In this patent, we teach methods to generate coherent X-ray and UUV rays beams for X ray and UUV microscopes using intense femtosecond pulses resulting the Ultra-Supercontinuum (USC) and Higher Harmonic Generation (HHG) from χ3 and χ.sup.5 media produce from electronic and molecular Kerr effect. The response of n.sub.2 (χ3) and n.sub.4 (χ5) at the optical frequency from instantaneously response of carrier phase of envelope results in odd HHG and spectral broadening about each harmonic on the anti-Stokes side of the pump pulse at wo typically in the visible, NIR, and MIR. From the slower molecular Kerr response on femtosecond to picosecond from orientation and molecular motion on n.sub.2 and n.sub.4 which follow the envelope of optical field of the laser gives rise to extreme broadening without HHG. The resulting spectra extend on the Stokes side towards the IR, RF to DC covering most of the electromagnetic spectrum. These HHG and Super broadening covering UUV to X rays and possibly to gamma ray regime for microscopes.

Disclosed herein is an x-ray interferometer for x-ray phase contrast imaging including an x-ray source, an x-ray source grating, two x-ray phase gratings, an x-ray analyzer grating and an x-ray detector. An alternative interferometer includes a periodically structured x-ray source, two x-ray phase gratings, an x-ray analyzer grating and an x-ray detector. The phase gratings are placed much closer to the x-ray detector than to the x-ray source and the image object is positioned upstream and close to the phase gratings to achieve high sensitivity and large field-of-view simultaneously.

The present invention relates to a method, and a corresponding device, for testing a radius of curvature and/or for detecting inhomogeneities of a curved X-ray grating for a grating-based X-ray imaging device. The method comprises generating a beam of light diverging from a source point, propagating along a main optical axis and having a line-shaped beam profile. The method comprises reflecting the beam off a concave reflective surface of the grating. A principal axis of the concave reflective surface coincides with the main optical axis and the source point is at a predetermined distance from a point where the main optical axis intersects the concave reflective surface. The method comprises determining whether a projection of the reflected beam in a plane at or near the source point is present outside a central region around the source point, in which an absence of this projection outside the central region indicates that a radius of curvature of the concave reflective surface corresponds to the predetermined distance and/or that the reflective surface is substantially homogeneously curved along a curve formed by the beam impinging on the concave reflective surface.

A system for high-resolution high-contrast x-ray ghost diffraction comprises: A) a laboratory x-ray source configured to provide an input beam; B) a diffuser configured to induce intensity fluctuations in the input beam; C) a beam splitter configured to split the input beam into: i) a test arm comprising an object and a single-pixel detector; and ii) a reference arm comprising one of: (a) a multi-pixel detector and (b) a single-pixel detector and an aperture or a scanning slit configured to simulate a one or two dimensional multi-pixel detector; and D) a processor configured to receive output intensity measurements of the detectors in the test arm and the reference arm, to record the output intensity measurements at different rotational positions of the rotating diffuser, to correlate the output intensity measurements, and to use the correlated output measurements to reconstruct a diffraction pattern of the object; wherein the object is placed as close as possible to the beam splitter and the detectors in the test arm and the reference arm are equidistant from the beam splitter.

An apparatus for X-ray imaging is provided. An X-ray source provides an X-ray along an X-ray beam path. A holographic medium is along the X-ray beam path. An X-ray phase grating is between the X-ray source and the holographic medium along the X-ray beam path. A readout beam source provides a readout beam along a readout beam path. A readout detector is along the readout beam path, wherein the holographic medium is along the readout beam path.

A defect detection and imaging system is presented for performing microscopy and/or spectroscopy on a device under test. The defect detection system comprises a controller for toggling the state of a light source, which may allow for fast simultaneous high-speed inspection and high-resolution review imaging of the device under test by the same system and simultaneously deliver inspection, computer generated reconstructions or tomography, and defect review on sub second time-scales. The defect detection system further comprises a converter for converting X-ray images of the device under test into photoelectron contrast images to achieve nanometer scale measurement resolution in non-destructive and real-time fashion, to complement or replace destructive TEM. These photoelectron contrast images may be received by a detector to output an electronic format map or 3D/4D image that indicates one or more features of the device under test.

A method is for producing a scattered beam collimator starting from a lower side and extending in a build-up direction as far as an upper side, and having a large number of X-ray absorbing partitions, and in which pass-through channels for unscattered X-ray radiation are embodied between the partitions. A lithographic process is used, by which the partitions of the scattered beam collimator are formed from a photoresist into which an X-ray absorbing material is mixed.

The present invention relates to a detector arrangement for an X-ray phase contrast system (5), the detector arrangement (1) comprising: a scintillator (11); an optical grating (12); and a detector (13); wherein the optical grating (12) is arranged between the scintillator (11) and the detector (13); wherein the scintillator (11) converts X-ray radiation (2) into optical radiation (3); wherein the optical grating (12) is configured to be an analyzer grating being adapted to a phase-grating (21) of an X-ray phase contrast system (5); wherein the optical path between the optical grating (12) and the scintillator (11) is free of focusing elements for optical radiation. The present invention further relates to a method (100) for performing X-ray phase contrast imaging with a detector arrangement (1) mentioned above. The invention avoids the use of an X-ray absorption grating as G2 grating in an X-ray phase contrast interferometer system.

There is provided a method and system for filling micromechanical structures with x-ray absorbing material. The method includes providing a wetting layer for enabling melted x-ray absorbing material to flow over the surface of an overall structure including the micromechanical structures, melting the x-ray absorbing material, and applying gas pressure to press the melted x-ray absorbing material into the micromechanical structures.

The invention relates to a method of manufacturing a structured grating, a corresponding structured grating component (1) and an imaging system. The method comprising the steps of: providing (110, 120, 130) a catalyst (30) on a substrate (20), the catalyst (20) having a grating pattern; growing (140) nanostructures (50) on the catalyst (30) so as to form walls (52) and trenches (54) based on the grating pattern; and filling (160) the trenches (54) between the walls (52) of nanostructures (50) using an X-ray absorbing material (70). The invention provides an improved method for manufacturing a structured grating and such structured grating component (1), which is particularly suitable for dark-field X-ray imaging or phase-contrast imaging.