A semiconductor memory device includes an electrode structure including a plurality of electrode layers and a plurality of interlayer dielectric layers which are alternately stacked on a source plate defined with a cell area and a connection area in a first direction; a vertical channel passing through the electrode structure in the cell area; a hard mask pattern disposed on the electrode structure in the connection area, and having a plurality of opening holes; a plurality of contact holes defined in the electrode structure under the opening holes, and exposing pad areas of the electrode layers; and a slit dividing the hard mask pattern into units smaller than the electrode structure in the connection area.

A semiconductor memory device includes an electrode structure including a plurality of electrode layers and a plurality of interlayer dielectric layers which are alternately stacked on a source plate defined with a cell area and a connection area in a first direction; a vertical channel passing through the electrode structure in the cell area; a hard mask pattern disposed on the electrode structure in the connection area, and having a plurality of opening holes; a plurality of contact holes defined in the electrode structure under the opening holes, and exposing pad areas of the electrode layers; and a slit dividing the hard mask pattern into units smaller than the electrode structure in the connection area.

A memory device and a manufacturing for the same are provided. The memory device comprises a channel line, word lines, a first switch, and a second switch. Memory cells for a memory string are defined at intersections between the channel line and the word lines. The first switch is electrically connected with the channel line. The second switch is electrically connected with the channel line. The first switch is electrically connected between the second switch and the memory cells.

A memory device and a manufacturing for the same are provided. The memory device comprises a channel line, word lines, a first switch, and a second switch. Memory cells for a memory string are defined at intersections between the channel line and the word lines. The first switch is electrically connected with the channel line. The second switch is electrically connected with the channel line. The first switch is electrically connected between the second switch and the memory cells.

A memory includes S storage blocks, N global bitlines, and a signal amplification circuit. Each of the S storage blocks is connected to the N global bitlines, the N global bitlines are connected to the signal amplification circuit, the signal amplification circuit is configured to amplify electrical signals on the N global bitlines, and each storage block includes N columns of storage units, N local bitlines, and N bitline switches. In each storage block, storage units in an i.sup.th column are connected to an i.sup.th local bitline, the i.sup.th local bitline is connected to an i.sup.th global bitline by using an i.sup.th bitline switch in the N bitline switches. A memory array is fine-grained, so that i.sup.th local bitlines in the S storage blocks can share one global bitline.

The disclosure provides a semiconductor storage device that realizes high integration and improves reliability. A bit line selection circuit (100) of a flash memory includes transistors (BLSeO, BLSeE, BLSoO, BLSoE) in the column direction of bit lines (BL0-BL3), selecting a bit line pair composed of an even-numbered bit line (BL0) and an odd-numbered bit line (BL3) is selected by the transistors, in which a bit line pair (BL1, BL2) adjacent to the selected bit line pair is set as a non-selected bit line pair, and the selected bit line pair (BL0, BL3) is connected to page buffer/sensing circuit through an output node (BLS0, BLS1).

The disclosure provides a semiconductor storage device that realizes high integration and improves reliability. A bit line selection circuit (100) of a flash memory includes transistors (BLSeO, BLSeE, BLSoO, BLSoE) in the column direction of bit lines (BL0-BL3), selecting a bit line pair composed of an even-numbered bit line (BL0) and an odd-numbered bit line (BL3) is selected by the transistors, in which a bit line pair (BL1, BL2) adjacent to the selected bit line pair is set as a non-selected bit line pair, and the selected bit line pair (BL0, BL3) is connected to page buffer/sensing circuit through an output node (BLS0, BLS1).

A memory includes: a plurality of row lines; a plurality of column lines; and a plurality of memory cells each of which is coupled to one row line among the row lines and one column line among the column lines, wherein memory cells corresponding to a row line which is selected based on a row address among the row lines are simultaneously activated, and data are read from memory cells corresponding to column lines which are selected based on a column address among the activated memory cells, and the selected column lines are not adjacent to each other.

A nonvolatile memory device comprises a first semiconductor layer including, an upper substrate, and a memory cell array in which a plurality of word lines on the upper substrate extend in a first direction and a plurality of bit lines extend in a second direction. The nonvolatile memory device comprises a second semiconductor layer under the first semiconductor layer in a third direction perpendicular to the first and second directions, the second semiconductor layer including, a lower substrate, and a substrate control circuit on the lower substrate and configured to output a bias voltage to the upper substrate. The second semiconductor layer is divided into first through fourth regions, each of the first through fourth regions having an identical area, and the substrate control circuit overlaps at least a portion of the first through fourth regions in the third direction.

A nonvolatile memory device comprises a first semiconductor layer including, an upper substrate, and a memory cell array in which a plurality of word lines on the upper substrate extend in a first direction and a plurality of bit lines extend in a second direction. The nonvolatile memory device comprises a second semiconductor layer under the first semiconductor layer in a third direction perpendicular to the first and second directions, the second semiconductor layer including, a lower substrate, and a substrate control circuit on the lower substrate and configured to output a bias voltage to the upper substrate. The second semiconductor layer is divided into first through fourth regions, each of the first through fourth regions having an identical area, and the substrate control circuit overlaps at least a portion of the first through fourth regions in the third direction.