A collimator according to an embodiment is a collimator for use in an X-ray CT apparatus and includes a collimator module and resin. The collimator module includes a first scattered ray eliminating part and a second scattered ray eliminating part. The resin is provided between the first scattered ray eliminating part and the second scattered ray eliminating part and is configured to hold the first scattered ray eliminating part and the second scattered ray eliminating part.

A collimator according to an embodiment is a collimator for use in an X-ray CT apparatus and includes a collimator module and resin. The collimator module includes a first scattered ray eliminating part and a second scattered ray eliminating part. The resin is provided between the first scattered ray eliminating part and the second scattered ray eliminating part and is configured to hold the first scattered ray eliminating part and the second scattered ray eliminating part.

A target carrier assembly includes a housing, a target, and a collimator. The housing includes a collimator compartment and a target compartment divided by a vacuum window foil, the collimator being removably disposed within the collimator compartment, and the target being disposed within the target compartment. The collimator compartment is attached to a cyclotron beam line in the irradiation position, and the target compartment is in fluid communication with a cooling fluid supply line and a cooling fluid return line in the irradiation position. The target is cooled by the cooling fluid from the cooling fluid supply line. The collimator directs a particle beam from the cyclotron beam line to irradiate the target and includes a beam entry diameter and a beam exit diameter. The collimator is in thermal contact with the collimator compartment.

A target carrier assembly includes a housing, a target, and a collimator. The housing includes a collimator compartment and a target compartment divided by a vacuum window foil, the collimator being removably disposed within the collimator compartment, and the target being disposed within the target compartment. The collimator compartment is attached to a cyclotron beam line in the irradiation position, and the target compartment is in fluid communication with a cooling fluid supply line and a cooling fluid return line in the irradiation position. The target is cooled by the cooling fluid from the cooling fluid supply line. The collimator directs a particle beam from the cyclotron beam line to irradiate the target and includes a beam entry diameter and a beam exit diameter. The collimator is in thermal contact with the collimator compartment.

A neutron beam generating device includes a supporting base, an outer shell, a target material, and a first pipe. The outer shell surrounds a rotating axis, rotatable engages the supporting base, and has a first opening. The target material is disposed in the outer shell. The first pipe extends from the first opening of the outer shell along the rotating axis to the target material. The first pipe is configured to transmit an ion beam to bombard the target material to generate a neutron beam.

A neutron beam generating device includes a supporting base, an outer shell, a target material, and a first pipe. The outer shell surrounds a rotating axis, rotatable engages the supporting base, and has a first opening. The target material is disposed in the outer shell. The first pipe extends from the first opening of the outer shell along the rotating axis to the target material. The first pipe is configured to transmit an ion beam to bombard the target material to generate a neutron beam.

Scatter correction for tomography: for each position, two images are acquired, a first image without and a second image with a scatter reducing aperture plate (50). A scatter image is calculated by subtracting the second image from the first image. The apertures (48) in the scatter reducing plate (50) are arranged hexagonally in order to optimise the packaging density of the apertures.

Scatter correction for tomography: for each position, two images are acquired, a first image without and a second image with a scatter reducing aperture plate (50). A scatter image is calculated by subtracting the second image from the first image. The apertures (48) in the scatter reducing plate (50) are arranged hexagonally in order to optimise the packaging density of the apertures.

Various methods and systems are provided for x-ray imaging. In one embodiment, a method includes acquiring, with an x-ray detector, an x-ray image of a subject, determining a transformation that minimizes anti-scatter grid artifacts in the x-ray image, correcting the x-ray image according to the transformation to generate a corrected image, and outputting the corrected image. In this way, artifacts arising from a misalignment of an anti-scatter grid between the calibration and the acquisition may be reduced.

A method of manufacturing an integrated circuit (IC) device includes forming a photoresist layer on a substrate, and exposing the photoresist layer to light by using a photolithographic apparatus including a light generator. The light generator includes a chamber having a plasma generation space, an optical element in the chamber, and a debris shielding assembly between the optical element and the plasma generation space in the chamber, and the debris shielding assembly includes a protective film facing the optical element and being spaced apart from the optical element with a protective space therebetween, the protective space including an optical path, and a protective frame to support the protective film and to shield the protective space from the plasma generation space.