G01B5/0009

PLANAR ROTARY AIR BEARING STAGE
20210324912 · 2021-10-21 ·

Various embodiments of the present technology generally relate to precise rotary motion control systems. More specifically, some embodiments relate to systems, methods, and means for providing pressure to a non-contact rotary system. In some embodiments, the rotary system comprises a rotary shaft that can rotate three hundred and sixty degrees continuously. In order for the rotary system to be entirely non-contact with any surfaces of surrounding components or housing, pressure must be supplied to a rotary air bearing that floats the rotary unit above a surface. In some examples, the bottom air bearing is a vacuum preloaded (VPL) air bearing. As such, the VPL air bearing requires a supply of positive pressure and a supply of negative pressure to stabilize the rotary unit. The present technology provides a mechanism for providing pneumatic air to the air bearing without a physical connection to the rotary shaft or air bearing.

MEASUREMENT METHOD, IMPRINT APPARATUS, AND ARTICLE MANUFACTURING METHOD
20210318610 · 2021-10-14 ·

The present invention provides a measurement method including while driving a measurement target region of a surface of a substrate in a first direction with respect to a measurement unit, obtaining first measurement information indicating a height of the measurement target region in each of a plurality of first measurement lines parallel to the first direction and different from each other by measuring each measurement line by the measurement unit, and while driving the measurement target region with respect to the measurement unit in a second direction crossing all of the plurality of first measurement lines, obtaining second measurement information indicating a height of the measurement target region in one second measurement line parallel to the second direction by measuring the second measurement line by the measurement unit.

METHOD AND DEVICE FOR ASCERTAINING THE LATERAL STRIP CONTOUR OR THE POSITION OF THE STRIP EDGES OF A RUNNING METAL STRIP
20210260635 · 2021-08-26 ·

A device for ascertaining the lateral strip contour and/or the position of the strip edges of a metal strip. It includes at least one sensing element for ascertaining suitable measurement data. The sensing element is integrated into a lateral guide (17) together with a main part module of the metal strip conveying device. The lateral guide (17) includes at least one wear element (15a, 15b, 15c) which is arranged in the lateral guide and which comprises a wear element adjusting device that can be rotated about a rotational axis (20) substantially perpendicular to a guide plane of the lateral guide (17). The wear element (15a, 15b, 15c) together with the wear element adjusting device is designed as a sensing element. In an operating method, at least one sensing element (15a, 15b, 15c) is brought into contact with a lateral edge at a starting time, and suitable measurement data is ascertained using the sensing element while the metal strip runs past the sensing element. The strip course can be corrected on the basis of the ascertained measurement data using corrective measures on one or more roll stands and/or on one or more lateral guides (17) of the rolling mill.

Three-dimensional coordinate measurement apparatus

A three-dimensional coordinate measurement apparatus capable of reducing shaking of a Y carriage and improving measurement accuracy. The Y carriage is supported by two strut members which are across a surface plate and movable in a Y-axis direction. The two strut members include a first strut member having a driving mechanism and a second strut member which moves following the first strut member. A guide portion parallel to the Y-axis direction is formed in the surface plate on a first strut member side. Side surface support members support the first strut member on the surface plate by holding both opposed side surfaces of the guide portion. The driving mechanism includes a roller having an axis perpendicular to a surface plate surface, and the roller is brought into contact with one side surface of the guide portion and rolled to move the Y carriage relatively to the surface plate.

Planar rotary air bearing stage

Various embodiments of the present technology generally relate to precise rotary motion control systems. More specifically, some embodiments relate to systems, methods, and means for providing pressure to a non-contact rotary system. In some embodiments, the rotary system comprises a rotary shaft that can rotate three hundred and sixty degrees continuously. In order for the rotary system to be entirely non-contact with any surfaces of surrounding components or housing, pressure must be supplied to a rotary air bearing that floats the rotary unit above a surface. In some examples, the bottom air bearing is a vacuum preloaded (VPL) air bearing. As such, the VPL air bearing requires a supply of positive pressure and a supply of negative pressure to stabilize the rotary unit. The present technology provides a mechanism for providing pneumatic air to the air bearing without a physical connection to the rotary shaft or air bearing.

Linear drive mechanism and shape measuring machine
11025151 · 2021-06-01 · ·

A linear drive mechanism which moves a detector having sensitivity in a first axial direction, relatively to a workpiece in a second axial direction orthogonal to the first axial direction, the linear drive mechanism includes: a drive shaft extending in the second axial direction; a mover which is supported in a non-contact fashion by the drive shaft and configured to move along the drive shaft integrally with the detector or the workpiece; a guide provided at a position deviated relative to the drive shaft in a third axial direction orthogonal to both the first axial direction and the second axial direction, the guide parallel to the drive shaft; and a resistance force generator which is provided on one of the mover and the guide, and is in contact with the other of the mover and the guide, the resistance force generator generates a resistance force which resists against movement of the mover.

Form measuring apparatus
11022418 · 2021-06-01 · ·

A form measuring apparatus that is provided with a form measuring device that includes a detection device detecting a position on a surface of an object, and a feeding mechanism that moves the form measuring device in an axis direction. The feeding mechanism includes a drive shaft provided so as to be rotatable around an axis; a traction nut that is provided so as to hold the drive shaft from a direction orthogonal to an axis line of the drive shaft, and that also can switch between a frictional contacting state frictionally contacting the drive shaft and a separation state separated from the drive shaft; and a bracket coupling the traction nut and the form measuring device. The bracket is provided with a motor that includes a rotation shaft that is inclined with respect to the axis line, and the motor rotates the drive shaft.

Woodworking machinery jig and fixture system
11020808 · 2021-06-01 ·

Jigs and fixtures for aligning, guiding, and/or holding a workpiece on woodworking machinery during a woodworking operation are described, as well as methods of making, modifying, and using jigs and fixtures.

3D floating support system and related geometry-detecting machine of slender articles
11002532 · 2021-05-11 · ·

A support system of a slender article in a geometry-detecting machine includes a plurality of vertical constraint points (1) with which the slender article is in contact, wherein the vertical constraint points (1) are coupled in pairs by interconnection arms (4) in turn including a constraint joint (3, 5) provided with a universal joint mechanism which leaves, to the arms (4), two rotational degrees of freedom (32, 34) along two orthogonal axes passing in the proximity of the longitudinal axis of the article, the constraint joints (3, 5) possibly being themselves similarly coupled in pairs until converging, in a multiple-layer sequence, towards a single constraint point.

Measuring system with a ball bearing guide unit for a measuring instrument

A measuring system (15) includes a measuring arm receiving unit (18) mounted on the housing (49) or on an axial pin (30) connected to the housing (49) for conjoint rotation so as to be rotatable or pivotable about the axis of rotation (D). A measuring arm (16) can be arranged on the measuring arm receiving unit (18). A motor unit (24) generates a motor torque about the axis of rotation (D) on the measuring arm receiving unit (18). The measuring arm unit (18) is mounted by a ball bearing guide unit (39) to be rotatable about the axis of rotation (D) in the peripheral direction and displaceably along the axis of rotation (D) in the axial direction A. An axial position of the measuring arm unit (18) in the axial direction is defined with the aid of a magnetic axial bearing device (46) and is maintained during operation.