Disclosed are a monitoring feedback system and a monitoring feedback method. System comprises: a first accommodating device and a second accommodating device, respectively configured to store a first solution and a second solution; a mixing device, configured to store a mixed solution, the mixed solution being composed of the first solution and the second solution; a first concentration detecting device, configured to detect a current concentration of the mixed solution; and a concentration compensating module, configured to obtain, based on a difference between the current concentration and a predetermined concentration, a first compensation amount of the first solution to be compensated to the mixing device or a second compensation amount of the second solution to be compensated to the mixing device, and to compensate the mixed solution based on the first compensation amount or the second compensation amount so that the concentration of the compensated solution reaches the predetermined concentration.

Provided is a concentration control module that improve responsiveness of concentration control of a vaporization system, and is used in a vaporization system. The concentration control module includes a concentration measuring part configured to measure a concentration of a source gas; a valve provided in a lead-out pipe configured to lead out the source gas from the tank; a pressure target value calculating part configured to calculate a pressure target value inside the tank by using a concentration target value of the source gas, and a concentration measured value of the concentration measuring part; a delay filter configured to generate a pressure control value by applying a predetermined time delay to the pressure target value obtained by the pressure target value calculating part; and a valve control part configured to feedback-control the valve by using a deviation between the pressure control value obtained by the delay filter, and a pressure inside the tank.

This in-line active and reverse calculating mass balance blending system can maintain a chemical at desired control points, such as with respect to concentration, temperature, and/or pressure, while the output flow rate is changing dynamically to a point of use. A blending unit is configured to receive and blend at least two species and deliver a mixture at selected concentrations to points of use. A controller can be configured to determine a mass balance to maintain the concentrations in the mixture using information from metrology systems and a flow in an output to the at least one point of use. The controller also can be configured to maintain a concentrations in the mixture within a concentration range by controlling flow rates to the blending unit.

A method of controlling a concentration or range of concentrations of a liquid or gas in an enclosure is provided. The method includes positioning an injection station within the enclosure, the injection station includes a liquid or gas source, a sprayer assembly and a system that delivers the liquid or gas from the liquid or gas source to the sprayer assembly. A concentration level of the liquid or gas in the environment surrounding the injection station is monitored using a sensor and the sensor providing a signal indicative of the concentration level to a controller. The controller controls the flow of the liquid or gas to the sprayer assembly based on the signal.

A managed water system can include a first body of water contained in a vessel. The managed water system can also include at least one sensor device that measures at least one parameter associated with the first body of water. The managed water system can further include a circulation system that circulates the body of water relative to the vessel. The managed water system can also include a controller communicably coupled to the at least one sensor device and the circulation system. The controller can control the circulation system, and receive measurements of the at least one parameter made by the at least one sensor device. The controller can also evaluate the measurements using multiple algorithms, and communicate a result of evaluating the measurements.

Systems and methods for providing network connectivity and remote monitoring, optimization, and control of pool/spa equipment are provided. “Internet-of-Things” (IoT) functionality is provided for pool and spa equipment in a flexible and cost-effective manner. Network connectivity and remote monitoring/control of pool and spa equipment is provided by various components such as a network communication and local control subsystem installed in pool/spa equipment, and other components. Also disclosed are various control processes (“pool logic”) which can be embodied as software code installed in any of the various embodiments of the present disclosure.

Systems and methods for providing network connectivity and remote monitoring, optimization, and control of pool/spa equipment are provided. “Internet-of-Things” (IoT) functionality is provided for pool and spa equipment in a flexible and cost-effective manner. Network connectivity and remote monitoring/control of pool and spa equipment is provided by various components such as a network communication and local control subsystem installed in pool/spa equipment, and other components. Also disclosed are various control processes (“pool logic”) which can be embodied as software code installed in any of the various embodiments of the present disclosure.

Systems and methods for providing network connectivity and remote monitoring, optimization, and control of pool/spa equipment are provided. “Internet-of-Things” (IoT) functionality is provided for pool and spa equipment in a flexible and cost-effective manner. Network connectivity and remote monitoring/control of pool and spa equipment is provided by various components such as a network communication and local control subsystem installed in pool/spa equipment, and other components. Also disclosed are various control processes (“pool logic”) which can be embodied as software code installed in any of the various embodiments of the present disclosure.

Systems and methods for providing network connectivity and remote monitoring, optimization, and control of pool/spa equipment are provided. “Internet-of-Things” (IoT) functionality is provided for pool and spa equipment in a flexible and cost-effective manner. Network connectivity and remote monitoring/control of pool and spa equipment is provided by various components such as a network communication and local control subsystem installed in pool/spa equipment, and other components. Also disclosed are various control processes (“pool logic”) which can be embodied as software code installed in any of the various embodiments of the present disclosure.

A method includes mixing a first deionized water (DI) water from a first pipe and a second DI water from a second pipe in a merging pipe that is in fluid communication with the first pipe and the second pipe. An electrical resistivity of the first DI water is different from an electrical resistivity of the second DI water. A mixture of the first DI water and the second DI water is applied from the merging pipe onto a wafer.