A planning apparatus (70) determines irradiation parameter data (67) for a charged particle irradiation system (1), which radiates charged particles generated by an ion source (2) to a target (80) by accelerating the charged particles by means of a linear accelerator (4) and a synchrotron (5). The planning apparatus is provided with: a planning program (73), which determines the irradiation parameter data (67) with respect to one target (80) by combining charged particles of a plurality of kinds of ion species; and a CPU (71) for executing the planning program. Consequently, the irradiation planning apparatus capable of performing irradiation with desirable dose distribution with respect to the target, the irradiation planning program, an irradiation plan determining method, and the charged particle irradiation system are provided.

To irradiate a target with a beam of energetic electrically charged particles, the beam is formed and imaged onto a target, where it generates a pattern image composed of pixels. The pattern image is moved along a path on the target over a region to be exposed, and this movement defines a number of stripes covering said region in sequential exposures and having respective widths. The number of stripes is written in at least two sweeps which each have a respective general direction, but the general direction is different for different sweeps, e.g. perpendicular to each other. Each stripe belongs to exactly one sweep and runs substantially parallel to the other stripes of the same sweep, namely, along the respective general direction. For each sweep the widths, as measured across said main direction, of the stripes of one sweep combine into a cover of the total width of the region.

An edge-curing device may comprise a cylindrical lens, a linear array of light-emitting elements, and an aperture, each aligned symmetrically about a longitudinal plane in a housing, wherein the cylindrical lens is positioned between the linear array of light-emitting elements and the aperture, the aperture spans the length of the cylindrical lens and is positioned directly adjacent to an emitting face of the cylindrical lens, and light emitted from the linear array of light-emitting elements and passing through the cylindrical lens is emitted from the emitting face and focused by the aperture within a beam width centered about the longitudinal plane.

An edge-curing device may comprise a cylindrical lens, a linear array of light-emitting elements, and an aperture, each aligned symmetrically about a longitudinal plane in a housing, wherein the cylindrical lens is positioned between the linear array of light-emitting elements and the aperture, the aperture spans the length of the cylindrical lens and is positioned directly adjacent to an emitting face of the cylindrical lens, and light emitted from the linear array of light-emitting elements and passing through the cylindrical lens is emitted from the emitting face and focused by the aperture within a beam width centered about the longitudinal plane.

Provided herein is an integrated target structure for generating charged particles. The integrated target structure according to an embodiment of the present disclosure includes a target layer emitting charged particles depending on an irradiation of a laser beam, an optical component controlling at least one of the laser beam and the charged particles, and a support body supporting the target layer and the optical component using one structure.

Provided herein is an integrated target structure for generating charged particles. The integrated target structure according to an embodiment of the present disclosure includes a target layer emitting charged particles depending on an irradiation of a laser beam, an optical component controlling at least one of the laser beam and the charged particles, and a support body supporting the target layer and the optical component using one structure.

The invention comprises a method and apparatus for imaging and treating a tumor of a patient using positively charged particles and X-rays. A mounting rail, supporting a scintillation detection system element and an X-ray detection system element, is alternatingly extended/retracted to position the required detection system element opposite a patient tumor position from an exit nozzle of a beam transport system connected to an accelerator of the positively charged particles, where the positively charged particles are alternatingly used to treat the tumor via irradiation. The mounting rail optionally rotates with rotation of the exit nozzle about the patient, such as with rotation of a support gantry.

The invention comprises a method and apparatus for imaging and treating a tumor of a patient using positively charged particles and X-rays. A mounting rail, supporting a scintillation detection system element and an X-ray detection system element, is alternatingly extended/retracted to position the required detection system element opposite a patient tumor position from an exit nozzle of a beam transport system connected to an accelerator of the positively charged particles, where the positively charged particles are alternatingly used to treat the tumor via irradiation. The mounting rail optionally rotates with rotation of the exit nozzle about the patient, such as with rotation of a support gantry.

Embodiments of the present invention disclose methods and systems for producing an adaptive pencil beam having an adjustable lateral beam size and Bragg-peak width. According to one disclosed embodiment, an apparatus for producing an adaptive pencil beam is disclosed. The apparatus includes a set of momentum band expanders configured to widen a momentum spread of a pencil beam, where a momentum band expander is selected from the set of momentum band expanders to receive the pencil beam, and a slit at dispersive focus of two dipole magnets to adjust a width of a Bragg-peak of the pencil beam. According to another disclosed embodiment, a method for producing an adaptive pencil beam with an adjustable lateral beam is disclosed. The method includes selecting a scatter foil, or setting of a defocusing/focusing magnet, and adjusting a lateral size of the pencil beam.

An apparatus for irradiating semiconductor material is disclosed having, a laser generating a primary laser beam, an optical system and a means for shaping the primary laser beam, comprising a plurality of apertures for shaping the primary laser beam into a plurality of secondary laser beams. Wherein the shape and/or size of the individual apertures corresponds to that of a common region of a semiconductor material layer to be irradiated. The optical system is adapted for superposing the secondary laser beams to irradiate said common region. Further, the use of such an apparatus in semiconductor device manufacturing is disclosed.