A valve system having a vacuum valve with a valve seat having a valve opening defining an opening axis and a first sealing surface around the valve opening, a valve closure having a second sealing surface and a drive unit coupled to the valve closure. A control and regulating unit preforming a pre-regulating step and a regulating step for the valve closure in a regulating cycle, the pre-regulating step moves the valve closure to a defined position and the regulating step the closure position is varied based on a determined control variable and a target value. The regulating and control unit updates at least during a part of the regulating cycle and a regulating profile is derived, the regulating profile is compared with a reference regulating profile and a regulating deviation is derived, an adapted pre-regulating position is provided as the actual pre-regulating position for the regulating cycle.

A fuel pump system for an aerial refueling system including: a variable displacement motor operable to be driven by a hydraulic fluid pressure; a fuel pump operable to be driven by the variable displacement motor; and a drive system controller (DSC) connected to the variable displacement motor, wherein the DSC is operable to direct an operation of the fuel pump in modes comprising: a flow control mode operable to maintain an output fuel flow rate from the fuel pump to a predetermined maximum inlet pressure at a reception coupling for a receiver aircraft; a fuel pressure control mode operable to regulate the output fuel flow rate to not exceed the predetermined maximum inlet pressure; and a priority mode operable to reduce the output fuel flow rate in response to a decrease in the hydraulic pressure. Also a method of refueling a receiver aircraft.

A valve device comprises an opening degree detection section and a control section. The control section performs, according to the pressure value and the opening degree detected by the opening degree detection unit, either one of open control for performing rough adjustment of the opening degree of the valve body or close control for performing fine adjustment of the opening degree of the valve body, in the open control, a predictive pressure estimation value at a preset future prediction target time from a current point is estimated, and the rough adjustment is performed based on the predictive pressure estimation value and the target pressure value, and in the close control, the fine adjustment is performed based on the target pressure value and the pressure value.

A processing liquid supply system includes a tank that stores a processing liquid supplied from a processing liquid supply, a circulation passage that is connected to the tank, a plurality of supply passages that is connected to the circulation passage and supplies the processing liquid to each of a plurality of liquid processing units that perform a liquid processing on a substrate, a first pump filter set that is a combination of a first pump and a plurality of first filters provided downstream of the first pump, and a second pump filter set that is a combination of a second pump and a plurality of second filters provided downstream of the second pump. The first pump filter set and the second pump filter set are arranged in series in the circulation passage such that the first pump filter set is located upstream of the second pump filter set.

The invention relates to an apparatus for analyzing reaction systems with a liquid phase (13) and a gas phase (15), the apparatus (1) comprising at least two tank reactors (3), a common feed line (5), a common drain line (25) for the liquid phase and a common drain line (21) for the gas phase, each tank reactor (3) being connected to the common feed line (5) by a supply line (7), to the common drain line (25) for the liquid phase by a liquid withdrawal line (27) and to the common drain line (21) for the gas phase by a gas withdrawal line (23), wherein the pressure in each tank reactor (3) is controlled by one of: (a) a pressure control (31) in the common feed line (5); (b) a pressure line (29) which is connected to the gas space of each tank reactor (3); (c) a pressure control (31) in the common drain line (21) for the gas phase and a flow restrictor (33) in the common drain line (25) for the liquid phase or a pressure control (31) in the common drain line (25) for the liquid phase and a flow restrictor (33) in the common drain line (21) for the gas phase; or (d) a pressure line (29) which enters into the common drain line (25) for the liquid phase or into the common drain line (21) for the gas phase.

The invention further relates to a process for analyzing reaction systems in such an apparatus.

A target opening degree estimator estimates a target opening degree estimation value as an opening degree of a valve element of a pressure adjustment vacuum valve when a pressure of a vacuum chamber connected to the pressure adjustment vacuum valve reaches a pressure adjustment target pressure based on a correlation between the opening degree of the valve element and the pressure of the vacuum chamber, a current opening degree, and a current pressure.

A mobile dispenser may be used to at least partially fill hydrogen tanks of fuel cell-powered vehicles. The dispenser uses a purely mechanical control of the fill using an orifice plate across which a pressure differential is maintained through use of a backpressure regulator whose reference pressure is controlled by a differential pressure regulator. Because it does need or use electrical power, it may be used in situations where no electrical power is available or convenient.

Exemplary embodiments of the present disclosure include systems, apparatuses, and methods that are directed to controlling pressure in a pressurized flow system, such as a CO.sub.2-based chromatography system or other pressurized flow systems. Exemplary embodiments of the present disclosure comprise one or more apparatuses, systems or methods for implementing multiple pressure regulators to control pressure. In addition to providing pressure control, apparatuses, systems and methods described herein dampen damaging thermal effects caused by pressure drops of a mobile phase including CO.sub.2.

A flow tube including: a pin; a seat; and a guide tube, the pin and the seat are arranged at least partially in the guide tube; and wherein: the flow tube is arranged to have a closed position, wherein: the pin is in contact with the seat and fluid flow through the seat is reduced or prevented; the flow tube is arranged to have an open position, wherein: the pin is not in contact with the seat and fluid flow is increased through the seat when compared to the closed position; and the flow tube is arranged to have a forced open position, wherein: the seat is arranged such that when a force above a threshold force is applied to the seat: the seat moves away from the pin, the pin is not in contact with the seat, and the flow tube cannot move to the closed position again.

An inlet pressure valve regulation system to provide a regulated fluid flow includes a housing, first piston assembly, regulating valve, and inlet pressure conduit. The housing has an inlet at an inlet end which receives a pressurized fluid and an outlet at an outlet end which provides the regulated fluid flow. The piston assembly is arranged in the housing and has a first cavity and a control orifice to fluidly connect the inlet to the first cavity. The first piston assembly is configured to regulate the fluid flow. The regulating valve has a first valve chamber, a second valve chamber fluidly connected to a vent, a floating valve seat disposed between the first valve chamber and the second valve chamber, and a valve component. The floating valve seat includes a diaphragm and a seat having a passageway to fluidly connect the first valve chamber and the second valve chamber.