulator and form a light distribution. The device further comprises projection optics arranged to project the light distribution to form a pattern of illumination as said controllable light beam.

An apparatus and method are disclosed for actinic inspection of semiconductor masks intended for extended ultraviolet (EUV) lithography, or similar objects, with feature sizes less than 100 nm. The approach uses a coherent light source with wavelength less than 120 nm. Inside a vacuum system, an optical system directs the light to an object, i.e., the mask or mask blank, and directs the resulting reflected or transmitted light to an imaging sensor. A computational system processes the imaging sensor data to generate phase and amplitude images of the object. The preferred imaging modality, a form of digital holography, produces images of buried structures and phase objects, as well as amplitude or reflectance images, with nanometer resolution less than or equal to the feature size of the mask.

There is provided a lighting device arranged to produce a controllable light beam for illuminating a scene. The device comprises an addressable spatial light modulator arranged to provide a selectable phase delay distribution to a beam of incident light. The device further comprises Fourier optics arranged to receive phase-modulated light from the spatial light modulator and form a light distribution. The device further comprises projection optics arranged to project the light distribution to form a pattern of illumination as said controllable light beam.

An optical fiber splitter device comprising at least two optical fibers of different lengths is disclosed for partial or complete compensation of the optical path difference between waves interfering to generate a hologram or an interferogram. Various implementations of this fiber splitter device are described in apparatuses for holographic and interferometric imaging of microscopic and larger samples.

There is provided a lighting device arranged to produce a controllable light beam for illuminating a scene. The device comprises an addressable spatial light modulator arranged to provide a selectable phase delay distribution to a beam of incident light. The device further comprises Fourier optics arranged to receive phase-modulated light from the spatial light modulator and form a light distribution. The device further comprises projection optics arranged to project the light distribution to form a pattern of illumination as said controllable light beam.

A holographic projector includes a display device arranged to form a holographic wavefront by spatially modulating light in accordance with a hologram of a picture. The holographic projector includes a magnification system including a first and second lens. The first lens is arranged form a holographic reconstruction of the picture by focusing the holographic wavefront towards a front focal plane of the first lens. The holographic reconstruction of the picture includes a plurality of pixels. The holographic projector includes a kinoform disposed between the first and second lens and arranged to apply a phase-delay to each pixel of the holographic reconstruction. The holographic projector includes a movement assembly arranged to move the kinoform such that a plurality of different phase-delays are applied to each pixel. The kinoform includes an array of zones and is arranged such that the width of each zone is substantially equal to the distance between adjacent pixels.

There is provided a lighting device arranged to produce a controllable light beam for illuminating a scene. The device comprises an addressable spatial light modulator arranged to provide a selectable phase delay distribution to a beam of incident light. The device further comprises Fourier optics arranged to receive phase-modulated light from the spatial light modulator and form a light distribution. The device further comprises projection optics arranged to project the light distribution to form a pattern of illumination as said controllable light beam.

There is provided a lighting device arranged to produce a controllable light beam for illuminating a scene. The device comprises an addressable spatial light modulator arranged to provide a selectable phase delay distribution to a beam of incident light. The device further comprises fourier optics arranged to receive phase-modulated light from the spatial light modulator and form a light distribution. The device further comprises projection optics arranged to project the light distribution to form a pattern of illumination as said controllable light beam.

There is provided a lighting device arranged to produce a controllable light beam for illuminating a scene. The device comprises an addressable spatial light modulator arranged to provide a selectable phase delay distribution to a beam of incident light. The device further comprises fourier optics arranged to receive phase-modulated light from the spatial light modulator and form a light distribution. The device further comprises projection optics arranged to project the light distribution to form a pattern of illumination as said controllable light beam.