A semiconductor device manufacturing system and a method for manufacturing semiconductor device are provided. The semiconductor device manufacturing system comprises a valve box module, a controller, a purge gas source and at least one semiconductor manufacturing tool. The valve box module includes at least one stick and a first gas line in fluid communication with the at least one stick. Further, the first gas line includes a pneumatic valve and a pressure transmitter downstream of the pneumatic valve. The controller connects to the pneumatic valve and the pressure transmitter of the first gas line. The purge gas source is in fluid communication with the first gas line. The at least one semiconductor manufacturing tool is coupled to the at least one stick.

An anti-surge recycle valve system for a natural gas line using a pipeline rotary control valve for controlling gas flow through the gas line and a valve controller having a surge-programmable feature including a threshold setpoint deviation limit, which is used to control first and second control valve loops. The first solenoid valve loop drives a rotary high-pressure piston actuator when the linear position sensor determines a setpoint deviation in gas flow below the threshold deviation, and the second solenoid valve loop drives the rotary high-pressure piston actuator when the linear position sensor determines a setpoint deviation in gas flow above the threshold deviation. The system provides ultra-rapid stroking speed in tandem with highly accurate and stable positioning.

A control system for a compressed air system is configured to implement an “away mode” of operation that provides for a temporary override of the operation of the compressed air system, which can be easily enabled and disabled. During a period of down time, when the away mode of operation is enabled, the control system causes the compressed air system to operate in a limited capacity (e.g., maintaining limited system pressure, flow, higher dewpoint/humidity level, etc.) to minimize energy usage and limit unnecessary wear on system equipment without shutting down the compressed air system.

A system and method of maintaining back pressure located downstream of the Coriolis meter maintains the pressure downstream of the Coriolis meter in relation to the surface back pressure (SBP). At least one flow control device is located downstream of the Coriolis meter. The flow control device of the present invention (the BPV) automatically maintains the downstream pressure to less than or equal to fifty percent (50%) of the surface back pressure. A pressure regulator sets the back pressure to allow for a standalone device. Additional valves allow adjustment of the back pressure and allow for pressure relief and full flow bypass.

A chamber and a system for real-time analysis of gas generated inside a secondary battery. The chamber and system are capable of adjusting temperature while directly applying heat to the secondary battery. The system may include a chamber, a pump module, and an analysis module. The chamber may include a first housing which is insulative, and configured to house the secondary battery mounted in an inner space surrounded by the first housing, a second housing which is thermally conductive and surrounding the first housing, an inlet connected to the pump module, a temperature sensor configured to measure a temperature of the secondary battery or a temperature inside the chamber, and a first heat generation member configured to heat the secondary battery, the first heat generation member being configured to be inserted into the second housing.

Provided is a pneumatic actuator control device including detectors that are disposed in an air supply passage leading from an air supply source to a solenoid valve or in an air exhaust passage leading from the solenoid valve, and that detect the flow volume or the pressure of the air in the air supply passage, or detect the flow volume or the pressure of the air in the air exhaust passage; and an operational state determination unit that, on the basis of data representing a change in the flow volume or the pressure of the air in the air supply passage, or in the flow volume or the pressure of the air in the air exhaust passage, as detected by the detectors, determines the operational state of a pneumatic actuator connected to the solenoid valve.

Various embodiments provide a leaching solution monitoring module comprising a first leaching solution distribution system interface, a flow meter in fluid communication with the first leaching solution distribution system interface, the flow meter in fluid communication a 3-way pressure regulator, and a second leaching solution distribution system interface in fluid communication with the 3-way pressure regulator.

Various embodiments provide a leaching solution monitoring module comprising a first leaching solution distribution system interface, a flow meter in fluid communication with the first leaching solution distribution system interface, the flow meter in fluid communication a 3-way pressure regulator, and a second leaching solution distribution system interface in fluid communication with the 3-way pressure regulator.

The present invention relates to a method for improving stability of a hydrogen gaseous dispensing system. An example of such system is hydrogen powered vehicle fuel filling station. Vehicle is filled by multiple high pressure gaseous hydrogen tubes, usually one tube at a time. For safety and reliability reasons a control requirement for such system is to be able to deliver the hydrogen at constant rate to the fuel tank so that its rate of pressure increase stays constant during entire filling process. A dual pressure regulator arrangement is proposed to better maintain flow continuity and/or pressure during tube switching.

A pneumatic flow controlling device is disclosed. The device includes a perforated component disposed on a bottom component coupled to a top surface of a pneumatic vacuum elevator. The perforated component includes multiple perforations to enable air circulation from outside to inside of the elevator cylinder. The device also includes a diaphragm component to expand and compress based on the air circulation. The device also includes a primary valve to allow an air supply to the elevator cylinder for controlling movement of an elevator cabin within a tubular pathway based on a control signal received from an elevator controller. The device also includes a secondary valve to allow the air supply to the elevator cylinder for dynamically varying speed of the elevator cabin at one or more landing positions.