Patent classifications
G01B5/0009
Improved Gauge System
A linear gauge system for locating adjacent a weight bearing elongated frame able to support an elongated product which is to be processed linearly, the linear gauge system including a linear gauge, wherein the linear gauge is made precisely from a lightweight material; b. an elongated support wherein the elongated support is formed of stronger material than the linear gauge; and c. a carriage mounted on the linear gauge to which is mounted a movable platform which can engage a workpiece on the adjacent weight bearing elongated frame; wherein the linear gauge is formed precisely separately to the elongated support and mounted to the elongated support to provide the strength to the linear gauge.
Vertical displacement detecting device
The disclosure relates to a vertical displacement detecting device, comprising a fixed frame, a first guiding rail and a second guiding rail. The first guiding rail and the second guiding rail are respectively provided with a first sliding block and a second sliding block. The top or bottom surface of the blocking plate is contacted with a displacement detector. The second sliding block is provided with a traction wire. A top end of the fixed frame is provided with a pulley and a traction wire, and the traction wire is wound around the pulley, one end of the traction wire is connected with the first sliding block and the other end is connected to the second sliding block. The disclosure has the advantages of simple structure, accurate precision, low cost and simple realization method, and it is advantageous for wide use.
METROLOGY SYSTEM
Apparatuses, systems and methods associated with a metrology system for high-speed, non-contact coordinate measurements of parts are disclosed herein. In embodiments, the metrology system includes a metrology bridge to be coupled to a measurement assembly. The measurement assembly may include a stage moveable across multiple independent axes. The bridge may include a housing, mounting members coupled to the housing, and a plurality of sensors mounted within the housing. The mounting members may rotatably couple the housing to the measurement assembly. Further, sensor elements of the plurality of sensor devices may be aligned along a length of the housing and may be directed out of the housing.
TRIGGER MANAGEMENT DEVICE FOR MEASUREMENT EQUIPMENT
Apparatuses, systems and methods associated with a trigger management device for managing triggering of sensors within measurement equipment are disclosed herein. In embodiments, a trigger management device may include trigger circuitry coupled to a sensor, the trigger circuitry to determine an amount of delay from trigger transmission to data capture for the sensor, and transmit a trigger to the sensor, the trigger to cause the sensor to capture sensor data. The trigger management device may further include encoder circuitry coupled to one or more encoders, the one or more encoders to indicate positions of one or more actuators or motors, the encoder circuitry to capture encoder data from the one or more encoders at a time that is the amount of delay after transmission of the trigger, wherein the encoder data indicates current positions of the one or more actuators or motors. Other embodiments may include circuitry to manage and/or transmit encoder and other data to multiple devices.
Measurement method, imprint apparatus, and article manufacturing method
The present invention provides a measurement method including while driving a measurement target region of a surface of a substrate in a first direction with respect to a measurement unit, obtaining first measurement information indicating a height of the measurement target region in each of a plurality of first measurement lines parallel to the first direction and different from each other by measuring each measurement line by the measurement unit, and while driving the measurement target region with respect to the measurement unit in a second direction crossing all of the plurality of first measurement lines, obtaining second measurement information indicating a height of the measurement target region in one second measurement line parallel to the second direction by measuring the second measurement line by the measurement unit.
Method and device for ascertaining the lateral strip contour or the position of the strip edges of a running metal strip
A device for ascertaining the lateral strip contour and/or the position of the strip edges of a metal strip. It includes at least one sensing element for ascertaining suitable measurement data. The sensing element is integrated into a lateral guide together with a main part module of the metal strip conveying device. The lateral guide includes at least one wear element which is arranged in the lateral guide and which comprises a wear element adjusting device that can be rotated about a rotational axis substantially perpendicular to a guide plane of the lateral guide. The wear element together with the wear element adjusting device is designed as a sensing element. In an operating method, at least one sensing element is brought into contact with a lateral edge at a starting time, and suitable measurement data is ascertained using the sensing element while the metal strip runs past the sensing element.
Measurement system having a cooperative robot and three-dimensional imager
A measurement system and a method of measuring an object is provided. The system includes a measurement platform having a planar surface. At least two optical sensors are coupled to the measurement platform that emit light in a plane and determines a distance to an object based on a reflection of the light. A linear rail is coupled to the measurement platform. A cooperative robot is coupled to move along the linear rail. A 3D measuring system is coupled to the end of the robot. A controller coupled to the at least two optical sensors, the robot, and the 3D measuring system, the controller changing the speed of the robot and the 3D measuring system to less than a threshold in response to a distance measured by at least one of the at least two optical sensors to a human operator being less than a first distance threshold.
Coordinate measuring machine with carbon fiber air bearings
A coordinate measuring machine has a base for supporting an object, a movable assembly having a probe for measuring the object, and a rail movably guiding the movable assembly along its length. The rail includes carbon fiber and has a rail CTE. The coordinate measuring machine also has an air bearing member circumscribing the rail and fixedly coupled with the movable assembly. The air bearing member has a member CTE, which is about equal to the rail engineered CTE.
INTERFEROMETRIC TOUCH PROBE
A touch probe for sensing the position of a surface, having a housing and a moving assembly supported within the housing and including a flexible reflective element, a spacer element, and a semitransparent element, wherein a reflective surface of the flexible reflective element and a surface of the semitransparent element opposing the reflective surface are separated by the spacer element, and a stylus connected to the flexible reflective element. The moving assembly and stylus are configured such that movement of the stylus responsive to a force on the stylus causes the flexible reflective element to flex and change distances between points on the reflective surface of the flexible reflective element and on the opposing surface of the semitransparent element. A coherent light source provides coherent light incident upon the semitransparent element and directed through the semitransparent element towards the reflective surface of the flexible reflective element, such that interference fringes are created dependent upon separation distances between the reflective surface of the reflective element and the opposing surface of the semitransparent element. A detector senses changes in the interference fringes patterns in response to flexing of the flexible element.
FORM MEASURING APPARATUS
A form measuring apparatus includes a base; an arm capable of swinging relative to the base; a coupler coupling the base and the arm, and having a deformation region that is capable of elastic deformation between the base and the arm; and a distortion detector installed in the deformation region. In the form measuring apparatus, a stylus is mounted to the arm and can slide along a surface of a work piece.